JPS58117055U - Ｘ線検出器を備えた電子顕微鏡における試料装置 - Google Patents

Ｘ線検出器を備えた電子顕微鏡における試料装置

Info

Publication number
JPS58117055U
JPS58117055U JP1434282U JP1434282U JPS58117055U JP S58117055 U JPS58117055 U JP S58117055U JP 1434282 U JP1434282 U JP 1434282U JP 1434282 U JP1434282 U JP 1434282U JP S58117055 U JPS58117055 U JP S58117055U
Authority
JP
Japan
Prior art keywords
sample
ray detector
spring member
electron microscope
microscope equipped
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP1434282U
Other languages
English (en)
Japanese (ja)
Other versions
JPS6328519Y2 (enrdf_load_stackoverflow
Inventor
公郎 大井
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Jeol Ltd
Original Assignee
Jeol Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Jeol Ltd filed Critical Jeol Ltd
Priority to JP1434282U priority Critical patent/JPS58117055U/ja
Publication of JPS58117055U publication Critical patent/JPS58117055U/ja
Application granted granted Critical
Publication of JPS6328519Y2 publication Critical patent/JPS6328519Y2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Analysing Materials By The Use Of Radiation (AREA)
JP1434282U 1982-02-04 1982-02-04 Ｘ線検出器を備えた電子顕微鏡における試料装置 Granted JPS58117055U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1434282U JPS58117055U (ja) 1982-02-04 1982-02-04 Ｘ線検出器を備えた電子顕微鏡における試料装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1434282U JPS58117055U (ja) 1982-02-04 1982-02-04 Ｘ線検出器を備えた電子顕微鏡における試料装置

Publications (2)

Publication Number Publication Date
JPS58117055U true JPS58117055U (ja) 1983-08-10
JPS6328519Y2 JPS6328519Y2 (enrdf_load_stackoverflow) 1988-08-01

Family

ID=30026812

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1434282U Granted JPS58117055U (ja) 1982-02-04 1982-02-04 Ｘ線検出器を備えた電子顕微鏡における試料装置

Country Status (1)

Country Link
JP (1) JPS58117055U (enrdf_load_stackoverflow)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2019008982A (ja) * 2017-06-23 2019-01-17 日本電子株式会社 試料ホルダーおよび電子顕微鏡

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5083091A (enrdf_load_stackoverflow) * 1973-11-22 1975-07-04
JPS5351170U (enrdf_load_stackoverflow) * 1976-10-05 1978-05-01

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5083091A (enrdf_load_stackoverflow) * 1973-11-22 1975-07-04
JPS5351170U (enrdf_load_stackoverflow) * 1976-10-05 1978-05-01

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2019008982A (ja) * 2017-06-23 2019-01-17 日本電子株式会社 試料ホルダーおよび電子顕微鏡

Also Published As

Publication number Publication date
JPS6328519Y2 (enrdf_load_stackoverflow) 1988-08-01

Similar Documents

Publication Publication Date Title
JPS58117055U (ja) Ｘ線検出器を備えた電子顕微鏡における試料装置
JPS6065967U (ja) 走査電子顕微鏡
JPS5931146U (ja) 電子顕微鏡等の試料装置
JPS58174856U (ja) 電子顕微鏡
JPS60136048U (ja) 走査電子顕微鏡装置
JPS5988858U (ja) 電子顕微鏡
JPS5945849U (ja) イオン注入装置
JPS5937729U (ja) 電子ビ−ム露光装置
JPS5966852U (ja) 荷電粒子分析装置の光学観察装置
JPS5826656U (ja) 多元素同時分析装置に於る試料装置
JPS5945845U (ja) デフレクトロンの静電偏向電極
JPS59262U (ja) 走査電子顕微鏡
JPS6130956U (ja) 反射式電子回折用電子線照射装置
JPS5971563U (ja) 二次電子検出器
JPS58113255U (ja) 電子顕微鏡等における軸合せ装置
JPS6037163U (ja) 走査電子顕微鏡
JPS5869934U (ja) 電子ビ−ム描画装置の磁気シ−ルドカバ−
JPS5824952U (ja) マクロアナライザに於るスキヤンコイル装置
JPS60192358U (ja) 荷電粒子線装置
JPS5862546U (ja) 試料装置
JPS5895233U (ja) 液体金属イオン源
JPS5961462U (ja) 荷電粒子線のエネルギ−分析装置
JPS58174853U (ja) 電子顕微鏡用試料ホ−ルダ
JPS58110954U (ja) 電子顕微鏡等の試料筒着脱装置
JPS5912461U (ja) 走査電子顕微鏡