JPS58117053U - 電界電離型イオン源 - Google Patents

電界電離型イオン源

Info

Publication number
JPS58117053U
JPS58117053U JP1434382U JP1434382U JPS58117053U JP S58117053 U JPS58117053 U JP S58117053U JP 1434382 U JP1434382 U JP 1434382U JP 1434382 U JP1434382 U JP 1434382U JP S58117053 U JPS58117053 U JP S58117053U
Authority
JP
Japan
Prior art keywords
insulator
ion source
type ion
introduction pipe
ionization type
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP1434382U
Other languages
English (en)
Japanese (ja)
Other versions
JPS6314369Y2 (enExample
Inventor
昌彦 奥貫
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Jeol Ltd
Original Assignee
Jeol Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Jeol Ltd filed Critical Jeol Ltd
Priority to JP1434382U priority Critical patent/JPS58117053U/ja
Publication of JPS58117053U publication Critical patent/JPS58117053U/ja
Application granted granted Critical
Publication of JPS6314369Y2 publication Critical patent/JPS6314369Y2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Physical Or Chemical Processes And Apparatus (AREA)
  • Electron Sources, Ion Sources (AREA)
  • Electron Tubes For Measurement (AREA)
  • Drying Of Semiconductors (AREA)
JP1434382U 1982-02-04 1982-02-04 電界電離型イオン源 Granted JPS58117053U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1434382U JPS58117053U (ja) 1982-02-04 1982-02-04 電界電離型イオン源

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1434382U JPS58117053U (ja) 1982-02-04 1982-02-04 電界電離型イオン源

Publications (2)

Publication Number Publication Date
JPS58117053U true JPS58117053U (ja) 1983-08-10
JPS6314369Y2 JPS6314369Y2 (enExample) 1988-04-22

Family

ID=30026813

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1434382U Granted JPS58117053U (ja) 1982-02-04 1982-02-04 電界電離型イオン源

Country Status (1)

Country Link
JP (1) JPS58117053U (enExample)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61240543A (ja) * 1985-04-18 1986-10-25 Jeol Ltd イオン源
JP2009289670A (ja) * 2008-05-30 2009-12-10 Hitachi High-Technologies Corp イオンビーム装置

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61240543A (ja) * 1985-04-18 1986-10-25 Jeol Ltd イオン源
JP2009289670A (ja) * 2008-05-30 2009-12-10 Hitachi High-Technologies Corp イオンビーム装置

Also Published As

Publication number Publication date
JPS6314369Y2 (enExample) 1988-04-22

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