JPS58114437A - 静電吸着方法 - Google Patents

静電吸着方法

Info

Publication number
JPS58114437A
JPS58114437A JP21399481A JP21399481A JPS58114437A JP S58114437 A JPS58114437 A JP S58114437A JP 21399481 A JP21399481 A JP 21399481A JP 21399481 A JP21399481 A JP 21399481A JP S58114437 A JPS58114437 A JP S58114437A
Authority
JP
Japan
Prior art keywords
polarity
adsorption
voltage
switch
once
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP21399481A
Other languages
English (en)
Japanese (ja)
Other versions
JPS614611B2 (enExample
Inventor
Naomichi Abe
阿部　直道
Yuji Furumura
雄二 古村
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to JP21399481A priority Critical patent/JPS58114437A/ja
Publication of JPS58114437A publication Critical patent/JPS58114437A/ja
Publication of JPS614611B2 publication Critical patent/JPS614611B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G09—EDUCATION; CRYPTOGRAPHY; DISPLAY; ADVERTISING; SEALS
    • G09F—DISPLAYING; ADVERTISING; SIGNS; LABELS OR NAME-PLATES; SEALS
    • G09F9/00—Indicating arrangements for variable information in which the information is built-up on a support by selection or combination of individual elements
    • G09F9/30—Indicating arrangements for variable information in which the information is built-up on a support by selection or combination of individual elements in which the desired character or characters are formed by combining individual elements
    • G09F9/37—Indicating arrangements for variable information in which the information is built-up on a support by selection or combination of individual elements in which the desired character or characters are formed by combining individual elements being movable elements
    • G09F9/372—Indicating arrangements for variable information in which the information is built-up on a support by selection or combination of individual elements in which the desired character or characters are formed by combining individual elements being movable elements the positions of the elements being controlled by the application of an electric field

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Theoretical Computer Science (AREA)
  • Jigs For Machine Tools (AREA)
JP21399481A 1981-12-26 1981-12-26 静電吸着方法 Granted JPS58114437A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP21399481A JPS58114437A (ja) 1981-12-26 1981-12-26 静電吸着方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP21399481A JPS58114437A (ja) 1981-12-26 1981-12-26 静電吸着方法

Publications (2)

Publication Number Publication Date
JPS58114437A true JPS58114437A (ja) 1983-07-07
JPS614611B2 JPS614611B2 (enExample) 1986-02-12

Family

ID=16648493

Family Applications (1)

Application Number Title Priority Date Filing Date
JP21399481A Granted JPS58114437A (ja) 1981-12-26 1981-12-26 静電吸着方法

Country Status (1)

Country Link
JP (1) JPS58114437A (enExample)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH04230051A (ja) * 1990-12-27 1992-08-19 Kyocera Corp 静電チャックの制御装置
JP2015162596A (ja) * 2014-02-27 2015-09-07 東京エレクトロン株式会社 基板保持方法、基板保持装置および接合装置
JP2018206935A (ja) * 2017-06-02 2018-12-27 東京エレクトロン株式会社 プラズマ処理装置、静電吸着方法および静電吸着プログラム

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6307728B1 (en) * 2000-01-21 2001-10-23 Applied Materials, Inc. Method and apparatus for dechucking a workpiece from an electrostatic chuck

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH04230051A (ja) * 1990-12-27 1992-08-19 Kyocera Corp 静電チャックの制御装置
JP2015162596A (ja) * 2014-02-27 2015-09-07 東京エレクトロン株式会社 基板保持方法、基板保持装置および接合装置
JP2018206935A (ja) * 2017-06-02 2018-12-27 東京エレクトロン株式会社 プラズマ処理装置、静電吸着方法および静電吸着プログラム

Also Published As

Publication number Publication date
JPS614611B2 (enExample) 1986-02-12

Similar Documents

Publication Publication Date Title
JPH02285980A (ja) 静電チャックの電圧印加方法および電圧印加装置
JP2665242B2 (ja) 静電チャック
ES8502290A1 (es) Un metodo de eliminar un paso de corriente de cortocircuito
DE3879281D1 (de) Elektrostatische haltevorrichtung.
JPH08191099A (ja) 静電チャック及びその製造方法
JPS58114437A (ja) 静電吸着方法
KR850006095A (ko) 정전식 표시장치의 표시정보 교환장치
JPS5516489A (en) Semiconductor resistance device
EP0095283A3 (en) Memory device
US3395446A (en) Voltage controlled switch
JPS5615065A (en) Semiconductor integrated circuit
JPH03102814A (ja) 静電チャック装置
JPH04246843A (ja) 静電チャックの制御装置
KR880702003A (ko) 전기적 매개변수 변화 장치
JP3956620B2 (ja) 静電チャック
JPS56163272A (en) Plasma etching device
JPH1131737A (ja) 静電吸着ステージの印加電圧制御方法
JPH08172123A (ja) 静電吸着装置
JPS58147783A (ja) 液晶表示装置
JPH01251619A (ja) 半導体装置の製造方法
JPS6039840A (ja) ワイヤボンダ用ボ−ル形成装置
JPS57203285A (en) Magnetic bubble storage device
JPS55108750A (en) Manufacturing method of semiconductor device
SU841071A1 (ru) Способ изготовлени тонкопленочныхСХЕМ
JPH0351237A (ja) 静電吸着装置