JPS5810855B2 - タソウハイセンコウゾウノセイホウ - Google Patents

タソウハイセンコウゾウノセイホウ

Info

Publication number
JPS5810855B2
JPS5810855B2 JP50011213A JP1121375A JPS5810855B2 JP S5810855 B2 JPS5810855 B2 JP S5810855B2 JP 50011213 A JP50011213 A JP 50011213A JP 1121375 A JP1121375 A JP 1121375A JP S5810855 B2 JPS5810855 B2 JP S5810855B2
Authority
JP
Japan
Prior art keywords
conductive layer
insulating film
layer
hole
etching
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP50011213A
Other languages
English (en)
Japanese (ja)
Other versions
JPS5186985A (enExample
Inventor
神沢亮策
八木秀幸
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP50011213A priority Critical patent/JPS5810855B2/ja
Publication of JPS5186985A publication Critical patent/JPS5186985A/ja
Publication of JPS5810855B2 publication Critical patent/JPS5810855B2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Electrodes Of Semiconductors (AREA)
  • Production Of Multi-Layered Print Wiring Board (AREA)
  • Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
  • Weting (AREA)
JP50011213A 1975-01-29 1975-01-29 タソウハイセンコウゾウノセイホウ Expired JPS5810855B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP50011213A JPS5810855B2 (ja) 1975-01-29 1975-01-29 タソウハイセンコウゾウノセイホウ

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP50011213A JPS5810855B2 (ja) 1975-01-29 1975-01-29 タソウハイセンコウゾウノセイホウ

Publications (2)

Publication Number Publication Date
JPS5186985A JPS5186985A (enExample) 1976-07-30
JPS5810855B2 true JPS5810855B2 (ja) 1983-02-28

Family

ID=11771697

Family Applications (1)

Application Number Title Priority Date Filing Date
JP50011213A Expired JPS5810855B2 (ja) 1975-01-29 1975-01-29 タソウハイセンコウゾウノセイホウ

Country Status (1)

Country Link
JP (1) JPS5810855B2 (enExample)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6276653A (ja) * 1985-09-30 1987-04-08 Toshiba Corp 半導体集積回路
JPH01255250A (ja) * 1988-04-05 1989-10-12 Fujitsu Ltd 多層配線形成方法
JPH03291993A (ja) * 1990-04-10 1991-12-24 Fujitsu Ltd ポリイミド多層基板及びその製造方法

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS50107876A (enExample) * 1974-01-30 1975-08-25

Also Published As

Publication number Publication date
JPS5186985A (enExample) 1976-07-30

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