JPS5810160Y2 - 電子線照射装置 - Google Patents

電子線照射装置

Info

Publication number
JPS5810160Y2
JPS5810160Y2 JP1976117130U JP11713076U JPS5810160Y2 JP S5810160 Y2 JPS5810160 Y2 JP S5810160Y2 JP 1976117130 U JP1976117130 U JP 1976117130U JP 11713076 U JP11713076 U JP 11713076U JP S5810160 Y2 JPS5810160 Y2 JP S5810160Y2
Authority
JP
Japan
Prior art keywords
electron beam
extraction window
beam extraction
irradiation device
cooling
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP1976117130U
Other languages
English (en)
Japanese (ja)
Other versions
JPS5335399U (nl
Inventor
敏郎 丸山
国彦 石田
Original Assignee
三菱電機株式会社
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 三菱電機株式会社 filed Critical 三菱電機株式会社
Priority to JP1976117130U priority Critical patent/JPS5810160Y2/ja
Publication of JPS5335399U publication Critical patent/JPS5335399U/ja
Application granted granted Critical
Publication of JPS5810160Y2 publication Critical patent/JPS5810160Y2/ja
Expired legal-status Critical Current

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  • Particle Accelerators (AREA)
JP1976117130U 1976-08-31 1976-08-31 電子線照射装置 Expired JPS5810160Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1976117130U JPS5810160Y2 (ja) 1976-08-31 1976-08-31 電子線照射装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1976117130U JPS5810160Y2 (ja) 1976-08-31 1976-08-31 電子線照射装置

Publications (2)

Publication Number Publication Date
JPS5335399U JPS5335399U (nl) 1978-03-28
JPS5810160Y2 true JPS5810160Y2 (ja) 1983-02-24

Family

ID=28726710

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1976117130U Expired JPS5810160Y2 (ja) 1976-08-31 1976-08-31 電子線照射装置

Country Status (1)

Country Link
JP (1) JPS5810160Y2 (nl)

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4815676U (nl) * 1971-06-30 1973-02-22
JPS5083697A (nl) * 1973-11-29 1975-07-07

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4815676U (nl) * 1971-06-30 1973-02-22
JPS5083697A (nl) * 1973-11-29 1975-07-07

Also Published As

Publication number Publication date
JPS5335399U (nl) 1978-03-28

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