JPS5794606A - Deciding method of pattern continuity - Google Patents

Deciding method of pattern continuity

Info

Publication number
JPS5794606A
JPS5794606A JP17042480A JP17042480A JPS5794606A JP S5794606 A JPS5794606 A JP S5794606A JP 17042480 A JP17042480 A JP 17042480A JP 17042480 A JP17042480 A JP 17042480A JP S5794606 A JPS5794606 A JP S5794606A
Authority
JP
Japan
Prior art keywords
control part
scanning
position information
memory
information
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP17042480A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6256961B2 (enrdf_load_stackoverflow
Inventor
Koji Uchiumi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NEC Corp
Original Assignee
NEC Corp
Nippon Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NEC Corp, Nippon Electric Co Ltd filed Critical NEC Corp
Priority to JP17042480A priority Critical patent/JPS5794606A/ja
Publication of JPS5794606A publication Critical patent/JPS5794606A/ja
Publication of JPS6256961B2 publication Critical patent/JPS6256961B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/02—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness
    • G01B11/024—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness by means of diode-array scanning

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Length Measuring Devices With Unspecified Measuring Means (AREA)
  • Preparing Plates And Mask In Photomechanical Process (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
JP17042480A 1980-12-03 1980-12-03 Deciding method of pattern continuity Granted JPS5794606A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP17042480A JPS5794606A (en) 1980-12-03 1980-12-03 Deciding method of pattern continuity

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP17042480A JPS5794606A (en) 1980-12-03 1980-12-03 Deciding method of pattern continuity

Publications (2)

Publication Number Publication Date
JPS5794606A true JPS5794606A (en) 1982-06-12
JPS6256961B2 JPS6256961B2 (enrdf_load_stackoverflow) 1987-11-28

Family

ID=15904654

Family Applications (1)

Application Number Title Priority Date Filing Date
JP17042480A Granted JPS5794606A (en) 1980-12-03 1980-12-03 Deciding method of pattern continuity

Country Status (1)

Country Link
JP (1) JPS5794606A (enrdf_load_stackoverflow)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6313043A (ja) * 1986-07-04 1988-01-20 Fuji Electric Co Ltd 自動画像検査機

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6313043A (ja) * 1986-07-04 1988-01-20 Fuji Electric Co Ltd 自動画像検査機

Also Published As

Publication number Publication date
JPS6256961B2 (enrdf_load_stackoverflow) 1987-11-28

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