JPS5788028A - Formation of electrically conductive transparent film of indium oxide - Google Patents

Formation of electrically conductive transparent film of indium oxide

Info

Publication number
JPS5788028A
JPS5788028A JP15943880A JP15943880A JPS5788028A JP S5788028 A JPS5788028 A JP S5788028A JP 15943880 A JP15943880 A JP 15943880A JP 15943880 A JP15943880 A JP 15943880A JP S5788028 A JPS5788028 A JP S5788028A
Authority
JP
Japan
Prior art keywords
electrically conductive
transparent film
conductive transparent
sputtering
in2o3
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP15943880A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6354788B2 (enrdf_load_stackoverflow
Inventor
Satoru Noguchi
Tsunemitsu Koizumi
Masao Ariga
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
AGC Inc
Original Assignee
Asahi Glass Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Asahi Glass Co Ltd filed Critical Asahi Glass Co Ltd
Priority to JP15943880A priority Critical patent/JPS5788028A/ja
Publication of JPS5788028A publication Critical patent/JPS5788028A/ja
Publication of JPS6354788B2 publication Critical patent/JPS6354788B2/ja
Granted legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/0021—Reactive sputtering or evaporation
    • C23C14/0036—Reactive sputtering

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Surface Treatment Of Glass (AREA)
  • Physical Vapour Deposition (AREA)
  • Manufacturing Of Electric Cables (AREA)
JP15943880A 1980-11-14 1980-11-14 Formation of electrically conductive transparent film of indium oxide Granted JPS5788028A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP15943880A JPS5788028A (en) 1980-11-14 1980-11-14 Formation of electrically conductive transparent film of indium oxide

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP15943880A JPS5788028A (en) 1980-11-14 1980-11-14 Formation of electrically conductive transparent film of indium oxide

Publications (2)

Publication Number Publication Date
JPS5788028A true JPS5788028A (en) 1982-06-01
JPS6354788B2 JPS6354788B2 (enrdf_load_stackoverflow) 1988-10-31

Family

ID=15693749

Family Applications (1)

Application Number Title Priority Date Filing Date
JP15943880A Granted JPS5788028A (en) 1980-11-14 1980-11-14 Formation of electrically conductive transparent film of indium oxide

Country Status (1)

Country Link
JP (1) JPS5788028A (enrdf_load_stackoverflow)

Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2555613A1 (fr) * 1983-11-30 1985-05-31 Ppg Industries Inc Procede pour la pulverisation cathodique sur un support d'une pellicule d'oxyde d'indium de basse resistance
JPS6116153A (ja) * 1984-06-29 1986-01-24 Toyota Motor Corp 自動車用導電性透明部材
JPS63456A (ja) * 1986-06-20 1988-01-05 Tdk Corp 太陽電池用透明導岩膜の製造方法
JPH07152041A (ja) * 1993-11-26 1995-06-16 Casio Comput Co Ltd 配線を有する電子デバイス
KR100744017B1 (ko) * 2001-06-26 2007-07-30 미츠이 긴조쿠 고교 가부시키가이샤 고저항 투명 도전막용 스퍼터링 타겟 및 고저항 투명도전막의 제조방법
JP2010284873A (ja) * 2009-06-11 2010-12-24 Asahi Glass Co Ltd 熱線反射性透明材料、熱線反射性透明材料の製造方法及び熱線反射性透明材料を備えた温室
RU2693982C2 (ru) * 2014-05-30 2019-07-08 ПиПиДжи ИНДАСТРИЗ ОГАЙО, ИНК. Прозрачный проводящий оксид олова, легированный индием

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5469183A (en) * 1977-11-15 1979-06-02 Asahi Glass Co Ltd Preparation of transparent, electrically-conductive plastic

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5469183A (en) * 1977-11-15 1979-06-02 Asahi Glass Co Ltd Preparation of transparent, electrically-conductive plastic

Cited By (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2555613A1 (fr) * 1983-11-30 1985-05-31 Ppg Industries Inc Procede pour la pulverisation cathodique sur un support d'une pellicule d'oxyde d'indium de basse resistance
JPS60138068A (ja) * 1983-11-30 1985-07-22 ピーピージー・インダストリーズ・インコーポレーテツド 低抵抗性金属酸化物含有フイルムの形成法
JPS6116153A (ja) * 1984-06-29 1986-01-24 Toyota Motor Corp 自動車用導電性透明部材
JPS63456A (ja) * 1986-06-20 1988-01-05 Tdk Corp 太陽電池用透明導岩膜の製造方法
JPH07152041A (ja) * 1993-11-26 1995-06-16 Casio Comput Co Ltd 配線を有する電子デバイス
KR100744017B1 (ko) * 2001-06-26 2007-07-30 미츠이 긴조쿠 고교 가부시키가이샤 고저항 투명 도전막용 스퍼터링 타겟 및 고저항 투명도전막의 제조방법
JP2010284873A (ja) * 2009-06-11 2010-12-24 Asahi Glass Co Ltd 熱線反射性透明材料、熱線反射性透明材料の製造方法及び熱線反射性透明材料を備えた温室
RU2693982C2 (ru) * 2014-05-30 2019-07-08 ПиПиДжи ИНДАСТРИЗ ОГАЙО, ИНК. Прозрачный проводящий оксид олова, легированный индием
US12338525B2 (en) 2014-05-30 2025-06-24 Ppg Industries Ohio, Inc. Transparent conducting indium doped tin oxide

Also Published As

Publication number Publication date
JPS6354788B2 (enrdf_load_stackoverflow) 1988-10-31

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