JPS55105385A - Photoconductive element and its manufacture - Google Patents
Photoconductive element and its manufactureInfo
- Publication number
- JPS55105385A JPS55105385A JP1244779A JP1244779A JPS55105385A JP S55105385 A JPS55105385 A JP S55105385A JP 1244779 A JP1244779 A JP 1244779A JP 1244779 A JP1244779 A JP 1244779A JP S55105385 A JPS55105385 A JP S55105385A
- Authority
- JP
- Japan
- Prior art keywords
- vacuum
- layer
- treated
- positive hole
- preventive layer
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Image-Pickup Tubes, Image-Amplification Tubes, And Storage Tubes (AREA)
- Light Receiving Elements (AREA)
Abstract
PURPOSE: To obtain a transparent protective film with high performace by vacuum depositioning SiOx (1≤x≤2) or ZnS onto the heterojunction of the positive hole preventive layer and photoconductive substance (Zn1-xCdxTe)1-y(In2Te3)y.
CONSTITUTION: The SnO2 layer 11 as an electrode of the positive hole preventive layer is formed on the glass substrate 10 by the CVD method. Next the positive hole preventive layer 12 of ZnSe and the photoconductive substance (Zn0.7Cd0.3Te)0.95 (In2Te3)0.05 are laminated on the layer 11 by the vacuum deposition method and is heat-treated in a vacuum. And it is treated by spattering with a gas mixture of Ar and O2 by making (In2O3)0.9(SnO2)0.1 as a target to form the transparent electrode 14 and is heat-treated at temperature of 200°C in the air, the SiO or ZnS film 15 is formed by the vacuum deposition method last. In this way, a high sensitive photoconductive element with less dark current can be obtained, which is capable of holding the characteristic even in an environment except vacuum.
COPYRIGHT: (C)1980,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1244779A JPS55105385A (en) | 1979-02-06 | 1979-02-06 | Photoconductive element and its manufacture |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1244779A JPS55105385A (en) | 1979-02-06 | 1979-02-06 | Photoconductive element and its manufacture |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS55105385A true JPS55105385A (en) | 1980-08-12 |
Family
ID=11805579
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP1244779A Pending JPS55105385A (en) | 1979-02-06 | 1979-02-06 | Photoconductive element and its manufacture |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS55105385A (en) |
-
1979
- 1979-02-06 JP JP1244779A patent/JPS55105385A/en active Pending
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