JPS5572340A - Method for manufacturing image pickup tube target - Google Patents
Method for manufacturing image pickup tube targetInfo
- Publication number
- JPS5572340A JPS5572340A JP14545678A JP14545678A JPS5572340A JP S5572340 A JPS5572340 A JP S5572340A JP 14545678 A JP14545678 A JP 14545678A JP 14545678 A JP14545678 A JP 14545678A JP S5572340 A JPS5572340 A JP S5572340A
- Authority
- JP
- Japan
- Prior art keywords
- heat treatment
- layer
- image pickup
- temperature
- substrate
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Formation Of Various Coating Films On Cathode Ray Tubes And Lamps (AREA)
- Light Receiving Elements (AREA)
Abstract
PURPOSE: To increase the sensitivity in the long wavelength region, by controlling the substrate temperature within a predetermined range during the formation of a second layer film and then carrying out a predetermined two step heat treatment.
CONSTITUTION: On a glass substrate having a transparent conductive film on it, a film consisting of one or more material selected from the group consisting of ZnS, ZnSe, CdS is formed as a first layer. Then, on this first layer, a second layer consisting of (ZnxCd1-xTe)y(In2Te3)1-y, (0≤x≤1, 0.7≤y≤1) is formed at a substrate temperature within the range of 205W230°C. Then, a first heat treatment for this substrate is carried out in an inert gas or in vacuum at a temperature within the range of 500W600°C, for 3minW1hr, and thereafter, a second heat treatment is carried out at a lower temperature than the first heat treatment.
COPYRIGHT: (C)1980,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP14545678A JPS5572340A (en) | 1978-11-25 | 1978-11-25 | Method for manufacturing image pickup tube target |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP14545678A JPS5572340A (en) | 1978-11-25 | 1978-11-25 | Method for manufacturing image pickup tube target |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS5572340A true JPS5572340A (en) | 1980-05-31 |
Family
ID=15385641
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP14545678A Pending JPS5572340A (en) | 1978-11-25 | 1978-11-25 | Method for manufacturing image pickup tube target |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5572340A (en) |
-
1978
- 1978-11-25 JP JP14545678A patent/JPS5572340A/en active Pending
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