JPS5787126A - Manufacture of semiconductor device - Google Patents

Manufacture of semiconductor device

Info

Publication number
JPS5787126A
JPS5787126A JP55163560A JP16356080A JPS5787126A JP S5787126 A JPS5787126 A JP S5787126A JP 55163560 A JP55163560 A JP 55163560A JP 16356080 A JP16356080 A JP 16356080A JP S5787126 A JPS5787126 A JP S5787126A
Authority
JP
Japan
Prior art keywords
layer
circuit
laminated
patterned
penetration
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP55163560A
Other languages
English (en)
Japanese (ja)
Other versions
JPS618570B2 (OSRAM
Inventor
Mitsuaki Ito
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Seiko Epson Corp
Suwa Seikosha KK
Original Assignee
Seiko Epson Corp
Suwa Seikosha KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Seiko Epson Corp, Suwa Seikosha KK filed Critical Seiko Epson Corp
Priority to JP55163560A priority Critical patent/JPS5787126A/ja
Publication of JPS5787126A publication Critical patent/JPS5787126A/ja
Publication of JPS618570B2 publication Critical patent/JPS618570B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H10D64/011—

Landscapes

  • Electrodes Of Semiconductors (AREA)
  • Drying Of Semiconductors (AREA)
  • Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
JP55163560A 1980-11-20 1980-11-20 Manufacture of semiconductor device Granted JPS5787126A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP55163560A JPS5787126A (en) 1980-11-20 1980-11-20 Manufacture of semiconductor device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP55163560A JPS5787126A (en) 1980-11-20 1980-11-20 Manufacture of semiconductor device

Publications (2)

Publication Number Publication Date
JPS5787126A true JPS5787126A (en) 1982-05-31
JPS618570B2 JPS618570B2 (OSRAM) 1986-03-15

Family

ID=15776215

Family Applications (1)

Application Number Title Priority Date Filing Date
JP55163560A Granted JPS5787126A (en) 1980-11-20 1980-11-20 Manufacture of semiconductor device

Country Status (1)

Country Link
JP (1) JPS5787126A (OSRAM)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63154491U (OSRAM) * 1987-03-26 1988-10-11

Also Published As

Publication number Publication date
JPS618570B2 (OSRAM) 1986-03-15

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