JPS5771184A - Manufacture of field effect transistor - Google Patents

Manufacture of field effect transistor

Info

Publication number
JPS5771184A
JPS5771184A JP55148688A JP14868880A JPS5771184A JP S5771184 A JPS5771184 A JP S5771184A JP 55148688 A JP55148688 A JP 55148688A JP 14868880 A JP14868880 A JP 14868880A JP S5771184 A JPS5771184 A JP S5771184A
Authority
JP
Japan
Prior art keywords
layer
electrode
central part
operational
electrodes
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP55148688A
Other languages
English (en)
Inventor
Takeshi Suzuki
Kazuaki Segawa
Manabu Watase
Michihiro Kobiki
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Electric Corp
Original Assignee
Mitsubishi Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Electric Corp filed Critical Mitsubishi Electric Corp
Priority to JP55148688A priority Critical patent/JPS5771184A/ja
Publication of JPS5771184A publication Critical patent/JPS5771184A/ja
Pending legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D64/00—Electrodes of devices having potential barriers
    • H10D64/20—Electrodes characterised by their shapes, relative sizes or dispositions 
    • H10D64/27—Electrodes not carrying the current to be rectified, amplified, oscillated or switched, e.g. gates
    • H10D64/311—Gate electrodes for field-effect devices
    • H10D64/411—Gate electrodes for field-effect devices for FETs

Landscapes

  • Junction Field-Effect Transistors (AREA)
JP55148688A 1980-10-22 1980-10-22 Manufacture of field effect transistor Pending JPS5771184A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP55148688A JPS5771184A (en) 1980-10-22 1980-10-22 Manufacture of field effect transistor

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP55148688A JPS5771184A (en) 1980-10-22 1980-10-22 Manufacture of field effect transistor

Publications (1)

Publication Number Publication Date
JPS5771184A true JPS5771184A (en) 1982-05-01

Family

ID=15458371

Family Applications (1)

Application Number Title Priority Date Filing Date
JP55148688A Pending JPS5771184A (en) 1980-10-22 1980-10-22 Manufacture of field effect transistor

Country Status (1)

Country Link
JP (1) JPS5771184A (ja)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62248261A (ja) * 1986-04-21 1987-10-29 Hitachi Ltd 半導体装置

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS54105983A (en) * 1978-02-07 1979-08-20 Mitsubishi Electric Corp Lateral field effect transistor

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS54105983A (en) * 1978-02-07 1979-08-20 Mitsubishi Electric Corp Lateral field effect transistor

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62248261A (ja) * 1986-04-21 1987-10-29 Hitachi Ltd 半導体装置

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