JPS5759665A - Control method for coated article-baking oven - Google Patents

Control method for coated article-baking oven

Info

Publication number
JPS5759665A
JPS5759665A JP13228780A JP13228780A JPS5759665A JP S5759665 A JPS5759665 A JP S5759665A JP 13228780 A JP13228780 A JP 13228780A JP 13228780 A JP13228780 A JP 13228780A JP S5759665 A JPS5759665 A JP S5759665A
Authority
JP
Japan
Prior art keywords
temperature
amount
hot gas
line
detected
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP13228780A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0117425B2 (enrdf_load_stackoverflow
Inventor
Masae Numanami
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Furukawa Electric Co Ltd
Original Assignee
Furukawa Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Furukawa Electric Co Ltd filed Critical Furukawa Electric Co Ltd
Priority to JP13228780A priority Critical patent/JPS5759665A/ja
Publication of JPS5759665A publication Critical patent/JPS5759665A/ja
Publication of JPH0117425B2 publication Critical patent/JPH0117425B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Drying Of Solid Materials (AREA)
  • Application Of Or Painting With Fluid Materials (AREA)
  • Waste-Gas Treatment And Other Accessory Devices For Furnaces (AREA)
JP13228780A 1980-09-25 1980-09-25 Control method for coated article-baking oven Granted JPS5759665A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP13228780A JPS5759665A (en) 1980-09-25 1980-09-25 Control method for coated article-baking oven

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP13228780A JPS5759665A (en) 1980-09-25 1980-09-25 Control method for coated article-baking oven

Publications (2)

Publication Number Publication Date
JPS5759665A true JPS5759665A (en) 1982-04-10
JPH0117425B2 JPH0117425B2 (enrdf_load_stackoverflow) 1989-03-30

Family

ID=15077748

Family Applications (1)

Application Number Title Priority Date Filing Date
JP13228780A Granted JPS5759665A (en) 1980-09-25 1980-09-25 Control method for coated article-baking oven

Country Status (1)

Country Link
JP (1) JPS5759665A (enrdf_load_stackoverflow)

Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6025569A (ja) * 1983-07-25 1985-02-08 Toyo Seikan Kaisha Ltd 塗装焼付乾燥炉の排気量制御方法
JPS6081820A (ja) * 1983-10-11 1985-05-09 Rohm Co Ltd 分子線エピタキシヤル装置のウエハ取付装置
JPS6176872A (ja) * 1984-09-10 1986-04-19 ローマン　ゲーエムベーハー　ウント　コー　カーゲー シート状材料の乾燥装置
JPS62100484U (enrdf_load_stackoverflow) * 1985-12-13 1987-06-26
JP2008002766A (ja) * 2006-06-23 2008-01-10 Future Vision:Kk 基板焼成炉の給排気システム
JP2008039376A (ja) * 2006-07-13 2008-02-21 Espec Corp 熱処理装置
JP2008304182A (ja) * 2008-07-22 2008-12-18 Future Vision:Kk 基板焼成炉の給排気方法

Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6025569A (ja) * 1983-07-25 1985-02-08 Toyo Seikan Kaisha Ltd 塗装焼付乾燥炉の排気量制御方法
JPS6081820A (ja) * 1983-10-11 1985-05-09 Rohm Co Ltd 分子線エピタキシヤル装置のウエハ取付装置
JPS6176872A (ja) * 1984-09-10 1986-04-19 ローマン　ゲーエムベーハー　ウント　コー　カーゲー シート状材料の乾燥装置
JPS62100484U (enrdf_load_stackoverflow) * 1985-12-13 1987-06-26
JP2008002766A (ja) * 2006-06-23 2008-01-10 Future Vision:Kk 基板焼成炉の給排気システム
JP2008039376A (ja) * 2006-07-13 2008-02-21 Espec Corp 熱処理装置
JP2008304182A (ja) * 2008-07-22 2008-12-18 Future Vision:Kk 基板焼成炉の給排気方法

Also Published As

Publication number Publication date
JPH0117425B2 (enrdf_load_stackoverflow) 1989-03-30

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