JPS575868A - Vapor depositing apparatus - Google Patents

Vapor depositing apparatus

Info

Publication number
JPS575868A
JPS575868A JP7961580A JP7961580A JPS575868A JP S575868 A JPS575868 A JP S575868A JP 7961580 A JP7961580 A JP 7961580A JP 7961580 A JP7961580 A JP 7961580A JP S575868 A JPS575868 A JP S575868A
Authority
JP
Japan
Prior art keywords
evaporation source
electric discharge
substrate
substance
electrode
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP7961580A
Other languages
English (en)
Inventor
Masanari Shindo
Isao Myokan
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Konica Minolta Inc
Original Assignee
Konica Minolta Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Konica Minolta Inc filed Critical Konica Minolta Inc
Priority to JP7961580A priority Critical patent/JPS575868A/ja
Priority to EP80304246A priority patent/EP0029747A1/en
Publication of JPS575868A publication Critical patent/JPS575868A/ja
Pending legal-status Critical Current

Links

JP7961580A 1979-11-27 1980-06-14 Vapor depositing apparatus Pending JPS575868A (en)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP7961580A JPS575868A (en) 1980-06-14 1980-06-14 Vapor depositing apparatus
EP80304246A EP0029747A1 (en) 1979-11-27 1980-11-26 An apparatus for vacuum deposition and a method for forming a thin film by the use thereof

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP7961580A JPS575868A (en) 1980-06-14 1980-06-14 Vapor depositing apparatus

Publications (1)

Publication Number Publication Date
JPS575868A true JPS575868A (en) 1982-01-12

Family

ID=13694950

Family Applications (1)

Application Number Title Priority Date Filing Date
JP7961580A Pending JPS575868A (en) 1979-11-27 1980-06-14 Vapor depositing apparatus

Country Status (1)

Country Link
JP (1) JPS575868A (ja)

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