JPS575865A - Apparatus for forming transparent electroconductive film - Google Patents
Apparatus for forming transparent electroconductive filmInfo
- Publication number
- JPS575865A JPS575865A JP7961780A JP7961780A JPS575865A JP S575865 A JPS575865 A JP S575865A JP 7961780 A JP7961780 A JP 7961780A JP 7961780 A JP7961780 A JP 7961780A JP S575865 A JPS575865 A JP S575865A
- Authority
- JP
- Japan
- Prior art keywords
- gas
- substrate body
- discharge
- generated
- electroconductive film
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/0021—Reactive sputtering or evaporation
Landscapes
- Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Physical Vapour Deposition (AREA)
Abstract
PURPOSE:To provide an apparatus for vapor depositing a transparent electroconductive film on a surface of a substrate body in high productivity without heating said substrate body comprising formation of a discharge electrode discharging to a space between a substrate body transferred into a vacuum chamber and an opposedly provided evaporation source and an O2 gas discharge pipe having an outlet facing to the surface of said substrate body. CONSTITUTION:An evaporation source 6 such as In, tin or the like is heated and, on the other hand, an O2 gas is supplied to an O2 gas discharge tube 7 to decompose the O2 gas and, thereby, various oxygen ion and electron are generated and these discharge porducts is introduced into the vacuum tank 1 along with the undecomposed O2 gas. Then, introduced components are mixed with a vapor from the evaporation source 6 in the space 5 and glow discharge is generated by the action of a rear electrode 8 to ionize the aforementioned vapor and the undecomposed O2 gas and, further, reionize the O2 gas generated by re-uniting the discharge products. Then, generated activated particles are deposited on a surface of the transferred substrate body 2 and a transparent electroconductive film comprising a conventional oxide is formed.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP7961780A JPS575865A (en) | 1980-06-14 | 1980-06-14 | Apparatus for forming transparent electroconductive film |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP7961780A JPS575865A (en) | 1980-06-14 | 1980-06-14 | Apparatus for forming transparent electroconductive film |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS575865A true JPS575865A (en) | 1982-01-12 |
Family
ID=13695009
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP7961780A Pending JPS575865A (en) | 1980-06-14 | 1980-06-14 | Apparatus for forming transparent electroconductive film |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS575865A (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP0121443A2 (en) * | 1983-04-04 | 1984-10-10 | Energy Conversion Devices, Inc. | Apparatus for and method of continuously depositing a highly conductive, highly transmissive film |
-
1980
- 1980-06-14 JP JP7961780A patent/JPS575865A/en active Pending
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP0121443A2 (en) * | 1983-04-04 | 1984-10-10 | Energy Conversion Devices, Inc. | Apparatus for and method of continuously depositing a highly conductive, highly transmissive film |
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