GB763541A - Improvements in or relating to apparatus for the continuous treatment in vacuo of wire or other strip-like material - Google Patents

Improvements in or relating to apparatus for the continuous treatment in vacuo of wire or other strip-like material

Info

Publication number
GB763541A
GB763541A GB28150/54A GB2815054A GB763541A GB 763541 A GB763541 A GB 763541A GB 28150/54 A GB28150/54 A GB 28150/54A GB 2815054 A GB2815054 A GB 2815054A GB 763541 A GB763541 A GB 763541A
Authority
GB
United Kingdom
Prior art keywords
slots
coating
vacuo
sept
strip
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
GB28150/54A
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Siemens Schuckertwerke AG
Siemens AG
Original Assignee
Siemens Schuckertwerke AG
Siemens AG
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Siemens Schuckertwerke AG, Siemens AG filed Critical Siemens Schuckertwerke AG
Publication of GB763541A publication Critical patent/GB763541A/en
Expired legal-status Critical Current

Links

Classifications

    • BPERFORMING OPERATIONS; TRANSPORTING
    • B60VEHICLES IN GENERAL
    • B60FVEHICLES FOR USE BOTH ON RAIL AND ON ROAD; AMPHIBIOUS OR LIKE VEHICLES; CONVERTIBLE VEHICLES
    • B60F1/00Vehicles for use both on rail and on road; Conversions therefor
    • B60F1/005Vehicles for use both on rail and on road; Conversions therefor with guiding elements keeping the road wheels on the rails
    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/56Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks
    • C23C14/562Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks for coating elongated substrates
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01GCAPACITORS; CAPACITORS, RECTIFIERS, DETECTORS, SWITCHING DEVICES OR LIGHT-SENSITIVE DEVICES, OF THE ELECTROLYTIC TYPE
    • H01G13/00Apparatus specially adapted for manufacturing capacitors; Processes specially adapted for manufacturing capacitors not provided for in groups H01G4/00 - H01G11/00
    • H01G13/06Apparatus specially adapted for manufacturing capacitors; Processes specially adapted for manufacturing capacitors not provided for in groups H01G4/00 - H01G11/00 with provision for removing metal surfaces
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32Gas-filled discharge tubes
    • H01J37/34Gas-filled discharge tubes operating with cathodic sputtering

Abstract

763,541. Coating by vapour deposition. SIEMENS-SCHUCKERTWERKE. AKT.- GES. Sept. 29, 1954 [Sept. 29, 1953; March 18, 1954], No. 28150/54. Class 82(2) An apparatus for the continuous coating by vapour deposition in vacuo of wire or other strip-like material comprises a high vacuum chamber 1, formed with inlet and outlet slots 4, 5, for the passage therethrough of the material for coating, and intermediate vacuum chambers 2, 3 enclosing slots 4, 5, there being a secondary slot 6, 7 formed in each intermediate chamber to allow material located in the surrounding atmosphere to be continuously passed through the apparatus to emerge into the surrounding atmosphere, the inlet and outlet slots 4, 5 having an " effective slot height" which is less than the mean free path of the gas molecules on either side thereof and the secondary slots 6, 7 having an " effective slot height " equal to that of said slots 4, 5 ("effective slot height " being defined as the unobstructed width of the slot). In a modification (Fig. 2, not shown) a further intermediate chamber is provided containing an electrode for effecting preliminary surface cleaning by glow discharge. The manufacture of metallized paper capacitors and the vapour coating of thin metal foils with conductive or insulating layers, e.g. flexible glass layers for roll-type capacitors, are referred to. It is stated that the apparatus may also be used for the irradiation of a plastic foil, in which case there is located in the high vacuum chamber a source for the radiation such as a radio-active preparation.
GB28150/54A 1953-09-29 1954-09-29 Improvements in or relating to apparatus for the continuous treatment in vacuo of wire or other strip-like material Expired GB763541A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE763541X 1953-09-29

Publications (1)

Publication Number Publication Date
GB763541A true GB763541A (en) 1956-12-12

Family

ID=41057401

Family Applications (1)

Application Number Title Priority Date Filing Date
GB28150/54A Expired GB763541A (en) 1953-09-29 1954-09-29 Improvements in or relating to apparatus for the continuous treatment in vacuo of wire or other strip-like material

Country Status (1)

Country Link
GB (1) GB763541A (en)

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4358472A (en) * 1978-06-16 1982-11-09 Optical Coating Laboratory, Inc. Multi-layer coating method
GB2119406A (en) * 1982-04-29 1983-11-16 Energy Conversion Devices Inc Chemical vapour deposition apparatus
GB2462846A (en) * 2008-08-22 2010-02-24 Tisics Ltd Filament coating apparatus
EP2471733A3 (en) * 2010-12-30 2013-01-16 United Technologies Corporation Wire feed pressure lock system
DE102012104013A1 (en) * 2012-05-08 2013-11-14 Schmid Vacuum Technology Gmbh High vacuum system and method for evacuation

Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4358472A (en) * 1978-06-16 1982-11-09 Optical Coating Laboratory, Inc. Multi-layer coating method
GB2119406A (en) * 1982-04-29 1983-11-16 Energy Conversion Devices Inc Chemical vapour deposition apparatus
GB2462846A (en) * 2008-08-22 2010-02-24 Tisics Ltd Filament coating apparatus
GB2462846B (en) * 2008-08-22 2013-03-13 Tisics Ltd Coated filaments and their manufacture
EP2471733A3 (en) * 2010-12-30 2013-01-16 United Technologies Corporation Wire feed pressure lock system
US8920566B2 (en) 2010-12-30 2014-12-30 United Technologies Corporation Wire feed pressure lock system
DE102012104013A1 (en) * 2012-05-08 2013-11-14 Schmid Vacuum Technology Gmbh High vacuum system and method for evacuation

Similar Documents

Publication Publication Date Title
GB816342A (en) Improvements relating to silent electric discharge apparatus
GB1039691A (en) Vacuum coating and ion bombardment apparatus
GB763541A (en) Improvements in or relating to apparatus for the continuous treatment in vacuo of wire or other strip-like material
US3471396A (en) R.f. cathodic sputtering apparatus having an electrically conductive housing
GB766459A (en) Improvements in or relating to high-vacuum coating devices
JPS5647572A (en) Etching method of indium oxide film
JPS6362696B2 (en)
JPS5420975A (en) Sputtering device
JPS5538919A (en) Sputtering apparatus
JPS6124467B2 (en)
JPS5782474A (en) Microwave etching device
JPS5710629A (en) Plasma treatment of hollow body
GB1100198A (en) Improvements in or relating to cathodic sputtering
JPS5586060A (en) Ion detector for mass spectrometer
FR2213351A1 (en) Vapour deposition of polymer film - using electrodes independent from support for film
JPH03123022A (en) Plasma film forming device
JPS56160304A (en) Ozonizer
JPS5614498A (en) Manufacture of transparent electrically conductive thin film
JPS5732637A (en) Dry etching apparatus
JPH0324272A (en) Dielectric film attaching device
JPS52122284A (en) Sputtering device having bias electrode
JPS5615838A (en) Gaseous phase growth device
GB811263A (en) Improvements in or relating to vapour coating strip material in vacuum
JPS52140492A (en) Ozonizer
JPS52122283A (en) Sputtering device having bias mechanism