FR2213351A1 - Vapour deposition of polymer film - using electrodes independent from support for film - Google Patents

Vapour deposition of polymer film - using electrodes independent from support for film

Info

Publication number
FR2213351A1
FR2213351A1 FR7238399A FR7238399A FR2213351A1 FR 2213351 A1 FR2213351 A1 FR 2213351A1 FR 7238399 A FR7238399 A FR 7238399A FR 7238399 A FR7238399 A FR 7238399A FR 2213351 A1 FR2213351 A1 FR 2213351A1
Authority
FR
France
Prior art keywords
film
support
electrodes
vapour deposition
electrodes independent
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
FR7238399A
Other languages
French (fr)
Other versions
FR2213351B1 (en
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
AIVAZOV VALERY
Original Assignee
AIVAZOV VALERY
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority to DE19722251954 priority Critical patent/DE2251954A1/en
Application filed by AIVAZOV VALERY filed Critical AIVAZOV VALERY
Priority to FR7238399A priority patent/FR2213351A1/en
Publication of FR2213351A1 publication Critical patent/FR2213351A1/en
Application granted granted Critical
Publication of FR2213351B1 publication Critical patent/FR2213351B1/fr
Granted legal-status Critical Current

Links

Classifications

    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005Apparatus not specifically provided for elsewhere
    • H01L21/67011Apparatus for manufacture or treatment
    • H01L21/6715Apparatus for applying a liquid, a resin, an ink or the like
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B05SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05DPROCESSES FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05D1/00Processes for applying liquids or other fluent materials
    • B05D1/62Plasma-deposition of organic layers
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01GCAPACITORS; CAPACITORS, RECTIFIERS, DETECTORS, SWITCHING DEVICES, LIGHT-SENSITIVE OR TEMPERATURE-SENSITIVE DEVICES OF THE ELECTROLYTIC TYPE
    • H01G13/00Apparatus specially adapted for manufacturing capacitors; Processes specially adapted for manufacturing capacitors not provided for in groups H01G4/00 - H01G11/00
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J31/00Cathode ray tubes; Electron beam tubes
    • H01J31/08Cathode ray tubes; Electron beam tubes having a screen on or from which an image or pattern is formed, picked up, converted, or stored
    • H01J31/26Image pick-up tubes having an input of visible light and electric output
    • H01J31/28Image pick-up tubes having an input of visible light and electric output with electron ray scanning the image screen
    • H01J31/30Image pick-up tubes having an input of visible light and electric output with electron ray scanning the image screen having regulation of screen potential at anode potential, e.g. iconoscope
    • H01J31/32Tubes with image amplification section, e.g. image-iconoscope, supericonoscope
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32Gas-filled discharge tubes
    • H01J37/32009Arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g. plasma sources
    • H01J37/32018Glow discharge
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32Gas-filled discharge tubes
    • H01J37/32431Constructional details of the reactor
    • H01J37/32623Mechanical discharge control means

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Plasma & Fusion (AREA)
  • Power Engineering (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Manufacturing & Machinery (AREA)
  • Analytical Chemistry (AREA)
  • Chemical & Material Sciences (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Computer Hardware Design (AREA)
  • Physical Vapour Deposition (AREA)
  • Fixed Capacitors And Capacitor Manufacturing Machines (AREA)

Abstract

Vapour deposition appts for applying polymer films on a metal support, comprises a vacuum chamber contg. electrodes and a suspension device upon which the support is mounted between the two electrodes. The suspension frame is insulated form the housing and from the electrodes. A uniform film thickness is obtd. over the entire area. Suitable for micro-electronics mfr, e.g. thin film capacitors.
FR7238399A 1972-10-30 1972-10-30 Vapour deposition of polymer film - using electrodes independent from support for film Granted FR2213351A1 (en)

Priority Applications (2)

Application Number Priority Date Filing Date Title
DE19722251954 DE2251954A1 (en) 1972-10-30 1972-10-23 DEVICE FOR EVAPORATING POLYMER FILMS ON A METAL SUPPORT
FR7238399A FR2213351A1 (en) 1972-10-30 1972-10-30 Vapour deposition of polymer film - using electrodes independent from support for film

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR7238399A FR2213351A1 (en) 1972-10-30 1972-10-30 Vapour deposition of polymer film - using electrodes independent from support for film

Publications (2)

Publication Number Publication Date
FR2213351A1 true FR2213351A1 (en) 1974-08-02
FR2213351B1 FR2213351B1 (en) 1976-10-29

Family

ID=9106407

Family Applications (1)

Application Number Title Priority Date Filing Date
FR7238399A Granted FR2213351A1 (en) 1972-10-30 1972-10-30 Vapour deposition of polymer film - using electrodes independent from support for film

Country Status (2)

Country Link
DE (1) DE2251954A1 (en)
FR (1) FR2213351A1 (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2328025A1 (en) * 1975-08-22 1977-05-13 Bosch Gmbh Robert PROCESS FOR MAKING A PROTECTIVE LAYER ON THE SURFACE OF OPTICAL REFLECTORS AND REFLECTORS THUS OBTAINED
FR2472182A1 (en) * 1979-12-18 1981-06-26 Tokyo Metropolitan Government Polymeric replica films of specimens for electron microscopy - formed directly on the surface of specimen by plasma polymerisation of organic monomer vapours
DE3020815A1 (en) * 1980-06-02 1981-12-10 Siemens AG, 1000 Berlin und 8000 München Glow discharge process for coating e.g. with polymer or silicon - uses gas reservoir behind counter electrodes with large open perforated area

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE2847620C2 (en) * 1978-11-02 1984-10-18 Siemens AG, 1000 Berlin und 8000 München Device for the production of electrical components, in particular film capacitors
DE2848480C2 (en) * 1978-11-08 1984-11-08 Siemens AG, 1000 Berlin und 8000 München Device for applying layers to substrates under vacuum
DE2908467A1 (en) * 1979-03-05 1980-09-11 Siemens Ag REGENERABLE ELECTRIC LAYER CAPACITOR

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3252830A (en) * 1958-03-05 1966-05-24 Gen Electric Electric capacitor and method for making the same
FR1488512A (en) * 1965-07-26 1967-07-13 Metal Containers Ltd A method of forming a coating on an article by means of glow discharge polymerization and a coated article or article of manufacture produced by the above method

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3252830A (en) * 1958-03-05 1966-05-24 Gen Electric Electric capacitor and method for making the same
FR1488512A (en) * 1965-07-26 1967-07-13 Metal Containers Ltd A method of forming a coating on an article by means of glow discharge polymerization and a coated article or article of manufacture produced by the above method

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2328025A1 (en) * 1975-08-22 1977-05-13 Bosch Gmbh Robert PROCESS FOR MAKING A PROTECTIVE LAYER ON THE SURFACE OF OPTICAL REFLECTORS AND REFLECTORS THUS OBTAINED
FR2472182A1 (en) * 1979-12-18 1981-06-26 Tokyo Metropolitan Government Polymeric replica films of specimens for electron microscopy - formed directly on the surface of specimen by plasma polymerisation of organic monomer vapours
DE3020815A1 (en) * 1980-06-02 1981-12-10 Siemens AG, 1000 Berlin und 8000 München Glow discharge process for coating e.g. with polymer or silicon - uses gas reservoir behind counter electrodes with large open perforated area

Also Published As

Publication number Publication date
DE2251954A1 (en) 1974-04-25
FR2213351B1 (en) 1976-10-29

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Legal Events

Date Code Title Description
ST Notification of lapse