FR2213351A1 - Vapour deposition of polymer film - using electrodes independent from support for film - Google Patents

Vapour deposition of polymer film - using electrodes independent from support for film

Info

Publication number
FR2213351A1
FR2213351A1 FR7238399A FR7238399A FR2213351A1 FR 2213351 A1 FR2213351 A1 FR 2213351A1 FR 7238399 A FR7238399 A FR 7238399A FR 7238399 A FR7238399 A FR 7238399A FR 2213351 A1 FR2213351 A1 FR 2213351A1
Authority
FR
France
Prior art keywords
film
support
electrodes
vapour deposition
electrodes independent
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
FR7238399A
Other languages
French (fr)
Other versions
FR2213351B1 (en
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
AIVAZOV VALERY
Original Assignee
AIVAZOV VALERY
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority to DE19722251954 priority Critical patent/DE2251954A1/en
Application filed by AIVAZOV VALERY filed Critical AIVAZOV VALERY
Priority to FR7238399A priority patent/FR2213351A1/en
Publication of FR2213351A1 publication Critical patent/FR2213351A1/en
Application granted granted Critical
Publication of FR2213351B1 publication Critical patent/FR2213351B1/fr
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005—Apparatus not specifically provided for elsewhere
    • H01L21/67011—Apparatus for manufacture or treatment
    • H01L21/6715—Apparatus for applying a liquid, a resin, an ink or the like
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05D—PROCESSES FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05D1/00—Processes for applying liquids or other fluent materials
    • B05D1/62—Plasma-deposition of organic layers
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01G—CAPACITORS; CAPACITORS, RECTIFIERS, DETECTORS, SWITCHING DEVICES, LIGHT-SENSITIVE OR TEMPERATURE-SENSITIVE DEVICES OF THE ELECTROLYTIC TYPE
    • H01G13/00—Apparatus specially adapted for manufacturing capacitors; Processes specially adapted for manufacturing capacitors not provided for in groups H01G4/00 - H01G11/00
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J31/00—Cathode ray tubes; Electron beam tubes
    • H01J31/08—Cathode ray tubes; Electron beam tubes having a screen on or from which an image or pattern is formed, picked up, converted, or stored
    • H01J31/26—Image pick-up tubes having an input of visible light and electric output
    • H01J31/28—Image pick-up tubes having an input of visible light and electric output with electron ray scanning the image screen
    • H01J31/30—Image pick-up tubes having an input of visible light and electric output with electron ray scanning the image screen having regulation of screen potential at anode potential, e.g. iconoscope
    • H01J31/32—Tubes with image amplification section, e.g. image-iconoscope, supericonoscope
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32009—Arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g. plasma sources
    • H01J37/32018—Glow discharge
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32431—Constructional details of the reactor
    • H01J37/32623—Mechanical discharge control means

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Plasma & Fusion (AREA)
  • Power Engineering (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Manufacturing & Machinery (AREA)
  • Analytical Chemistry (AREA)
  • Chemical & Material Sciences (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Computer Hardware Design (AREA)
  • Physical Vapour Deposition (AREA)
  • Fixed Capacitors And Capacitor Manufacturing Machines (AREA)

Abstract

Vapour deposition appts for applying polymer films on a metal support, comprises a vacuum chamber contg. electrodes and a suspension device upon which the support is mounted between the two electrodes. The suspension frame is insulated form the housing and from the electrodes. A uniform film thickness is obtd. over the entire area. Suitable for micro-electronics mfr, e.g. thin film capacitors.
FR7238399A 1972-10-30 1972-10-30 Vapour deposition of polymer film - using electrodes independent from support for film Granted FR2213351A1 (en)

Priority Applications (2)

Application Number Priority Date Filing Date Title
DE19722251954 DE2251954A1 (en) 1972-10-30 1972-10-23 DEVICE FOR EVAPORATING POLYMER FILMS ON A METAL SUPPORT
FR7238399A FR2213351A1 (en) 1972-10-30 1972-10-30 Vapour deposition of polymer film - using electrodes independent from support for film

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR7238399A FR2213351A1 (en) 1972-10-30 1972-10-30 Vapour deposition of polymer film - using electrodes independent from support for film

Publications (2)

Publication Number Publication Date
FR2213351A1 true FR2213351A1 (en) 1974-08-02
FR2213351B1 FR2213351B1 (en) 1976-10-29

Family

ID=9106407

Family Applications (1)

Application Number Title Priority Date Filing Date
FR7238399A Granted FR2213351A1 (en) 1972-10-30 1972-10-30 Vapour deposition of polymer film - using electrodes independent from support for film

Country Status (2)

Country Link
DE (1) DE2251954A1 (en)
FR (1) FR2213351A1 (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2328025A1 (en) * 1975-08-22 1977-05-13 Bosch Gmbh Robert PROCESS FOR MAKING A PROTECTIVE LAYER ON THE SURFACE OF OPTICAL REFLECTORS AND REFLECTORS THUS OBTAINED
FR2472182A1 (en) * 1979-12-18 1981-06-26 Tokyo Metropolitan Government Polymeric replica films of specimens for electron microscopy - formed directly on the surface of specimen by plasma polymerisation of organic monomer vapours
DE3020815A1 (en) * 1980-06-02 1981-12-10 Siemens AG, 1000 Berlin und 8000 München Glow discharge process for coating e.g. with polymer or silicon - uses gas reservoir behind counter electrodes with large open perforated area

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE2847620C2 (en) * 1978-11-02 1984-10-18 Siemens AG, 1000 Berlin und 8000 München Device for the production of electrical components, in particular film capacitors
DE2848480C2 (en) * 1978-11-08 1984-11-08 Siemens AG, 1000 Berlin und 8000 München Device for applying layers to substrates under vacuum
DE2908467A1 (en) * 1979-03-05 1980-09-11 Siemens Ag REGENERABLE ELECTRIC LAYER CAPACITOR

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3252830A (en) * 1958-03-05 1966-05-24 Gen Electric Electric capacitor and method for making the same
FR1488512A (en) * 1965-07-26 1967-07-13 Metal Containers Ltd A method of forming a coating on an article by means of glow discharge polymerization and a coated article or article of manufacture produced by the above method

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3252830A (en) * 1958-03-05 1966-05-24 Gen Electric Electric capacitor and method for making the same
FR1488512A (en) * 1965-07-26 1967-07-13 Metal Containers Ltd A method of forming a coating on an article by means of glow discharge polymerization and a coated article or article of manufacture produced by the above method

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2328025A1 (en) * 1975-08-22 1977-05-13 Bosch Gmbh Robert PROCESS FOR MAKING A PROTECTIVE LAYER ON THE SURFACE OF OPTICAL REFLECTORS AND REFLECTORS THUS OBTAINED
FR2472182A1 (en) * 1979-12-18 1981-06-26 Tokyo Metropolitan Government Polymeric replica films of specimens for electron microscopy - formed directly on the surface of specimen by plasma polymerisation of organic monomer vapours
DE3020815A1 (en) * 1980-06-02 1981-12-10 Siemens AG, 1000 Berlin und 8000 München Glow discharge process for coating e.g. with polymer or silicon - uses gas reservoir behind counter electrodes with large open perforated area

Also Published As

Publication number Publication date
DE2251954A1 (en) 1974-04-25
FR2213351B1 (en) 1976-10-29

Similar Documents

Publication Publication Date Title
CA970872A (en) Pressure and vacuum monitoring apparatus
ES391740A1 (en) Deposition apparatus
UA18259A (en) StarWriterMETHOD FOR CONTROL OF PLASMA DEPOSITION OF THIN FILMS IN VACUUM
FR2213351A1 (en) Vapour deposition of polymer film - using electrodes independent from support for film
ES361935A1 (en) Process for the manufacture of a composite material having a metal layer
ES410894A1 (en) Nitrogen-doped beta tantalum capacitor
CA1012447A (en) Apparatus for deposition of semiconductor thin layers
ES439443A1 (en) Metallized video disc having an insulating layer thereon
GB1398172A (en) Support plate assemblies for electret transducers
CA962318A (en) High pressure metal vapour discharge tube
CA994709A (en) Apparatus for the sputtering deposition of thin films with labyrinth heat exchanger
ES373338A1 (en) Thin film resistor and preparation thereof
JPS5391664A (en) Plasma cvd device
CA992110A (en) Device for the precise positioning on a mobile mounting, of an object holder introduced through an airlock into a vacuum tight enclosure
CA998825A (en) Process and apparatus for reacting a thin liquid film with a gas
CA1019874A (en) Method for reducing contact adhesion of polymer films
CA1002315A (en) Vacuum degassing apparatus
GB1315647A (en) Deposition from the vapour phase in vacuo of layers
BE779229A (en) Offset printing plates - have a steel support with a chromium layer and a radiation sensitive layer,prodn
GB811263A (en) Improvements in or relating to vapour coating strip material in vacuum
CA902469A (en) Chemical vapor deposition of dielectric thin films of rutile
FR2221536A1 (en) Vacuum depositing thin layers - using appts. which improves homogeneity of deposited layers
CA1000569A (en) Immersed vapor feed coating process
CA899616A (en) Apparatus for coating a thin, uniform thickness stripe on a substrate
GB1323089A (en) Enclosures for vacuum coating

Legal Events

Date Code Title Description
ST Notification of lapse