FR2213351A1 - Vapour deposition of polymer film - using electrodes independent from support for film - Google Patents
Vapour deposition of polymer film - using electrodes independent from support for filmInfo
- Publication number
- FR2213351A1 FR2213351A1 FR7238399A FR7238399A FR2213351A1 FR 2213351 A1 FR2213351 A1 FR 2213351A1 FR 7238399 A FR7238399 A FR 7238399A FR 7238399 A FR7238399 A FR 7238399A FR 2213351 A1 FR2213351 A1 FR 2213351A1
- Authority
- FR
- France
- Prior art keywords
- film
- support
- electrodes
- vapour deposition
- electrodes independent
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 230000008021 deposition Effects 0.000 title abstract 2
- 229920006254 polymer film Polymers 0.000 title abstract 2
- 239000000725 suspension Substances 0.000 abstract 2
- 239000003990 capacitor Substances 0.000 abstract 1
- 239000010408 film Substances 0.000 abstract 1
- 239000002184 metal Substances 0.000 abstract 1
- 238000004377 microelectronic Methods 0.000 abstract 1
- 239000010409 thin film Substances 0.000 abstract 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/6715—Apparatus for applying a liquid, a resin, an ink or the like
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05D—PROCESSES FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05D1/00—Processes for applying liquids or other fluent materials
- B05D1/62—Plasma-deposition of organic layers
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01G—CAPACITORS; CAPACITORS, RECTIFIERS, DETECTORS, SWITCHING DEVICES, LIGHT-SENSITIVE OR TEMPERATURE-SENSITIVE DEVICES OF THE ELECTROLYTIC TYPE
- H01G13/00—Apparatus specially adapted for manufacturing capacitors; Processes specially adapted for manufacturing capacitors not provided for in groups H01G4/00 - H01G11/00
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J31/00—Cathode ray tubes; Electron beam tubes
- H01J31/08—Cathode ray tubes; Electron beam tubes having a screen on or from which an image or pattern is formed, picked up, converted, or stored
- H01J31/26—Image pick-up tubes having an input of visible light and electric output
- H01J31/28—Image pick-up tubes having an input of visible light and electric output with electron ray scanning the image screen
- H01J31/30—Image pick-up tubes having an input of visible light and electric output with electron ray scanning the image screen having regulation of screen potential at anode potential, e.g. iconoscope
- H01J31/32—Tubes with image amplification section, e.g. image-iconoscope, supericonoscope
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/32—Gas-filled discharge tubes
- H01J37/32009—Arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g. plasma sources
- H01J37/32018—Glow discharge
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/32—Gas-filled discharge tubes
- H01J37/32431—Constructional details of the reactor
- H01J37/32623—Mechanical discharge control means
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Plasma & Fusion (AREA)
- Power Engineering (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Manufacturing & Machinery (AREA)
- Analytical Chemistry (AREA)
- Chemical & Material Sciences (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Computer Hardware Design (AREA)
- Physical Vapour Deposition (AREA)
- Fixed Capacitors And Capacitor Manufacturing Machines (AREA)
Abstract
Vapour deposition appts for applying polymer films on a metal support, comprises a vacuum chamber contg. electrodes and a suspension device upon which the support is mounted between the two electrodes. The suspension frame is insulated form the housing and from the electrodes. A uniform film thickness is obtd. over the entire area. Suitable for micro-electronics mfr, e.g. thin film capacitors.
Priority Applications (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DE19722251954 DE2251954A1 (en) | 1972-10-30 | 1972-10-23 | DEVICE FOR EVAPORATING POLYMER FILMS ON A METAL SUPPORT |
FR7238399A FR2213351A1 (en) | 1972-10-30 | 1972-10-30 | Vapour deposition of polymer film - using electrodes independent from support for film |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
FR7238399A FR2213351A1 (en) | 1972-10-30 | 1972-10-30 | Vapour deposition of polymer film - using electrodes independent from support for film |
Publications (2)
Publication Number | Publication Date |
---|---|
FR2213351A1 true FR2213351A1 (en) | 1974-08-02 |
FR2213351B1 FR2213351B1 (en) | 1976-10-29 |
Family
ID=9106407
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
FR7238399A Granted FR2213351A1 (en) | 1972-10-30 | 1972-10-30 | Vapour deposition of polymer film - using electrodes independent from support for film |
Country Status (2)
Country | Link |
---|---|
DE (1) | DE2251954A1 (en) |
FR (1) | FR2213351A1 (en) |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
FR2328025A1 (en) * | 1975-08-22 | 1977-05-13 | Bosch Gmbh Robert | PROCESS FOR MAKING A PROTECTIVE LAYER ON THE SURFACE OF OPTICAL REFLECTORS AND REFLECTORS THUS OBTAINED |
FR2472182A1 (en) * | 1979-12-18 | 1981-06-26 | Tokyo Metropolitan Government | Polymeric replica films of specimens for electron microscopy - formed directly on the surface of specimen by plasma polymerisation of organic monomer vapours |
DE3020815A1 (en) * | 1980-06-02 | 1981-12-10 | Siemens AG, 1000 Berlin und 8000 München | Glow discharge process for coating e.g. with polymer or silicon - uses gas reservoir behind counter electrodes with large open perforated area |
Families Citing this family (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE2847620C2 (en) * | 1978-11-02 | 1984-10-18 | Siemens AG, 1000 Berlin und 8000 München | Device for the production of electrical components, in particular film capacitors |
DE2848480C2 (en) * | 1978-11-08 | 1984-11-08 | Siemens AG, 1000 Berlin und 8000 München | Device for applying layers to substrates under vacuum |
DE2908467A1 (en) * | 1979-03-05 | 1980-09-11 | Siemens Ag | REGENERABLE ELECTRIC LAYER CAPACITOR |
Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3252830A (en) * | 1958-03-05 | 1966-05-24 | Gen Electric | Electric capacitor and method for making the same |
FR1488512A (en) * | 1965-07-26 | 1967-07-13 | Metal Containers Ltd | A method of forming a coating on an article by means of glow discharge polymerization and a coated article or article of manufacture produced by the above method |
-
1972
- 1972-10-23 DE DE19722251954 patent/DE2251954A1/en active Pending
- 1972-10-30 FR FR7238399A patent/FR2213351A1/en active Granted
Patent Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3252830A (en) * | 1958-03-05 | 1966-05-24 | Gen Electric | Electric capacitor and method for making the same |
FR1488512A (en) * | 1965-07-26 | 1967-07-13 | Metal Containers Ltd | A method of forming a coating on an article by means of glow discharge polymerization and a coated article or article of manufacture produced by the above method |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
FR2328025A1 (en) * | 1975-08-22 | 1977-05-13 | Bosch Gmbh Robert | PROCESS FOR MAKING A PROTECTIVE LAYER ON THE SURFACE OF OPTICAL REFLECTORS AND REFLECTORS THUS OBTAINED |
FR2472182A1 (en) * | 1979-12-18 | 1981-06-26 | Tokyo Metropolitan Government | Polymeric replica films of specimens for electron microscopy - formed directly on the surface of specimen by plasma polymerisation of organic monomer vapours |
DE3020815A1 (en) * | 1980-06-02 | 1981-12-10 | Siemens AG, 1000 Berlin und 8000 München | Glow discharge process for coating e.g. with polymer or silicon - uses gas reservoir behind counter electrodes with large open perforated area |
Also Published As
Publication number | Publication date |
---|---|
DE2251954A1 (en) | 1974-04-25 |
FR2213351B1 (en) | 1976-10-29 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
ST | Notification of lapse |