JPS5758354A - Semiconductor device - Google Patents
Semiconductor deviceInfo
- Publication number
- JPS5758354A JPS5758354A JP13326080A JP13326080A JPS5758354A JP S5758354 A JPS5758354 A JP S5758354A JP 13326080 A JP13326080 A JP 13326080A JP 13326080 A JP13326080 A JP 13326080A JP S5758354 A JPS5758354 A JP S5758354A
- Authority
- JP
- Japan
- Prior art keywords
- junction
- layers
- heating
- junctions
- writing
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000004065 semiconductor Substances 0.000 title abstract 2
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 abstract 3
- 238000010438 heat treatment Methods 0.000 abstract 3
- 230000015556 catabolic process Effects 0.000 abstract 2
- 229910021417 amorphous silicon Inorganic materials 0.000 abstract 1
- 229910052681 coesite Inorganic materials 0.000 abstract 1
- 229910052906 cristobalite Inorganic materials 0.000 abstract 1
- 239000010408 film Substances 0.000 abstract 1
- 238000005224 laser annealing Methods 0.000 abstract 1
- 238000000034 method Methods 0.000 abstract 1
- 238000000059 patterning Methods 0.000 abstract 1
- 230000005855 radiation Effects 0.000 abstract 1
- 239000000377 silicon dioxide Substances 0.000 abstract 1
- 235000012239 silicon dioxide Nutrition 0.000 abstract 1
- 229910052682 stishovite Inorganic materials 0.000 abstract 1
- 239000000126 substance Substances 0.000 abstract 1
- 239000000758 substrate Substances 0.000 abstract 1
- 239000010409 thin film Substances 0.000 abstract 1
- 229910052905 tridymite Inorganic materials 0.000 abstract 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
- H01L27/02—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers
- H01L27/12—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being other than a semiconductor body, e.g. an insulating body
Landscapes
- Engineering & Computer Science (AREA)
- Power Engineering (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Read Only Memory (AREA)
- Semiconductor Memories (AREA)
Abstract
PURPOSE:To obtain the semiconductor device having highly reliable PROM function which consumes minor power for writing in by a method wherein a substance of low thermal conductivity is provided in close vicinity to the heating section, containing a P-N junction, on an Si substrate and the P-N junctions is broken down by the heating of current application. CONSTITUTION:An amorphous Si thin film is deposited on a quartz glass plate 20 and a patterning is performed. After a laser annealing has been performed, a P- layer 21 and N<+> layers 23 and 25 are formed by implanting a B ion in a layer 21 and an As ion in layers 23 and 25. An SiO2 film 26, having low thermal conductivity, is covered on the above, an aperture is selectively provided and Al conductive layers 27 and 28 are formed. According to this constitution, at the time when voltage is applied to conductive layers 27 and 28, they are highly resistive at the breakdown voltage below VB, they are broken down by the heating of the PN junction 22 or 24 when the breakdown voltage exceeds VB, they are conduted and program is wrote in. As the PN junctions 22 and 24 are covered by the SiO226, the radiation to the outside of the generated heat at the PN junction is prvented, programming can be performed by mirror power application, the highly accurate positional control of the P-N junction can be performed easily and a high resistive condition can also be obtained easily before performance of writing in.
Priority Applications (7)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP13326080A JPS5758354A (en) | 1980-09-24 | 1980-09-24 | Semiconductor device |
FR8116811A FR2490860B1 (en) | 1980-09-24 | 1981-09-04 | PROGRAMMABLE STORAGE SEMICONDUCTOR WITH ONLY READING, OF SHORT-JUNCTION TYPE |
US06/300,345 US4538167A (en) | 1980-09-24 | 1981-09-08 | Shorted junction type programmable read only memory semiconductor devices |
CA000385573A CA1177957A (en) | 1980-09-24 | 1981-09-10 | Shorted junction type programmable read only memory semi-conductor devices |
GB8128004A GB2086653B (en) | 1980-09-24 | 1981-09-16 | Shorted-junction programmable read only memory semiconductor devices |
DE3137730A DE3137730C2 (en) | 1980-09-24 | 1981-09-22 | Semiconductor component for programmable read-only memories |
NLAANVRAGE8104364,A NL189163C (en) | 1980-09-24 | 1981-09-23 | PROM SEMICONDUCTOR ELEMENT. |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP13326080A JPS5758354A (en) | 1980-09-24 | 1980-09-24 | Semiconductor device |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS5758354A true JPS5758354A (en) | 1982-04-08 |
Family
ID=15100452
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP13326080A Pending JPS5758354A (en) | 1980-09-24 | 1980-09-24 | Semiconductor device |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5758354A (en) |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS57145365A (en) * | 1981-03-05 | 1982-09-08 | Seiko Epson Corp | Semiconductor fixing circuit device |
JPS58209157A (en) * | 1982-05-31 | 1983-12-06 | Seiko Epson Corp | Semiconductor memory cell |
JPS59160893A (en) * | 1983-03-01 | 1984-09-11 | Nippon Telegr & Teleph Corp <Ntt> | Read-only memory |
Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS54155784A (en) * | 1978-05-30 | 1979-12-08 | Nec Corp | Manufacture of semiconductor integrated-circuit device |
JPS5521113A (en) * | 1978-08-02 | 1980-02-15 | Hitachi Ltd | Junction break-down type programmable read-only memory semiconductor device |
JPS55105365A (en) * | 1979-02-07 | 1980-08-12 | Nec Corp | Semiconductor device |
-
1980
- 1980-09-24 JP JP13326080A patent/JPS5758354A/en active Pending
Patent Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS54155784A (en) * | 1978-05-30 | 1979-12-08 | Nec Corp | Manufacture of semiconductor integrated-circuit device |
JPS5521113A (en) * | 1978-08-02 | 1980-02-15 | Hitachi Ltd | Junction break-down type programmable read-only memory semiconductor device |
JPS55105365A (en) * | 1979-02-07 | 1980-08-12 | Nec Corp | Semiconductor device |
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS57145365A (en) * | 1981-03-05 | 1982-09-08 | Seiko Epson Corp | Semiconductor fixing circuit device |
JPS58209157A (en) * | 1982-05-31 | 1983-12-06 | Seiko Epson Corp | Semiconductor memory cell |
JPS59160893A (en) * | 1983-03-01 | 1984-09-11 | Nippon Telegr & Teleph Corp <Ntt> | Read-only memory |
JPS623517B2 (en) * | 1983-03-01 | 1987-01-26 | Nippon Telegraph & Telephone |
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