JPS5754338A - Handotaiueehatokuseinosokuteihoho - Google Patents

Handotaiueehatokuseinosokuteihoho

Info

Publication number
JPS5754338A
JPS5754338A JP12905580A JP12905580A JPS5754338A JP S5754338 A JPS5754338 A JP S5754338A JP 12905580 A JP12905580 A JP 12905580A JP 12905580 A JP12905580 A JP 12905580A JP S5754338 A JPS5754338 A JP S5754338A
Authority
JP
Japan
Prior art keywords
semiconductor wafer
electrical conductivity
beams
light beams
value
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP12905580A
Other languages
English (en)
Other versions
JPS5829623B2 (ja
Inventor
Yoichiro Ogita
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
IKUTOKU KOGYO DAIGAKU
Original Assignee
IKUTOKU KOGYO DAIGAKU
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by IKUTOKU KOGYO DAIGAKU filed Critical IKUTOKU KOGYO DAIGAKU
Priority to JP55129055A priority Critical patent/JPS5829623B2/ja
Publication of JPS5754338A publication Critical patent/JPS5754338A/ja
Publication of JPS5829623B2 publication Critical patent/JPS5829623B2/ja
Expired legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L22/00—Testing or measuring during manufacture or treatment; Reliability measurements, i.e. testing of parts without further processing to modify the parts as such; Structural arrangements therefor

Landscapes

  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
JP55129055A 1980-09-19 1980-09-19 半導体ウエ−ハ特性の測定方法 Expired JPS5829623B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP55129055A JPS5829623B2 (ja) 1980-09-19 1980-09-19 半導体ウエ−ハ特性の測定方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP55129055A JPS5829623B2 (ja) 1980-09-19 1980-09-19 半導体ウエ−ハ特性の測定方法

Publications (2)

Publication Number Publication Date
JPS5754338A true JPS5754338A (ja) 1982-03-31
JPS5829623B2 JPS5829623B2 (ja) 1983-06-23

Family

ID=14999965

Family Applications (1)

Application Number Title Priority Date Filing Date
JP55129055A Expired JPS5829623B2 (ja) 1980-09-19 1980-09-19 半導体ウエ−ハ特性の測定方法

Country Status (1)

Country Link
JP (1) JPS5829623B2 (ja)

Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59150443A (ja) * 1983-02-16 1984-08-28 Leo Giken:Kk 半導体のキヤリアライフタイム計測装置
JPH07130810A (ja) * 1993-11-08 1995-05-19 Hitachi Ltd キャリヤライフタイム測定法及びその装置
DE112010003968T5 (de) 2009-10-06 2012-12-06 Kabushiki Kaisha Kobe Seiko Sho (Kobe Steel, Ltd.) Einrichtung und Verfahren zum Messen einer Halbleiterträgerlebensdauer
JP2013026461A (ja) * 2011-07-21 2013-02-04 Semiconductor Energy Lab Co Ltd 半導体基板の評価方法
JP2013197179A (ja) * 2012-03-16 2013-09-30 Kobe Steel Ltd 半導体評価方法、及び半導体評価装置
JP2017212329A (ja) * 2016-05-25 2017-11-30 京セラ株式会社 キャリアライフタイム測定装置およびキャリアライフタイムの測定方法
WO2023084923A1 (ja) * 2021-11-10 2023-05-19 株式会社Sumco 半導体試料の評価方法、半導体試料の評価装置および半導体ウェーハの製造方法

Cited By (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59150443A (ja) * 1983-02-16 1984-08-28 Leo Giken:Kk 半導体のキヤリアライフタイム計測装置
JPH07130810A (ja) * 1993-11-08 1995-05-19 Hitachi Ltd キャリヤライフタイム測定法及びその装置
DE112010003968T5 (de) 2009-10-06 2012-12-06 Kabushiki Kaisha Kobe Seiko Sho (Kobe Steel, Ltd.) Einrichtung und Verfahren zum Messen einer Halbleiterträgerlebensdauer
US9279762B2 (en) 2009-10-06 2016-03-08 Kobe Steel, Ltd. Apparatus and method for measuring semiconductor carrier lifetime
JP2013026461A (ja) * 2011-07-21 2013-02-04 Semiconductor Energy Lab Co Ltd 半導体基板の評価方法
JP2013197179A (ja) * 2012-03-16 2013-09-30 Kobe Steel Ltd 半導体評価方法、及び半導体評価装置
JP2017212329A (ja) * 2016-05-25 2017-11-30 京セラ株式会社 キャリアライフタイム測定装置およびキャリアライフタイムの測定方法
WO2023084923A1 (ja) * 2021-11-10 2023-05-19 株式会社Sumco 半導体試料の評価方法、半導体試料の評価装置および半導体ウェーハの製造方法
JP2023070851A (ja) * 2021-11-10 2023-05-22 株式会社Sumco 半導体試料の評価方法、半導体試料の評価装置および半導体ウェーハの製造方法

Also Published As

Publication number Publication date
JPS5829623B2 (ja) 1983-06-23

Similar Documents

Publication Publication Date Title
JPS5754338A (ja) Handotaiueehatokuseinosokuteihoho
JPS5735320A (en) Structure of mask for baking of semiconductor integrated circuit
JPS57108761A (en) Measuring method for soil of insulator
JPS5236789A (en) Porcelain composition for humidity sensing resister
JPS5422168A (en) Glass coating method for semiconductor element
JPS544078A (en) Inspection method of performance of circuit element
JPS5582447A (en) Evaluating method for semiconductor
JPS57204141A (en) Method of inspecting deflection of semiconductor substrate
JPS522459A (en) Balance
JPS5240163A (en) Measurement method
JPS5319860A (en) Measuring apparatus for tread of vehicle
JPS5760884A (en) Semiconductor laser
JPS54877A (en) Marking method for semiconductor chip
JPS5298467A (en) Resistivity measuring method for semiconductor devices
JPS5276977A (en) Belt tension meter
JPS5763463A (en) Wafer for measuring diameter of electron beam and beam current
JPS5348667A (en) Evaluation method of silicon single crystal wafer
JPS5367476A (en) Measuring method of tension upon anchoring chain
JPS5753884A (ja) Jikibaburusoshinokensahoho
JPS5355097A (en) Measuring method for composition distribution
JPS5360579A (en) Production of semiconductor device
JPS5421277A (en) Inspection method for pattern
JPS57108603A (en) Detecting method for configuration
JPS5232275A (en) Wafer inspector
JPS5380596A (en) Surface condition finding method for insulator etc