JPS5754315A - Preparation of semiconductor device - Google Patents

Preparation of semiconductor device

Info

Publication number
JPS5754315A
JPS5754315A JP55130952A JP13095280A JPS5754315A JP S5754315 A JPS5754315 A JP S5754315A JP 55130952 A JP55130952 A JP 55130952A JP 13095280 A JP13095280 A JP 13095280A JP S5754315 A JPS5754315 A JP S5754315A
Authority
JP
Japan
Prior art keywords
layer
insulated
diffused
film
metallic
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP55130952A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0119251B2 (enExample
Inventor
Kiyohiro Kawasaki
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Holdings Corp
Original Assignee
Matsushita Electric Industrial Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushita Electric Industrial Co Ltd filed Critical Matsushita Electric Industrial Co Ltd
Priority to JP55130952A priority Critical patent/JPS5754315A/ja
Publication of JPS5754315A publication Critical patent/JPS5754315A/ja
Publication of JPH0119251B2 publication Critical patent/JPH0119251B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H10P32/16—

Landscapes

  • Electrodes Of Semiconductors (AREA)
JP55130952A 1980-09-19 1980-09-19 Preparation of semiconductor device Granted JPS5754315A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP55130952A JPS5754315A (en) 1980-09-19 1980-09-19 Preparation of semiconductor device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP55130952A JPS5754315A (en) 1980-09-19 1980-09-19 Preparation of semiconductor device

Publications (2)

Publication Number Publication Date
JPS5754315A true JPS5754315A (en) 1982-03-31
JPH0119251B2 JPH0119251B2 (enExample) 1989-04-11

Family

ID=15046474

Family Applications (1)

Application Number Title Priority Date Filing Date
JP55130952A Granted JPS5754315A (en) 1980-09-19 1980-09-19 Preparation of semiconductor device

Country Status (1)

Country Link
JP (1) JPS5754315A (enExample)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59125621A (ja) * 1982-12-28 1984-07-20 Fujitsu Ltd 半導体製造装置
JPS63306623A (ja) * 1987-06-08 1988-12-14 Rohm Co Ltd 半導体装置のシンタリング方法

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59125621A (ja) * 1982-12-28 1984-07-20 Fujitsu Ltd 半導体製造装置
JPS63306623A (ja) * 1987-06-08 1988-12-14 Rohm Co Ltd 半導体装置のシンタリング方法

Also Published As

Publication number Publication date
JPH0119251B2 (enExample) 1989-04-11

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