JPS5753539A - Method and apparatus for forming coating film in vacuum - Google Patents

Method and apparatus for forming coating film in vacuum

Info

Publication number
JPS5753539A
JPS5753539A JP12974880A JP12974880A JPS5753539A JP S5753539 A JPS5753539 A JP S5753539A JP 12974880 A JP12974880 A JP 12974880A JP 12974880 A JP12974880 A JP 12974880A JP S5753539 A JPS5753539 A JP S5753539A
Authority
JP
Japan
Prior art keywords
substrate
glow discharge
evaporation
exposing
electron gun
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP12974880A
Other languages
English (en)
Other versions
JPS6046182B2 (ja
Inventor
Koichi Shinohara
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Holdings Corp
Original Assignee
Matsushita Electric Industrial Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushita Electric Industrial Co Ltd filed Critical Matsushita Electric Industrial Co Ltd
Priority to JP55129748A priority Critical patent/JPS6046182B2/ja
Publication of JPS5753539A publication Critical patent/JPS5753539A/ja
Publication of JPS6046182B2 publication Critical patent/JPS6046182B2/ja
Expired legal-status Critical Current

Links

JP55129748A 1980-09-17 1980-09-17 真空内被膜形成方法ならびに装置 Expired JPS6046182B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP55129748A JPS6046182B2 (ja) 1980-09-17 1980-09-17 真空内被膜形成方法ならびに装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP55129748A JPS6046182B2 (ja) 1980-09-17 1980-09-17 真空内被膜形成方法ならびに装置

Publications (2)

Publication Number Publication Date
JPS5753539A true JPS5753539A (en) 1982-03-30
JPS6046182B2 JPS6046182B2 (ja) 1985-10-15

Family

ID=15017221

Family Applications (1)

Application Number Title Priority Date Filing Date
JP55129748A Expired JPS6046182B2 (ja) 1980-09-17 1980-09-17 真空内被膜形成方法ならびに装置

Country Status (1)

Country Link
JP (1) JPS6046182B2 (ja)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5894133A (ja) * 1981-11-28 1983-06-04 Hitachi Condenser Co Ltd 磁気記録媒体の製造装置
JPS60113330A (ja) * 1983-11-22 1985-06-19 Dainippon Printing Co Ltd 磁気記録媒体の製造方法
CN1103685C (zh) * 1998-02-27 2003-03-26 松下电器产业株式会社 层压体的制造方法

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH03131373A (ja) * 1990-09-10 1991-06-04 Iseki & Co Ltd 籾摺装置の壺穴式回転選穀装置の伝導装置
CN106222624A (zh) * 2016-09-30 2016-12-14 铜陵市超越电子有限公司 一种设有纠偏送膜机构的真空镀膜机
CN106350772A (zh) * 2016-09-30 2017-01-25 铜陵市超越电子有限公司 一种设有在线分切收卷机构的真空镀膜机

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2925062A (en) * 1953-05-15 1960-02-16 Heraeus Gmbh W C Coating apparatus
DE2758772A1 (de) * 1976-12-29 1978-07-06 Matsushita Electric Ind Co Ltd Verfahren und einrichtung zur herstellung magnetischer aufzeichnungsmedien
US4204942A (en) * 1978-10-11 1980-05-27 Heat Mirror Associates Apparatus for multilayer thin film deposition

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2925062A (en) * 1953-05-15 1960-02-16 Heraeus Gmbh W C Coating apparatus
DE2758772A1 (de) * 1976-12-29 1978-07-06 Matsushita Electric Ind Co Ltd Verfahren und einrichtung zur herstellung magnetischer aufzeichnungsmedien
US4204942A (en) * 1978-10-11 1980-05-27 Heat Mirror Associates Apparatus for multilayer thin film deposition

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5894133A (ja) * 1981-11-28 1983-06-04 Hitachi Condenser Co Ltd 磁気記録媒体の製造装置
JPS60113330A (ja) * 1983-11-22 1985-06-19 Dainippon Printing Co Ltd 磁気記録媒体の製造方法
JPH0510732B2 (ja) * 1983-11-22 1993-02-10 Dainippon Printing Co Ltd
CN1103685C (zh) * 1998-02-27 2003-03-26 松下电器产业株式会社 层压体的制造方法

Also Published As

Publication number Publication date
JPS6046182B2 (ja) 1985-10-15

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