JPS5753539A - Method and apparatus for forming coating film in vacuum - Google Patents
Method and apparatus for forming coating film in vacuumInfo
- Publication number
- JPS5753539A JPS5753539A JP12974880A JP12974880A JPS5753539A JP S5753539 A JPS5753539 A JP S5753539A JP 12974880 A JP12974880 A JP 12974880A JP 12974880 A JP12974880 A JP 12974880A JP S5753539 A JPS5753539 A JP S5753539A
- Authority
- JP
- Japan
- Prior art keywords
- substrate
- glow discharge
- evaporation
- exposing
- electron gun
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP55129748A JPS6046182B2 (ja) | 1980-09-17 | 1980-09-17 | 真空内被膜形成方法ならびに装置 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP55129748A JPS6046182B2 (ja) | 1980-09-17 | 1980-09-17 | 真空内被膜形成方法ならびに装置 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS5753539A true JPS5753539A (en) | 1982-03-30 |
JPS6046182B2 JPS6046182B2 (ja) | 1985-10-15 |
Family
ID=15017221
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP55129748A Expired JPS6046182B2 (ja) | 1980-09-17 | 1980-09-17 | 真空内被膜形成方法ならびに装置 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS6046182B2 (ja) |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5894133A (ja) * | 1981-11-28 | 1983-06-04 | Hitachi Condenser Co Ltd | 磁気記録媒体の製造装置 |
JPS60113330A (ja) * | 1983-11-22 | 1985-06-19 | Dainippon Printing Co Ltd | 磁気記録媒体の製造方法 |
CN1103685C (zh) * | 1998-02-27 | 2003-03-26 | 松下电器产业株式会社 | 层压体的制造方法 |
Families Citing this family (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH03131373A (ja) * | 1990-09-10 | 1991-06-04 | Iseki & Co Ltd | 籾摺装置の壺穴式回転選穀装置の伝導装置 |
CN106222624A (zh) * | 2016-09-30 | 2016-12-14 | 铜陵市超越电子有限公司 | 一种设有纠偏送膜机构的真空镀膜机 |
CN106350772A (zh) * | 2016-09-30 | 2017-01-25 | 铜陵市超越电子有限公司 | 一种设有在线分切收卷机构的真空镀膜机 |
Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US2925062A (en) * | 1953-05-15 | 1960-02-16 | Heraeus Gmbh W C | Coating apparatus |
DE2758772A1 (de) * | 1976-12-29 | 1978-07-06 | Matsushita Electric Ind Co Ltd | Verfahren und einrichtung zur herstellung magnetischer aufzeichnungsmedien |
US4204942A (en) * | 1978-10-11 | 1980-05-27 | Heat Mirror Associates | Apparatus for multilayer thin film deposition |
-
1980
- 1980-09-17 JP JP55129748A patent/JPS6046182B2/ja not_active Expired
Patent Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US2925062A (en) * | 1953-05-15 | 1960-02-16 | Heraeus Gmbh W C | Coating apparatus |
DE2758772A1 (de) * | 1976-12-29 | 1978-07-06 | Matsushita Electric Ind Co Ltd | Verfahren und einrichtung zur herstellung magnetischer aufzeichnungsmedien |
US4204942A (en) * | 1978-10-11 | 1980-05-27 | Heat Mirror Associates | Apparatus for multilayer thin film deposition |
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5894133A (ja) * | 1981-11-28 | 1983-06-04 | Hitachi Condenser Co Ltd | 磁気記録媒体の製造装置 |
JPS60113330A (ja) * | 1983-11-22 | 1985-06-19 | Dainippon Printing Co Ltd | 磁気記録媒体の製造方法 |
JPH0510732B2 (ja) * | 1983-11-22 | 1993-02-10 | Dainippon Printing Co Ltd | |
CN1103685C (zh) * | 1998-02-27 | 2003-03-26 | 松下电器产业株式会社 | 层压体的制造方法 |
Also Published As
Publication number | Publication date |
---|---|
JPS6046182B2 (ja) | 1985-10-15 |
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