JPS5748980B2 - - Google Patents
Info
- Publication number
- JPS5748980B2 JPS5748980B2 JP11292074A JP11292074A JPS5748980B2 JP S5748980 B2 JPS5748980 B2 JP S5748980B2 JP 11292074 A JP11292074 A JP 11292074A JP 11292074 A JP11292074 A JP 11292074A JP S5748980 B2 JPS5748980 B2 JP S5748980B2
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Landscapes
- Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
- Coating Apparatus (AREA)
- ing And Chemical Polishing (AREA)
- Manufacturing Of Magnetic Record Carriers (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11292074A JPS5139737A (ja) | 1974-10-01 | 1974-10-01 | Hakusotofuyosupinnaa |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11292074A JPS5139737A (ja) | 1974-10-01 | 1974-10-01 | Hakusotofuyosupinnaa |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5139737A JPS5139737A (ja) | 1976-04-02 |
| JPS5748980B2 true JPS5748980B2 (es) | 1982-10-19 |
Family
ID=14598780
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP11292074A Granted JPS5139737A (ja) | 1974-10-01 | 1974-10-01 | Hakusotofuyosupinnaa |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5139737A (es) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5985280U (ja) * | 1982-11-29 | 1984-06-08 | 株式会社トミー | ボ−ル誘導ゲ−ム盤 |
Families Citing this family (15)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS584587B2 (ja) * | 1977-06-14 | 1983-01-27 | 松下電器産業株式会社 | 回転式粘性剤塗布方法およびその装置 |
| JPS584588B2 (ja) * | 1977-06-30 | 1983-01-27 | 松下電器産業株式会社 | 粘性剤塗布装置 |
| JPS5498574A (en) * | 1978-01-20 | 1979-08-03 | Matsushita Electric Ind Co Ltd | Rotary coating unit of viscous material |
| US4517752A (en) * | 1983-06-27 | 1985-05-21 | Machine Technology, Inc. | Splash retarder |
| JPS60143871A (ja) * | 1983-12-28 | 1985-07-30 | Toshiba Corp | レジスト塗布装置 |
| JPS6156414A (ja) * | 1984-08-28 | 1986-03-22 | Fujitsu Ltd | スピンコ−ト方法 |
| US4587139A (en) * | 1984-12-21 | 1986-05-06 | International Business Machines Corporation | Magnetic disk coating method and apparatus |
| JPS64737A (en) * | 1987-03-27 | 1989-01-05 | Toshiba Corp | Applicator for resist |
| JPH084771B2 (ja) * | 1987-04-03 | 1996-01-24 | 東京エレクトロン株式会社 | 塗布装置及びそれを用いた塗布方法 |
| FR2636546B1 (fr) * | 1988-09-15 | 1991-03-15 | Sulzer Electro Tech | Procede et dispositif pour l'application uniformement reguliere d'une couche de resine sur un substrat |
| JP2603431B2 (ja) * | 1993-12-15 | 1997-04-23 | 東京応化工業株式会社 | 塗布装置 |
| JP2697810B2 (ja) * | 1995-01-30 | 1998-01-14 | 東京エレクトロン株式会社 | 塗布方法及びそれに用いる塗布装置 |
| JP2588379B2 (ja) * | 1995-01-30 | 1997-03-05 | 東京エレクトロン株式会社 | 塗布装置 |
| JP3667222B2 (ja) * | 1999-10-19 | 2005-07-06 | 東京エレクトロン株式会社 | 塗布処理装置 |
| US6565656B2 (en) * | 1999-12-20 | 2003-05-20 | Toyko Electron Limited | Coating processing apparatus |
-
1974
- 1974-10-01 JP JP11292074A patent/JPS5139737A/ja active Granted
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5985280U (ja) * | 1982-11-29 | 1984-06-08 | 株式会社トミー | ボ−ル誘導ゲ−ム盤 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5139737A (ja) | 1976-04-02 |