JPS5139737A - Hakusotofuyosupinnaa - Google Patents

Hakusotofuyosupinnaa

Info

Publication number
JPS5139737A
JPS5139737A JP11292074A JP11292074A JPS5139737A JP S5139737 A JPS5139737 A JP S5139737A JP 11292074 A JP11292074 A JP 11292074A JP 11292074 A JP11292074 A JP 11292074A JP S5139737 A JPS5139737 A JP S5139737A
Authority
JP
Japan
Prior art keywords
supinnaa
hakusotofuyo
hakusotofuyo supinnaa
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP11292074A
Other languages
English (en)
Other versions
JPS5748980B2 (ja
Inventor
Takeshi Goshima
Ikuo Nishimura
Kimio Kono
Yoshinori Sugiura
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Canon Inc
Original Assignee
Canon Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Canon Inc filed Critical Canon Inc
Priority to JP11292074A priority Critical patent/JPS5139737A/ja
Publication of JPS5139737A publication Critical patent/JPS5139737A/ja
Publication of JPS5748980B2 publication Critical patent/JPS5748980B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Coating Apparatus (AREA)
  • ing And Chemical Polishing (AREA)
  • Manufacturing Of Magnetic Record Carriers (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
JP11292074A 1974-10-01 1974-10-01 Hakusotofuyosupinnaa Granted JPS5139737A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP11292074A JPS5139737A (ja) 1974-10-01 1974-10-01 Hakusotofuyosupinnaa

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP11292074A JPS5139737A (ja) 1974-10-01 1974-10-01 Hakusotofuyosupinnaa

Publications (2)

Publication Number Publication Date
JPS5139737A true JPS5139737A (ja) 1976-04-02
JPS5748980B2 JPS5748980B2 (ja) 1982-10-19

Family

ID=14598780

Family Applications (1)

Application Number Title Priority Date Filing Date
JP11292074A Granted JPS5139737A (ja) 1974-10-01 1974-10-01 Hakusotofuyosupinnaa

Country Status (1)

Country Link
JP (1) JPS5139737A (ja)

Cited By (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS544936A (en) * 1977-06-14 1979-01-16 Nat Jutaku Kenzai Rotary coating method of viscous material and apparatus therefor
JPS5412670A (en) * 1977-06-30 1979-01-30 Matsushita Electric Ind Co Ltd Viscous agnent coating device
JPS5498574A (en) * 1978-01-20 1979-08-03 Matsushita Electric Ind Co Ltd Rotary coating unit of viscous material
JPS6010628A (ja) * 1983-06-27 1985-01-19 マシン・テクノロジ−，インコ−ポレイテツド 処理液のはね返り防止装置とその方法
JPS60143871A (ja) * 1983-12-28 1985-07-30 Toshiba Corp レジスト塗布装置
JPS6156414A (ja) * 1984-08-28 1986-03-22 Fujitsu Ltd スピンコ−ト方法
JPS61150126A (ja) * 1984-12-21 1986-07-08 インタ−ナショナル　ビジネス　マシ−ンズ　コ−ポレ−ション 回転被覆装置
JPS63248471A (ja) * 1987-04-03 1988-10-14 Tokyo Electron Ltd 塗布装置及びそれを用いた塗布方法
JPS64737A (en) * 1987-03-27 1989-01-05 Toshiba Corp Applicator for resist
JPH02119974A (ja) * 1988-09-15 1990-05-08 Sulzer Electro Technic Set 基板に均一な樹脂コーティングを施す方法と装置
JPH0731924A (ja) * 1993-12-15 1995-02-03 Tokyo Ohka Kogyo Co Ltd 塗布装置
JPH07195024A (ja) * 1995-01-30 1995-08-01 Tokyo Electron Ltd 塗布方法及びそれに用いる塗布装置
JPH07195023A (ja) * 1995-01-30 1995-08-01 Tokyo Electron Ltd 塗布装置
JP2001189267A (ja) * 1999-10-19 2001-07-10 Tokyo Electron Ltd 塗布処理装置および塗布処理方法
JP2001239202A (ja) * 1999-12-20 2001-09-04 Tokyo Electron Ltd 塗布処理装置

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5985280U (ja) * 1982-11-29 1984-06-08 株式会社トミー ボ−ル誘導ゲ−ム盤

Cited By (17)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS544936A (en) * 1977-06-14 1979-01-16 Nat Jutaku Kenzai Rotary coating method of viscous material and apparatus therefor
JPS584587B2 (ja) * 1977-06-14 1983-01-27 松下電器産業株式会社 回転式粘性剤塗布方法およびその装置
JPS5412670A (en) * 1977-06-30 1979-01-30 Matsushita Electric Ind Co Ltd Viscous agnent coating device
JPS584588B2 (ja) * 1977-06-30 1983-01-27 松下電器産業株式会社 粘性剤塗布装置
JPS5498574A (en) * 1978-01-20 1979-08-03 Matsushita Electric Ind Co Ltd Rotary coating unit of viscous material
JPS6010628A (ja) * 1983-06-27 1985-01-19 マシン・テクノロジ−，インコ−ポレイテツド 処理液のはね返り防止装置とその方法
JPS60143871A (ja) * 1983-12-28 1985-07-30 Toshiba Corp レジスト塗布装置
JPS6156414A (ja) * 1984-08-28 1986-03-22 Fujitsu Ltd スピンコ−ト方法
JPS61150126A (ja) * 1984-12-21 1986-07-08 インタ−ナショナル　ビジネス　マシ−ンズ　コ−ポレ−ション 回転被覆装置
JPS64737A (en) * 1987-03-27 1989-01-05 Toshiba Corp Applicator for resist
JPS63248471A (ja) * 1987-04-03 1988-10-14 Tokyo Electron Ltd 塗布装置及びそれを用いた塗布方法
JPH02119974A (ja) * 1988-09-15 1990-05-08 Sulzer Electro Technic Set 基板に均一な樹脂コーティングを施す方法と装置
JPH0731924A (ja) * 1993-12-15 1995-02-03 Tokyo Ohka Kogyo Co Ltd 塗布装置
JPH07195024A (ja) * 1995-01-30 1995-08-01 Tokyo Electron Ltd 塗布方法及びそれに用いる塗布装置
JPH07195023A (ja) * 1995-01-30 1995-08-01 Tokyo Electron Ltd 塗布装置
JP2001189267A (ja) * 1999-10-19 2001-07-10 Tokyo Electron Ltd 塗布処理装置および塗布処理方法
JP2001239202A (ja) * 1999-12-20 2001-09-04 Tokyo Electron Ltd 塗布処理装置

Also Published As

Publication number Publication date
JPS5748980B2 (ja) 1982-10-19

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