JPS5736764A - Scan electron microscope - Google Patents

Scan electron microscope

Info

Publication number
JPS5736764A
JPS5736764A JP11254480A JP11254480A JPS5736764A JP S5736764 A JPS5736764 A JP S5736764A JP 11254480 A JP11254480 A JP 11254480A JP 11254480 A JP11254480 A JP 11254480A JP S5736764 A JPS5736764 A JP S5736764A
Authority
JP
Japan
Prior art keywords
specimen
image
secondary electron
ray tube
cathode ray
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP11254480A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0352179B2 (enrdf_load_stackoverflow
Inventor
Yasushi Kokubo
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Jeol Ltd
Original Assignee
Jeol Ltd
Nihon Denshi KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Jeol Ltd, Nihon Denshi KK filed Critical Jeol Ltd
Priority to JP11254480A priority Critical patent/JPS5736764A/ja
Publication of JPS5736764A publication Critical patent/JPS5736764A/ja
Publication of JPH0352179B2 publication Critical patent/JPH0352179B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/26—Electron or ion microscopes; Electron or ion diffraction tubes
    • H01J37/28—Electron or ion microscopes; Electron or ion diffraction tubes with scanning beams

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
JP11254480A 1980-08-15 1980-08-15 Scan electron microscope Granted JPS5736764A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP11254480A JPS5736764A (en) 1980-08-15 1980-08-15 Scan electron microscope

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP11254480A JPS5736764A (en) 1980-08-15 1980-08-15 Scan electron microscope

Publications (2)

Publication Number Publication Date
JPS5736764A true JPS5736764A (en) 1982-02-27
JPH0352179B2 JPH0352179B2 (enrdf_load_stackoverflow) 1991-08-09

Family

ID=14589299

Family Applications (1)

Application Number Title Priority Date Filing Date
JP11254480A Granted JPS5736764A (en) 1980-08-15 1980-08-15 Scan electron microscope

Country Status (1)

Country Link
JP (1) JPS5736764A (enrdf_load_stackoverflow)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01166453A (ja) * 1987-12-23 1989-06-30 Kawasaki Steel Corp コッセル像観察装置
JP2007165106A (ja) * 2005-12-13 2007-06-28 Sanyu Electron Co Ltd 画像生成方法および画像生成装置
JP2012003977A (ja) * 2010-06-17 2012-01-05 Jeol Ltd 荷電粒子ビーム装置

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01166453A (ja) * 1987-12-23 1989-06-30 Kawasaki Steel Corp コッセル像観察装置
JP2007165106A (ja) * 2005-12-13 2007-06-28 Sanyu Electron Co Ltd 画像生成方法および画像生成装置
JP2012003977A (ja) * 2010-06-17 2012-01-05 Jeol Ltd 荷電粒子ビーム装置

Also Published As

Publication number Publication date
JPH0352179B2 (enrdf_load_stackoverflow) 1991-08-09

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