JPS57158939A - Scanning type electron microscope - Google Patents
Scanning type electron microscopeInfo
- Publication number
- JPS57158939A JPS57158939A JP4395281A JP4395281A JPS57158939A JP S57158939 A JPS57158939 A JP S57158939A JP 4395281 A JP4395281 A JP 4395281A JP 4395281 A JP4395281 A JP 4395281A JP S57158939 A JPS57158939 A JP S57158939A
- Authority
- JP
- Japan
- Prior art keywords
- diaphragm
- circuit
- signals
- sample
- preamplifier
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/02—Details
- H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement, ion-optical arrangement
- H01J37/09—Diaphragms; Shields associated with electron or ion-optical arrangements; Compensation of disturbing fields
Landscapes
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
Abstract
PURPOSE:To automatically select a diaphragm hole in response to the selected setting of either observing or photographing changeover circuit. CONSTITUTION:A number of holes 15 with different diameters are formed on a diaphragm plate 5 and mounted on an axis 16. The electron beam probe 6 which is stopped by the diaphragm holes 15 is scanned two-dimensionally on a sample 7 by a deflection coil 11. The sample information signals of secondary electrons 14 etc. from the surface of the sample 7 are detected by a detector 13, amplified by a preamplifier 22 and a main amplifier 23, and displayed on the CRT. A diaphragm hole select circuit 21 is actuated by the signals from an observing or photographing changeover circuit 24 and the diaphragm plate 5 is moved by actuating a drive mechanism 18 by a drive circuit 20. The automatic signal regulating circuit in the preamplifier 22 and the main amplifier 23 is actuated by the output signals from the diaphragm select circuit 21 and the signal amount from the detector 13 and a constant value is always obtained for the signals to the CRT.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4395281A JPS57158939A (en) | 1981-03-27 | 1981-03-27 | Scanning type electron microscope |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4395281A JPS57158939A (en) | 1981-03-27 | 1981-03-27 | Scanning type electron microscope |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS57158939A true JPS57158939A (en) | 1982-09-30 |
Family
ID=12678031
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP4395281A Pending JPS57158939A (en) | 1981-03-27 | 1981-03-27 | Scanning type electron microscope |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS57158939A (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP0883157A1 (en) * | 1997-04-22 | 1998-12-09 | Schlumberger Technologies, Inc. | Optical system with an axially moveable apertured plate |
| JP2008257914A (en) * | 2007-04-02 | 2008-10-23 | Jeol Ltd | Beam apparatus |
-
1981
- 1981-03-27 JP JP4395281A patent/JPS57158939A/en active Pending
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP0883157A1 (en) * | 1997-04-22 | 1998-12-09 | Schlumberger Technologies, Inc. | Optical system with an axially moveable apertured plate |
| JP2008257914A (en) * | 2007-04-02 | 2008-10-23 | Jeol Ltd | Beam apparatus |
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