JPS5726704A - Measuring instrument for three-dimensional shape - Google Patents

Measuring instrument for three-dimensional shape

Info

Publication number
JPS5726704A
JPS5726704A JP10128180A JP10128180A JPS5726704A JP S5726704 A JPS5726704 A JP S5726704A JP 10128180 A JP10128180 A JP 10128180A JP 10128180 A JP10128180 A JP 10128180A JP S5726704 A JPS5726704 A JP S5726704A
Authority
JP
Japan
Prior art keywords
opening part
light
optical system
dimensional shape
coincides
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP10128180A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6246802B2 (OSRAM
Inventor
Yoshisada Oshida
Yoichi Kawada
Shinobu Watanabe
Noboru Umehara
Kenichi Isoda
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP10128180A priority Critical patent/JPS5726704A/ja
Priority to US06/286,512 priority patent/US4473750A/en
Publication of JPS5726704A publication Critical patent/JPS5726704A/ja
Publication of JPS6246802B2 publication Critical patent/JPS6246802B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/24—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Measurement Of Optical Distance (AREA)
JP10128180A 1980-07-25 1980-07-25 Measuring instrument for three-dimensional shape Granted JPS5726704A (en)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP10128180A JPS5726704A (en) 1980-07-25 1980-07-25 Measuring instrument for three-dimensional shape
US06/286,512 US4473750A (en) 1980-07-25 1981-07-24 Three-dimensional shape measuring device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP10128180A JPS5726704A (en) 1980-07-25 1980-07-25 Measuring instrument for three-dimensional shape

Publications (2)

Publication Number Publication Date
JPS5726704A true JPS5726704A (en) 1982-02-12
JPS6246802B2 JPS6246802B2 (OSRAM) 1987-10-05

Family

ID=14296475

Family Applications (1)

Application Number Title Priority Date Filing Date
JP10128180A Granted JPS5726704A (en) 1980-07-25 1980-07-25 Measuring instrument for three-dimensional shape

Country Status (1)

Country Link
JP (1) JPS5726704A (OSRAM)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58142210A (ja) * 1982-02-18 1983-08-24 Hitachi Ltd 三次元曲面を有する被測定物体の形状測定方法
JPH02129942A (ja) * 1988-10-11 1990-05-18 Kla Instr Corp 三次元物体の自動分析方法および装置

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01156253U (OSRAM) * 1988-04-13 1989-10-26
JPH0384402U (OSRAM) * 1989-12-19 1991-08-27
JP4050644B2 (ja) * 2003-03-27 2008-02-20 株式会社日本製鋼所 インラインスクリュ式可塑化射出装置

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58142210A (ja) * 1982-02-18 1983-08-24 Hitachi Ltd 三次元曲面を有する被測定物体の形状測定方法
JPH02129942A (ja) * 1988-10-11 1990-05-18 Kla Instr Corp 三次元物体の自動分析方法および装置

Also Published As

Publication number Publication date
JPS6246802B2 (OSRAM) 1987-10-05

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