JPS572522A - Defect inspecting device for regular pattern - Google Patents
Defect inspecting device for regular patternInfo
- Publication number
- JPS572522A JPS572522A JP7577880A JP7577880A JPS572522A JP S572522 A JPS572522 A JP S572522A JP 7577880 A JP7577880 A JP 7577880A JP 7577880 A JP7577880 A JP 7577880A JP S572522 A JPS572522 A JP S572522A
- Authority
- JP
- Japan
- Prior art keywords
- pattern
- fourier transformation
- inspected
- parallel
- emitted
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic System or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP7577880A JPS572522A (en) | 1980-06-05 | 1980-06-05 | Defect inspecting device for regular pattern |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP7577880A JPS572522A (en) | 1980-06-05 | 1980-06-05 | Defect inspecting device for regular pattern |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS572522A true JPS572522A (en) | 1982-01-07 |
JPS632041B2 JPS632041B2 (ja) | 1988-01-16 |
Family
ID=13586007
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP7577880A Granted JPS572522A (en) | 1980-06-05 | 1980-06-05 | Defect inspecting device for regular pattern |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS572522A (ja) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS62220239A (ja) * | 1986-03-20 | 1987-09-28 | Hitachi Metals Ltd | アプセツト加工用アンビル |
JPH02122061A (ja) * | 1988-10-28 | 1990-05-09 | Hitachi Koki Co Ltd | 浸炭焼入れを施した金属材料 |
Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5191737A (ja) * | 1975-02-10 | 1976-08-11 | ||
JPS54105967A (en) * | 1978-02-08 | 1979-08-20 | Toshiba Corp | Defect test system for pattern featuring directivity |
-
1980
- 1980-06-05 JP JP7577880A patent/JPS572522A/ja active Granted
Patent Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5191737A (ja) * | 1975-02-10 | 1976-08-11 | ||
JPS54105967A (en) * | 1978-02-08 | 1979-08-20 | Toshiba Corp | Defect test system for pattern featuring directivity |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS62220239A (ja) * | 1986-03-20 | 1987-09-28 | Hitachi Metals Ltd | アプセツト加工用アンビル |
JPH02122061A (ja) * | 1988-10-28 | 1990-05-09 | Hitachi Koki Co Ltd | 浸炭焼入れを施した金属材料 |
Also Published As
Publication number | Publication date |
---|---|
JPS632041B2 (ja) | 1988-01-16 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
JPS57131039A (en) | Defect detector | |
DE3776205D1 (de) | Vorrichtung zum pruefen von bauteilen aud transparentem material auf oberflaechenfehler und einschluesse. | |
JPS56103304A (en) | Electro optical inspecting device | |
JPS6253767B2 (ja) | ||
DE69531805D1 (de) | Inspektion einer Kontaktlinse mit einer Beleuchtung mit Doppelfokus | |
KR930010527A (ko) | 조사를 이용한 표면상태 검사방법 및 그 장치 | |
JPS641940A (en) | Through hole void inspection | |
JPS5713340A (en) | Inspection apparatus for surface defect | |
JPS572522A (en) | Defect inspecting device for regular pattern | |
JPS5667739A (en) | Defect inspecting apparatus | |
JPS56117106A (en) | Inspecting device for pattern defect | |
JPS5745230A (en) | Inspecting device for photomask dry plate | |
JPS55117946A (en) | Flaw detection method of hollow shaft inside surface | |
JPS545750A (en) | Pattern inspecting method | |
JPS55124008A (en) | Defect inspecting apparatus | |
JPS5643539A (en) | Defect inspection device of face plate | |
JPS56126745A (en) | Automatic inspecting device for surface of plate material | |
JPS57172254A (en) | Speed measuring device | |
JPS57173705A (en) | Method for checking mask for printed substrate | |
JPS5572851A (en) | Defect detector | |
JPS5477069A (en) | Mask inspecting method | |
JPS5382492A (en) | Surface inspecting method | |
JPS5485793A (en) | Inspecting method of photo masks | |
JPS6488240A (en) | Inspection of photosensitive material | |
JPS57130416A (en) | Apparatus for processing projecting substance |