JPS5477069A - Mask inspecting method - Google Patents

Mask inspecting method

Info

Publication number
JPS5477069A
JPS5477069A JP14393777A JP14393777A JPS5477069A JP S5477069 A JPS5477069 A JP S5477069A JP 14393777 A JP14393777 A JP 14393777A JP 14393777 A JP14393777 A JP 14393777A JP S5477069 A JPS5477069 A JP S5477069A
Authority
JP
Japan
Prior art keywords
mask
light source
inspected
light
changing
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP14393777A
Other languages
Japanese (ja)
Inventor
Toshio Sasaki
Nobuaki Oki
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP14393777A priority Critical patent/JPS5477069A/en
Publication of JPS5477069A publication Critical patent/JPS5477069A/en
Pending legal-status Critical Current

Links

Landscapes

  • Length Measuring Devices By Optical Means (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
  • Preparing Plates And Mask In Photomechanical Process (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)

Abstract

PURPOSE: To let inspection of flaws of the transpart part of photographic mask be readily performed by disposing an optical system of changing the light from a light source to parallel rays between the mask to be inspected and the light source.
CONSTITUTION: An optical system for changing the light from a light source to parallel rays, e.g., a fresnel lens 5, is disposed between a transparent glass table 4 to be placed thereon with the mask to be inspected 2 and the lighting light source 6 thereunder and further a ground glass projection screen 1 for projecting the light transmitting through the mask to be inspected is disposed in parallel to the glass table 4 by leaving a suitable distance therefrom.
COPYRIGHT: (C)1979,JPO&Japio
JP14393777A 1977-12-02 1977-12-02 Mask inspecting method Pending JPS5477069A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP14393777A JPS5477069A (en) 1977-12-02 1977-12-02 Mask inspecting method

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP14393777A JPS5477069A (en) 1977-12-02 1977-12-02 Mask inspecting method

Publications (1)

Publication Number Publication Date
JPS5477069A true JPS5477069A (en) 1979-06-20

Family

ID=15350527

Family Applications (1)

Application Number Title Priority Date Filing Date
JP14393777A Pending JPS5477069A (en) 1977-12-02 1977-12-02 Mask inspecting method

Country Status (1)

Country Link
JP (1) JPS5477069A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH032350U (en) * 1989-05-30 1991-01-10

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH032350U (en) * 1989-05-30 1991-01-10

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