JPS5360626A - Method for eliminating illumination irregularity - Google Patents
Method for eliminating illumination irregularityInfo
- Publication number
- JPS5360626A JPS5360626A JP13527976A JP13527976A JPS5360626A JP S5360626 A JPS5360626 A JP S5360626A JP 13527976 A JP13527976 A JP 13527976A JP 13527976 A JP13527976 A JP 13527976A JP S5360626 A JPS5360626 A JP S5360626A
- Authority
- JP
- Japan
- Prior art keywords
- illumination irregularity
- irregularity
- eliminating illumination
- eliminating
- exposure
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Abstract
PURPOSE: To eliminate illumination irregularity in an illumination method for photoresist exposure simply by arranging as filter between light source and object a product obtained by subjecting a photosensitive agent to exposure followed by developing.
COPYRIGHT: (C)1978,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP13527976A JPS5360626A (en) | 1976-11-12 | 1976-11-12 | Method for eliminating illumination irregularity |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP13527976A JPS5360626A (en) | 1976-11-12 | 1976-11-12 | Method for eliminating illumination irregularity |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS5360626A true JPS5360626A (en) | 1978-05-31 |
Family
ID=15147982
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP13527976A Pending JPS5360626A (en) | 1976-11-12 | 1976-11-12 | Method for eliminating illumination irregularity |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5360626A (en) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5968319U (en) * | 1982-10-29 | 1984-05-09 | 株式会社東芝 | optical device |
JPS59229502A (en) * | 1983-06-13 | 1984-12-24 | Ricoh Co Ltd | Element for optical writing |
Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS493651A (en) * | 1972-04-21 | 1974-01-12 |
-
1976
- 1976-11-12 JP JP13527976A patent/JPS5360626A/en active Pending
Patent Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS493651A (en) * | 1972-04-21 | 1974-01-12 |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5968319U (en) * | 1982-10-29 | 1984-05-09 | 株式会社東芝 | optical device |
JPS59229502A (en) * | 1983-06-13 | 1984-12-24 | Ricoh Co Ltd | Element for optical writing |
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