JPS5360626A - Method for eliminating illumination irregularity - Google Patents

Method for eliminating illumination irregularity

Info

Publication number
JPS5360626A
JPS5360626A JP13527976A JP13527976A JPS5360626A JP S5360626 A JPS5360626 A JP S5360626A JP 13527976 A JP13527976 A JP 13527976A JP 13527976 A JP13527976 A JP 13527976A JP S5360626 A JPS5360626 A JP S5360626A
Authority
JP
Japan
Prior art keywords
illumination irregularity
irregularity
eliminating illumination
eliminating
exposure
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP13527976A
Other languages
Japanese (ja)
Inventor
Mikio Osada
Nobuki Kawamura
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to JP13527976A priority Critical patent/JPS5360626A/en
Publication of JPS5360626A publication Critical patent/JPS5360626A/en
Pending legal-status Critical Current

Links

Abstract

PURPOSE: To eliminate illumination irregularity in an illumination method for photoresist exposure simply by arranging as filter between light source and object a product obtained by subjecting a photosensitive agent to exposure followed by developing.
COPYRIGHT: (C)1978,JPO&Japio
JP13527976A 1976-11-12 1976-11-12 Method for eliminating illumination irregularity Pending JPS5360626A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP13527976A JPS5360626A (en) 1976-11-12 1976-11-12 Method for eliminating illumination irregularity

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP13527976A JPS5360626A (en) 1976-11-12 1976-11-12 Method for eliminating illumination irregularity

Publications (1)

Publication Number Publication Date
JPS5360626A true JPS5360626A (en) 1978-05-31

Family

ID=15147982

Family Applications (1)

Application Number Title Priority Date Filing Date
JP13527976A Pending JPS5360626A (en) 1976-11-12 1976-11-12 Method for eliminating illumination irregularity

Country Status (1)

Country Link
JP (1) JPS5360626A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5968319U (en) * 1982-10-29 1984-05-09 株式会社東芝 optical device
JPS59229502A (en) * 1983-06-13 1984-12-24 Ricoh Co Ltd Element for optical writing

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS493651A (en) * 1972-04-21 1974-01-12

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS493651A (en) * 1972-04-21 1974-01-12

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5968319U (en) * 1982-10-29 1984-05-09 株式会社東芝 optical device
JPS59229502A (en) * 1983-06-13 1984-12-24 Ricoh Co Ltd Element for optical writing

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