JPS5724275A - Thermal head and manufacture thereof - Google Patents
Thermal head and manufacture thereofInfo
- Publication number
- JPS5724275A JPS5724275A JP9952480A JP9952480A JPS5724275A JP S5724275 A JPS5724275 A JP S5724275A JP 9952480 A JP9952480 A JP 9952480A JP 9952480 A JP9952480 A JP 9952480A JP S5724275 A JPS5724275 A JP S5724275A
- Authority
- JP
- Japan
- Prior art keywords
- layer
- heating element
- manufacture
- thermal head
- substrate
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Abstract
PURPOSE: To enhance the oxidation resistance of a heating element and the reliability of a product without increasing the cost in the manufacture of a thermal head used for an electrosensitive recorder, by a method wherein tantalum is coated on a substrate in an oxidizing atmosphere so as to forcibly oxidize the heating element.
CONSTITUTION: On the substrate 1 which is previously provided with a protuberant layer 6 as required, a current passing type tantalum-based heating element 2' is formed by sputtering or vacuum deposition. In this case, an appropriate oxidizing atmosphere is used in the apparatus for forming the element 2' so as to forcibly oxidize the element 2'. Thereafter, an electrode layer 3, an antioxidizing layer 4 and an abrasion-resisting layer 5 are sequentially formed. Since the oxidation resistance of the heating element 2' is previously enhanced, the antioxidizing layer 4 can be made thinner.
COPYRIGHT: (C)1982,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP9952480A JPS5724275A (en) | 1980-07-21 | 1980-07-21 | Thermal head and manufacture thereof |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP9952480A JPS5724275A (en) | 1980-07-21 | 1980-07-21 | Thermal head and manufacture thereof |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS5724275A true JPS5724275A (en) | 1982-02-08 |
Family
ID=14249614
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP9952480A Pending JPS5724275A (en) | 1980-07-21 | 1980-07-21 | Thermal head and manufacture thereof |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5724275A (en) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4612433A (en) * | 1983-12-28 | 1986-09-16 | Pentel Kabushiki Kaisha | Thermal head and manufacturing method thereof |
US4742362A (en) * | 1985-10-23 | 1988-05-03 | Alps Electric Co., Ltd. | Thermal head |
-
1980
- 1980-07-21 JP JP9952480A patent/JPS5724275A/en active Pending
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4612433A (en) * | 1983-12-28 | 1986-09-16 | Pentel Kabushiki Kaisha | Thermal head and manufacturing method thereof |
US4742362A (en) * | 1985-10-23 | 1988-05-03 | Alps Electric Co., Ltd. | Thermal head |
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