JPS54122193A - Production of humidity detecting element - Google Patents

Production of humidity detecting element

Info

Publication number
JPS54122193A
JPS54122193A JP3042378A JP3042378A JPS54122193A JP S54122193 A JPS54122193 A JP S54122193A JP 3042378 A JP3042378 A JP 3042378A JP 3042378 A JP3042378 A JP 3042378A JP S54122193 A JPS54122193 A JP S54122193A
Authority
JP
Japan
Prior art keywords
detecting element
humidity
vapor phase
oxide film
metal oxide
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP3042378A
Other languages
Japanese (ja)
Other versions
JPS5843894B2 (en
Inventor
Akihiko Yoshida
Atsushi Nishino
Osakuni Ogino
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Holdings Corp
Original Assignee
Matsushita Electric Industrial Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushita Electric Industrial Co Ltd filed Critical Matsushita Electric Industrial Co Ltd
Priority to JP3042378A priority Critical patent/JPS5843894B2/en
Priority to GB7906032A priority patent/GB2017924B/en
Priority to US06/014,382 priority patent/US4276128A/en
Publication of JPS54122193A publication Critical patent/JPS54122193A/en
Publication of JPS5843894B2 publication Critical patent/JPS5843894B2/en
Expired legal-status Critical Current

Links

Abstract

PURPOSE: To reduce the change of element characteristics with time for the use under high temperature and high humidity by applying vapor phase treatment under high temperature and high humidity to a humidity detecting element formed by laminating a dielectric anodic-oxidized film, semiconductive metal oxide film and conductive electrode on a metal substrate.
CONSTITUTION: A dielectric anodic-oxidized film 2 is formed on a metal substrate 1 such as tantalum, aluminum, silicon or other and a semiconductive metal oxide film 3 such as of manganese dioxide is laminated thereon. Further a current collecting electrode 4 composed of a carbon layer and a silver paint layer is formed thereon to provide the detecting element. Next, the abovementioned element is subjected to vapor phase treatment for about 30 hours or more under the temperature above the element service temperature (e.g., 80°C or higher) and relative humidity of about 90 to 100RH%.
COPYRIGHT: (C)1979,JPO&Japio
JP3042378A 1978-02-20 1978-03-15 Manufacturing method of humidity sensing element Expired JPS5843894B2 (en)

Priority Applications (3)

Application Number Priority Date Filing Date Title
JP3042378A JPS5843894B2 (en) 1978-03-15 1978-03-15 Manufacturing method of humidity sensing element
GB7906032A GB2017924B (en) 1978-02-20 1979-02-20 Humidity sensing element of electric capacitance change type and method of producing same
US06/014,382 US4276128A (en) 1978-02-20 1979-02-21 Humidity sensing element of electric capacitance change type and method of producing same

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP3042378A JPS5843894B2 (en) 1978-03-15 1978-03-15 Manufacturing method of humidity sensing element

Publications (2)

Publication Number Publication Date
JPS54122193A true JPS54122193A (en) 1979-09-21
JPS5843894B2 JPS5843894B2 (en) 1983-09-29

Family

ID=12303538

Family Applications (1)

Application Number Title Priority Date Filing Date
JP3042378A Expired JPS5843894B2 (en) 1978-02-20 1978-03-15 Manufacturing method of humidity sensing element

Country Status (1)

Country Link
JP (1) JPS5843894B2 (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS56150816A (en) * 1980-04-24 1981-11-21 Matsushita Electric Ind Co Ltd Method of manufacturing moisture detecting element

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0677992U (en) * 1992-07-10 1994-11-01 株式会社東洋アイデック Simple type can pressing device

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS56150816A (en) * 1980-04-24 1981-11-21 Matsushita Electric Ind Co Ltd Method of manufacturing moisture detecting element
JPS6230484B2 (en) * 1980-04-24 1987-07-02 Matsushita Electric Ind Co Ltd

Also Published As

Publication number Publication date
JPS5843894B2 (en) 1983-09-29

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