JPS54122193A - Production of humidity detecting element - Google Patents
Production of humidity detecting elementInfo
- Publication number
- JPS54122193A JPS54122193A JP3042378A JP3042378A JPS54122193A JP S54122193 A JPS54122193 A JP S54122193A JP 3042378 A JP3042378 A JP 3042378A JP 3042378 A JP3042378 A JP 3042378A JP S54122193 A JPS54122193 A JP S54122193A
- Authority
- JP
- Japan
- Prior art keywords
- detecting element
- humidity
- vapor phase
- oxide film
- metal oxide
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Abstract
PURPOSE: To reduce the change of element characteristics with time for the use under high temperature and high humidity by applying vapor phase treatment under high temperature and high humidity to a humidity detecting element formed by laminating a dielectric anodic-oxidized film, semiconductive metal oxide film and conductive electrode on a metal substrate.
CONSTITUTION: A dielectric anodic-oxidized film 2 is formed on a metal substrate 1 such as tantalum, aluminum, silicon or other and a semiconductive metal oxide film 3 such as of manganese dioxide is laminated thereon. Further a current collecting electrode 4 composed of a carbon layer and a silver paint layer is formed thereon to provide the detecting element. Next, the abovementioned element is subjected to vapor phase treatment for about 30 hours or more under the temperature above the element service temperature (e.g., 80°C or higher) and relative humidity of about 90 to 100RH%.
COPYRIGHT: (C)1979,JPO&Japio
Priority Applications (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP3042378A JPS5843894B2 (en) | 1978-03-15 | 1978-03-15 | Manufacturing method of humidity sensing element |
GB7906032A GB2017924B (en) | 1978-02-20 | 1979-02-20 | Humidity sensing element of electric capacitance change type and method of producing same |
US06/014,382 US4276128A (en) | 1978-02-20 | 1979-02-21 | Humidity sensing element of electric capacitance change type and method of producing same |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP3042378A JPS5843894B2 (en) | 1978-03-15 | 1978-03-15 | Manufacturing method of humidity sensing element |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS54122193A true JPS54122193A (en) | 1979-09-21 |
JPS5843894B2 JPS5843894B2 (en) | 1983-09-29 |
Family
ID=12303538
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP3042378A Expired JPS5843894B2 (en) | 1978-02-20 | 1978-03-15 | Manufacturing method of humidity sensing element |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5843894B2 (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS56150816A (en) * | 1980-04-24 | 1981-11-21 | Matsushita Electric Ind Co Ltd | Method of manufacturing moisture detecting element |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH0677992U (en) * | 1992-07-10 | 1994-11-01 | 株式会社東洋アイデック | Simple type can pressing device |
-
1978
- 1978-03-15 JP JP3042378A patent/JPS5843894B2/en not_active Expired
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS56150816A (en) * | 1980-04-24 | 1981-11-21 | Matsushita Electric Ind Co Ltd | Method of manufacturing moisture detecting element |
JPS6230484B2 (en) * | 1980-04-24 | 1987-07-02 | Matsushita Electric Ind Co Ltd |
Also Published As
Publication number | Publication date |
---|---|
JPS5843894B2 (en) | 1983-09-29 |
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