JPS57208126A - Manufacture of semiconductor - Google Patents

Manufacture of semiconductor

Info

Publication number
JPS57208126A
JPS57208126A JP56094738A JP9473881A JPS57208126A JP S57208126 A JPS57208126 A JP S57208126A JP 56094738 A JP56094738 A JP 56094738A JP 9473881 A JP9473881 A JP 9473881A JP S57208126 A JPS57208126 A JP S57208126A
Authority
JP
Japan
Prior art keywords
substrate
silicon
collide against
vapor
thermoelectrons
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP56094738A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6158967B2 (enExample
Inventor
Yoshiyuki Fukumoto
Yoji Kono
Masahiro Hotta
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Sekisui Chemical Co Ltd
Original Assignee
Sekisui Chemical Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Sekisui Chemical Co Ltd filed Critical Sekisui Chemical Co Ltd
Priority to JP56094738A priority Critical patent/JPS57208126A/ja
Publication of JPS57208126A publication Critical patent/JPS57208126A/ja
Publication of JPS6158967B2 publication Critical patent/JPS6158967B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H10P14/3411—
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/24—Vacuum evaporation
    • C23C14/32—Vacuum evaporation by explosion; by evaporation and subsequent ionisation of the vapours, e.g. ion-plating
    • H10P14/22—

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Physical Deposition Of Substances That Are Components Of Semiconductor Devices (AREA)
  • Photovoltaic Devices (AREA)
JP56094738A 1981-06-18 1981-06-18 Manufacture of semiconductor Granted JPS57208126A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP56094738A JPS57208126A (en) 1981-06-18 1981-06-18 Manufacture of semiconductor

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP56094738A JPS57208126A (en) 1981-06-18 1981-06-18 Manufacture of semiconductor

Publications (2)

Publication Number Publication Date
JPS57208126A true JPS57208126A (en) 1982-12-21
JPS6158967B2 JPS6158967B2 (enExample) 1986-12-13

Family

ID=14118448

Family Applications (1)

Application Number Title Priority Date Filing Date
JP56094738A Granted JPS57208126A (en) 1981-06-18 1981-06-18 Manufacture of semiconductor

Country Status (1)

Country Link
JP (1) JPS57208126A (enExample)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6230315A (ja) * 1985-07-31 1987-02-09 Anelva Corp 電子銃装置

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6230315A (ja) * 1985-07-31 1987-02-09 Anelva Corp 電子銃装置

Also Published As

Publication number Publication date
JPS6158967B2 (enExample) 1986-12-13

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