JPS57207805A - Displacement measuring device - Google Patents
Displacement measuring deviceInfo
- Publication number
- JPS57207805A JPS57207805A JP9229181A JP9229181A JPS57207805A JP S57207805 A JPS57207805 A JP S57207805A JP 9229181 A JP9229181 A JP 9229181A JP 9229181 A JP9229181 A JP 9229181A JP S57207805 A JPS57207805 A JP S57207805A
- Authority
- JP
- Japan
- Prior art keywords
- grating
- displacement
- beams
- light
- measured
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000006073 displacement reaction Methods 0.000 title abstract 7
- 230000003287 optical effect Effects 0.000 abstract 2
- 230000001678 irradiating effect Effects 0.000 abstract 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
- G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
- G01D5/26—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light
- G01D5/32—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light
- G01D5/34—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells
- G01D5/36—Forming the light into pulses
- G01D5/38—Forming the light into pulses by diffraction gratings
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Instruments For Measurement Of Length By Optical Means (AREA)
- Length Measuring Devices By Optical Means (AREA)
- Optical Transform (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP9229181A JPS57207805A (en) | 1981-06-17 | 1981-06-17 | Displacement measuring device |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP9229181A JPS57207805A (en) | 1981-06-17 | 1981-06-17 | Displacement measuring device |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS57207805A true JPS57207805A (en) | 1982-12-20 |
JPH038491B2 JPH038491B2 (ja) | 1991-02-06 |
Family
ID=14050303
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP9229181A Granted JPS57207805A (en) | 1981-06-17 | 1981-06-17 | Displacement measuring device |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS57207805A (ja) |
Cited By (12)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4636077A (en) * | 1983-04-15 | 1987-01-13 | Matsushita Electric Industrial Co., Ltd. | Aligning exposure method |
DE3700777A1 (de) * | 1986-01-14 | 1987-07-16 | Canon Kk | Vorrichtung zur ermittlung einer bezugsposition und mit dieser vorrichtung ausgestatteter verschluessler |
DE3700906A1 (de) * | 1986-01-14 | 1987-07-16 | Canon Kk | Verschluessler |
DE3715864A1 (de) * | 1986-05-07 | 1987-11-12 | Nippon Telegraph & Telephone | Verfahren und vorrichtung zum messen und/oder einstellen einer relativen verschiebung von gegenstaenden |
JPS63277922A (ja) * | 1987-05-11 | 1988-11-15 | Canon Inc | 測長装置 |
JPS63277924A (ja) * | 1987-05-11 | 1988-11-15 | Canon Inc | 変位測定装置 |
JPS63309817A (ja) * | 1987-06-12 | 1988-12-16 | Tokyo Seimitsu Co Ltd | リニアエンコ−ダ |
JPS63309816A (ja) * | 1987-06-12 | 1988-12-16 | Tokyo Seimitsu Co Ltd | リニアスケ−ル |
JPS63309815A (ja) * | 1987-06-12 | 1988-12-16 | Tokyo Seimitsu Co Ltd | 光学干渉装置 |
US4868385A (en) * | 1985-07-10 | 1989-09-19 | Canon Kabushiki Kaisha | Rotating state detection apparatus using a plurality of light beams |
JPH02147816A (ja) * | 1988-11-29 | 1990-06-06 | Tokyo Seimitsu Co Ltd | スケール読取装置 |
USRE34010E (en) * | 1985-03-22 | 1992-07-28 | Nikon Corporation | Position detection apparatus |
Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS4965851A (ja) * | 1972-08-21 | 1974-06-26 | ||
JPS5174659A (ja) * | 1974-12-24 | 1976-06-28 | Nippon Electric Co | |
JPS5661608A (en) * | 1979-10-26 | 1981-05-27 | Nippon Telegr & Teleph Corp <Ntt> | Device for minute displacement measuring and positioning |
-
1981
- 1981-06-17 JP JP9229181A patent/JPS57207805A/ja active Granted
Patent Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS4965851A (ja) * | 1972-08-21 | 1974-06-26 | ||
JPS5174659A (ja) * | 1974-12-24 | 1976-06-28 | Nippon Electric Co | |
JPS5661608A (en) * | 1979-10-26 | 1981-05-27 | Nippon Telegr & Teleph Corp <Ntt> | Device for minute displacement measuring and positioning |
Cited By (14)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4636077A (en) * | 1983-04-15 | 1987-01-13 | Matsushita Electric Industrial Co., Ltd. | Aligning exposure method |
USRE33669E (en) * | 1983-04-15 | 1991-08-20 | Matsushita Electric Industrial Co., Ltd. | Aligning exposure method |
USRE34010E (en) * | 1985-03-22 | 1992-07-28 | Nikon Corporation | Position detection apparatus |
US4868385A (en) * | 1985-07-10 | 1989-09-19 | Canon Kabushiki Kaisha | Rotating state detection apparatus using a plurality of light beams |
DE3700777A1 (de) * | 1986-01-14 | 1987-07-16 | Canon Kk | Vorrichtung zur ermittlung einer bezugsposition und mit dieser vorrichtung ausgestatteter verschluessler |
DE3700906A1 (de) * | 1986-01-14 | 1987-07-16 | Canon Kk | Verschluessler |
DE3715864A1 (de) * | 1986-05-07 | 1987-11-12 | Nippon Telegraph & Telephone | Verfahren und vorrichtung zum messen und/oder einstellen einer relativen verschiebung von gegenstaenden |
JPS63277924A (ja) * | 1987-05-11 | 1988-11-15 | Canon Inc | 変位測定装置 |
JPS63277922A (ja) * | 1987-05-11 | 1988-11-15 | Canon Inc | 測長装置 |
JPH0648169B2 (ja) * | 1987-05-11 | 1994-06-22 | キヤノン株式会社 | 測長装置 |
JPS63309816A (ja) * | 1987-06-12 | 1988-12-16 | Tokyo Seimitsu Co Ltd | リニアスケ−ル |
JPS63309815A (ja) * | 1987-06-12 | 1988-12-16 | Tokyo Seimitsu Co Ltd | 光学干渉装置 |
JPS63309817A (ja) * | 1987-06-12 | 1988-12-16 | Tokyo Seimitsu Co Ltd | リニアエンコ−ダ |
JPH02147816A (ja) * | 1988-11-29 | 1990-06-06 | Tokyo Seimitsu Co Ltd | スケール読取装置 |
Also Published As
Publication number | Publication date |
---|---|
JPH038491B2 (ja) | 1991-02-06 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
JPS57128810A (en) | Distance measuring device | |
JPS57207805A (en) | Displacement measuring device | |
KR900019162A (ko) | 리니어 프레스넬 존 플레이트(Linear Fresnel Zone Plate)를 사용한 마스크와 반도체 웨이퍼의 위치맞춤 시스템 및 방법 | |
ATE89411T1 (de) | Positionsmesseinrichtung. | |
DE3881379D1 (de) | Lichtelektrische positionsmesseinrichtung. | |
BR8103377A (pt) | Aparelho para detectar o erro de foco de um feixe de energia radiante | |
ATE111593T1 (de) | Positionsmesseinrichtung. | |
JPS6413403A (en) | Interference length measuring apparatus | |
GB1176427A (en) | Correlators | |
PT82544A (pt) | Aperfeicoamentos em, e relativos a, instrumentos de medida | |
JPS6418070A (en) | Detecting apparatus for voltage | |
EP0391278A3 (en) | Doppler velocity meter | |
JPS57203905A (en) | Optical position detector | |
JPS5414789A (en) | Surface inspecting apparatus | |
DE59105415D1 (de) | Winkelmesseinrichtung. | |
SU868346A1 (ru) | Способ контрол угловой ориентации объекта | |
FR2235354A1 (en) | Photoelectric optical test sensor - measures displacement of a diffraction screen with constant spacing in the test sensor plane | |
SE8107809L (sv) | Fotometer | |
KR910008376A (ko) | 렌즈의 표면질 측정방법 | |
JPS54119949A (en) | Device for measuring thickness | |
SU1693369A1 (ru) | Устройство дл определени нулевого положени объекта | |
SU1464046A1 (ru) | Устройство дл измерени амплитуды угловых колебаний | |
JPS5794903A (en) | Defect detector for disk surface | |
JPS5770401A (en) | Read-only memory tester | |
JPS5660306A (en) | Laser interferometer and its measuring method |