JPS4965851A - - Google Patents

Info

Publication number
JPS4965851A
JPS4965851A JP48093795A JP9379573A JPS4965851A JP S4965851 A JPS4965851 A JP S4965851A JP 48093795 A JP48093795 A JP 48093795A JP 9379573 A JP9379573 A JP 9379573A JP S4965851 A JPS4965851 A JP S4965851A
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP48093795A
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Publication of JPS4965851A publication Critical patent/JPS4965851A/ja
Pending legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
    • G01D5/26—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light
    • G01D5/32—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light
    • G01D5/34—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells
    • G01D5/36—Forming the light into pulses
    • G01D5/38—Forming the light into pulses by diffraction gratings

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Optical Transform (AREA)
JP48093795A 1972-08-21 1973-08-21 Pending JPS4965851A (ja)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE2240968A DE2240968A1 (de) 1972-08-21 1972-08-21 Optisches verfahren zur messung der relativen verschiebung eines beugungsgitters sowie einrichtungen zu seiner durchfuehrung

Publications (1)

Publication Number Publication Date
JPS4965851A true JPS4965851A (ja) 1974-06-26

Family

ID=5854077

Family Applications (1)

Application Number Title Priority Date Filing Date
JP48093795A Pending JPS4965851A (ja) 1972-08-21 1973-08-21

Country Status (5)

Country Link
US (1) US3891321A (ja)
JP (1) JPS4965851A (ja)
DE (1) DE2240968A1 (ja)
FR (1) FR2197461A5 (ja)
GB (1) GB1439645A (ja)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS57207805A (en) * 1981-06-17 1982-12-20 Hitachi Ltd Displacement measuring device
JPS59132311A (ja) * 1983-01-18 1984-07-30 Sony Magnescale Inc 光学スケ−ル
JPH04184218A (ja) * 1990-11-20 1992-07-01 Okuma Mach Works Ltd 光学式位置検出器

Families Citing this family (46)

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US4037161A (en) * 1974-07-22 1977-07-19 Baird-Atomic, Inc. Ratio detector
DE2454883C2 (de) * 1974-11-20 1984-01-05 Ernst Leitz Wetzlar Gmbh, 6330 Wetzlar Einrichtung zur automatischen, fotoelektrischen Auswertung stereoskopischer Bilder
US3996463A (en) * 1975-08-28 1976-12-07 Western Electric Company, Inc. Method and apparatus for monitoring the relative position of a light beam and a grating using Fraunhofer diffraction effects
DE2618363A1 (de) * 1976-04-27 1977-11-17 Bosch Gmbh Robert Einrichtung zum abtasten der perforation von baendern
DE2622283A1 (de) * 1976-05-19 1977-12-08 Bosch Gmbh Robert Verfahren zur lokalisierung eines festkoerperplaettchens und festkoerperplaettchen zur durchfuehrung des verfahrens
US4139257A (en) * 1976-09-28 1979-02-13 Canon Kabushiki Kaisha Synchronizing signal generator
EP0045321B1 (de) * 1980-07-31 1986-12-10 International Business Machines Corporation Verfahren und Einrichtung zur optischen Distanzmessung
JPS57196165A (en) * 1981-05-28 1982-12-02 Iwatsu Electric Co Ltd Light intensity modulation measuring device
CA1141946A (en) * 1981-08-21 1983-03-01 National Research Council Of Canada Viewing and measuring apparatus
US4526471A (en) * 1982-06-17 1985-07-02 Bykov Anatoly P Method for sensing spatial coordinate of article point and apparatus therefor
US4629886A (en) * 1983-03-23 1986-12-16 Yokogawa Hokushin Electric Corporation High resolution digital diffraction grating scale encoder
US4696574A (en) * 1984-06-21 1987-09-29 General Electric Company Precision remote location of a movable point employing light interference fringes
US4967072A (en) * 1984-09-05 1990-10-30 Canon Kabushiki Kaisha Interferometric rotating condition detection apparatus
JPS61215905A (ja) * 1985-03-22 1986-09-25 Nippon Kogaku Kk <Nikon> 位置検出装置
USRE34010E (en) * 1985-03-22 1992-07-28 Nikon Corporation Position detection apparatus
GB2185314B (en) * 1986-01-14 1990-09-26 Canon Kk Encoder
DE3700777C2 (de) * 1986-01-14 1994-05-05 Canon Kk Vorrichtung zur Erfassung der Position eines Objektes
JPS62172203A (ja) * 1986-01-27 1987-07-29 Agency Of Ind Science & Technol 相対変位測定方法
DE3706277C2 (de) * 1986-02-28 1995-04-27 Canon Kk Drehungsmeßgeber
FR2615281B1 (fr) * 1987-05-11 1996-08-23 Canon Kk Dispositif de mesure d'une distance en mouvement relatif de deux objets mobiles l'un par rapport a l'autre
JPH073344B2 (ja) * 1987-06-15 1995-01-18 キヤノン株式会社 エンコ−ダ−
GB2218505B (en) * 1988-05-10 1992-02-19 Gen Electric Co Plc Optical position measurement
JPH0718714B2 (ja) * 1988-05-10 1995-03-06 キヤノン株式会社 エンコーダー
DE3821046A1 (de) * 1988-06-22 1989-12-28 Bosch Gmbh Robert Verfahren zur weg- und winkelmessung
DE3901534C1 (ja) * 1989-01-20 1990-04-26 Dr. Johannes Heidenhain Gmbh, 8225 Traunreut, De
JPH0447222A (ja) * 1990-06-13 1992-02-17 Olympus Optical Co Ltd 高精度位置比較装置
EP0544020B1 (de) * 1991-11-23 1995-03-15 Dr. Johannes Heidenhain GmbH Interferentielle Messeinrichtung
JP3116535B2 (ja) * 1992-03-13 2000-12-11 キヤノン株式会社 ロータリーエンコーダー及びエンコーダー
DE4302313C2 (de) * 1993-01-28 1996-12-05 Heidenhain Gmbh Dr Johannes Mehrkoordinaten-Meßeinrichtung
DE19852665A1 (de) * 1998-11-16 2000-05-25 Corrsys Korrelatorsysteme Gmbh Verfahren zur Erzeugung eines trägerfrequenz-modulierten Signals
US7057741B1 (en) 1999-06-18 2006-06-06 Kla-Tencor Corporation Reduced coherence symmetric grazing incidence differential interferometer
US6587211B1 (en) 1999-07-28 2003-07-01 Creo Srl Interferometric torque and power sensor
JP3680678B2 (ja) * 2000-02-15 2005-08-10 スズキ株式会社 振動測定方法及び振動数測定装置
DE10151563A1 (de) * 2001-10-23 2003-04-30 Heidenhain Gmbh Dr Johannes Positionsmessgerät
US6897961B2 (en) * 2003-03-19 2005-05-24 The Boeing Company Heterodyne lateral grating interferometric encoder
KR100578140B1 (ko) * 2004-10-07 2006-05-10 삼성전자주식회사 변위 측정을 위한 간섭계 시스템 및 이를 이용한 노광 장치
US7359057B2 (en) * 2005-08-26 2008-04-15 Ball Aerospace & Technologies Corp. Method and apparatus for measuring small shifts in optical wavelengths
US7440113B2 (en) * 2005-12-23 2008-10-21 Agilent Technologies, Inc. Littrow interferometer
US7973939B2 (en) * 2008-06-17 2011-07-05 Chien Chou Differential-phase polarization-sensitive optical coherence tomography system
JP5697323B2 (ja) * 2009-10-22 2015-04-08 キヤノン株式会社 ヘテロダイン干渉計測装置
EP2553401B1 (en) 2010-03-30 2015-09-02 Zygo Corporation Interferometric encoder systems
US9971078B2 (en) * 2013-03-05 2018-05-15 Rambus Inc. Phase gratings with odd symmetry for high-resolution lensless optical sensing
GB201313751D0 (en) * 2013-08-01 2013-09-18 Renishaw Plc Rotation Detection Apparatus
CN106662754B (zh) 2014-05-30 2021-05-25 奇跃公司 用于采用虚拟或增强现实装置生成虚拟内容显示的方法和系统
CN104964649B (zh) * 2015-07-20 2017-07-28 哈尔滨工业大学 光栅分光式同步移相干涉测量装置及方法
CN106931887B (zh) * 2015-12-30 2019-11-26 上海微电子装备（集团）股份有限公司 双频光栅测量装置

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3656853A (en) * 1966-11-07 1972-04-18 Hewlett Packard Co Interferometric system
NL6811252A (ja) * 1968-08-08 1970-02-10
US3726595A (en) * 1970-01-07 1973-04-10 Canon Kk Method for optical detection and/or measurement of movement of a diffraction grating

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS57207805A (en) * 1981-06-17 1982-12-20 Hitachi Ltd Displacement measuring device
JPH038491B2 (ja) * 1981-06-17 1991-02-06 Hitachi Ltd
JPS59132311A (ja) * 1983-01-18 1984-07-30 Sony Magnescale Inc 光学スケ−ル
JPH04184218A (ja) * 1990-11-20 1992-07-01 Okuma Mach Works Ltd 光学式位置検出器

Also Published As

Publication number Publication date
GB1439645A (en) 1976-06-16
DE2240968A1 (de) 1974-03-07
FR2197461A5 (ja) 1974-03-22
US3891321A (en) 1975-06-24

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