JPS5661608A - Device for minute displacement measuring and positioning - Google Patents

Device for minute displacement measuring and positioning

Info

Publication number
JPS5661608A
JPS5661608A JP13766079A JP13766079A JPS5661608A JP S5661608 A JPS5661608 A JP S5661608A JP 13766079 A JP13766079 A JP 13766079A JP 13766079 A JP13766079 A JP 13766079A JP S5661608 A JPS5661608 A JP S5661608A
Authority
JP
Grant status
Application
Patent type
Prior art keywords
diffraction grating
transmissive diffraction
back
diffracted
transmissive
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP13766079A
Other versions
JPS5938521B2 (en )
Inventor
Yoshihiko Mizushima
Yasuhiro Torii
Original Assignee
Nippon Telegr & Teleph Corp <Ntt>
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date

Links

Abstract

PURPOSE: To keep a diffracted ray from fluctuating in strength by making the diffracted ray coming out of the back of a transmissive diffraction grating disappear in a given direction in a positioning device using the transmissive diffraction grating and a reflective diffraction grating.
CONSTITUTION: A grid pitch of a transmissive diffraction grating 8 is specified at 1/2 of the pitch of a reflective diffraction grating 9. Then desired diffracted rays 10, 11 generated by an incident light 3 and diffracted rays 12, 13 coming from the back of the transmissive diffraction grating 8 are separated in space each other, thus producing no interference. It is conceivable that a reflection preventive film is arranged on the transmissive diffraction grating to remove the diffracted rays from the back of the transmissive diffraction grating.
COPYRIGHT: (C)1981,JPO&Japio
JP13766079A 1979-10-26 1979-10-26 Expired JPS5938521B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP13766079A JPS5938521B2 (en) 1979-10-26 1979-10-26

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP13766079A JPS5938521B2 (en) 1979-10-26 1979-10-26

Publications (2)

Publication Number Publication Date
JPS5661608A true true JPS5661608A (en) 1981-05-27
JPS5938521B2 JPS5938521B2 (en) 1984-09-18

Family

ID=15203829

Family Applications (1)

Application Number Title Priority Date Filing Date
JP13766079A Expired JPS5938521B2 (en) 1979-10-26 1979-10-26

Country Status (1)

Country Link
JP (1) JPS5938521B2 (en)

Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS57207805A (en) * 1981-06-17 1982-12-20 Hitachi Ltd Displacement measuring device
JPS60260813A (en) * 1984-05-31 1985-12-24 Heidenhain Gmbh Dr Johannes Method and device for measuring displacement
US4656347A (en) * 1984-01-30 1987-04-07 Nippon Telegraph & Telephone Public Corporation Diffraction grating position adjuster using a grating and a reflector
JPS62121314A (en) * 1985-11-21 1987-06-02 Heidenhain Gmbh Dr Johannes Photoelectric position measuring device
JPS62172203A (en) * 1986-01-27 1987-07-29 Agency Of Ind Science & Technol Method for measuring relative displacement
JPS62255803A (en) * 1986-04-28 1987-11-07 Nippon Telegr & Teleph Corp <Ntt> Method and device for aligning by diffraction grating
JPS6375518A (en) * 1986-09-18 1988-04-05 Tokyo Seimitsu Co Ltd Movement quantity detector

Cited By (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS57207805A (en) * 1981-06-17 1982-12-20 Hitachi Ltd Displacement measuring device
JPH038491B2 (en) * 1981-06-17 1991-02-06 Hitachi Ltd
US4656347A (en) * 1984-01-30 1987-04-07 Nippon Telegraph & Telephone Public Corporation Diffraction grating position adjuster using a grating and a reflector
JPS60260813A (en) * 1984-05-31 1985-12-24 Heidenhain Gmbh Dr Johannes Method and device for measuring displacement
JPS62121314A (en) * 1985-11-21 1987-06-02 Heidenhain Gmbh Dr Johannes Photoelectric position measuring device
JPH0130089B2 (en) * 1985-11-21 1989-06-16 Dokutoru Yohanesu Haidenhain Gmbh
JPS62172203A (en) * 1986-01-27 1987-07-29 Agency Of Ind Science & Technol Method for measuring relative displacement
JPH0466295B2 (en) * 1986-01-27 1992-10-22 Kogyo Gijutsuin
JPS62255803A (en) * 1986-04-28 1987-11-07 Nippon Telegr & Teleph Corp <Ntt> Method and device for aligning by diffraction grating
JPS6375518A (en) * 1986-09-18 1988-04-05 Tokyo Seimitsu Co Ltd Movement quantity detector

Also Published As

Publication number Publication date Type
JPS5938521B2 (en) 1984-09-18 grant

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