JPS57206060A - Manufacturing method for semiconductor device - Google Patents

Manufacturing method for semiconductor device

Info

Publication number
JPS57206060A
JPS57206060A JP56090235A JP9023581A JPS57206060A JP S57206060 A JPS57206060 A JP S57206060A JP 56090235 A JP56090235 A JP 56090235A JP 9023581 A JP9023581 A JP 9023581A JP S57206060 A JPS57206060 A JP S57206060A
Authority
JP
Japan
Prior art keywords
film
capacitor device
section
insulator
capacitor
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP56090235A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6262473B2 (https=
Inventor
Motoaki Murayama
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NEC Corp
Original Assignee
NEC Corp
Nippon Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NEC Corp, Nippon Electric Co Ltd filed Critical NEC Corp
Priority to JP56090235A priority Critical patent/JPS57206060A/ja
Publication of JPS57206060A publication Critical patent/JPS57206060A/ja
Publication of JPS6262473B2 publication Critical patent/JPS6262473B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D88/00—Three-dimensional [3D] integrated devices

Landscapes

  • Semiconductor Integrated Circuits (AREA)
JP56090235A 1981-06-12 1981-06-12 Manufacturing method for semiconductor device Granted JPS57206060A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP56090235A JPS57206060A (en) 1981-06-12 1981-06-12 Manufacturing method for semiconductor device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP56090235A JPS57206060A (en) 1981-06-12 1981-06-12 Manufacturing method for semiconductor device

Publications (2)

Publication Number Publication Date
JPS57206060A true JPS57206060A (en) 1982-12-17
JPS6262473B2 JPS6262473B2 (https=) 1987-12-26

Family

ID=13992824

Family Applications (1)

Application Number Title Priority Date Filing Date
JP56090235A Granted JPS57206060A (en) 1981-06-12 1981-06-12 Manufacturing method for semiconductor device

Country Status (1)

Country Link
JP (1) JPS57206060A (https=)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2710454A1 (fr) * 1993-09-20 1995-03-31 Fujitsu Ltd Dispositif semiconducteur, du type semiconducteur sur isolant, avec tolérance vis-à-vis des décharges électrostatiques.

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2710454A1 (fr) * 1993-09-20 1995-03-31 Fujitsu Ltd Dispositif semiconducteur, du type semiconducteur sur isolant, avec tolérance vis-à-vis des décharges électrostatiques.

Also Published As

Publication number Publication date
JPS6262473B2 (https=) 1987-12-26

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