JPS57199287A - Semiconductor luminous element and manufacture thereof - Google Patents

Semiconductor luminous element and manufacture thereof

Info

Publication number
JPS57199287A
JPS57199287A JP8417681A JP8417681A JPS57199287A JP S57199287 A JPS57199287 A JP S57199287A JP 8417681 A JP8417681 A JP 8417681A JP 8417681 A JP8417681 A JP 8417681A JP S57199287 A JPS57199287 A JP S57199287A
Authority
JP
Japan
Prior art keywords
type
layer
specified
solution
liquidus
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP8417681A
Other languages
Japanese (ja)
Inventor
Tatsuro Beppu
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Toshiba Corp
Tokyo Shibaura Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Corp, Tokyo Shibaura Electric Co Ltd filed Critical Toshiba Corp
Priority to JP8417681A priority Critical patent/JPS57199287A/en
Publication of JPS57199287A publication Critical patent/JPS57199287A/en
Pending legal-status Critical Current

Links

Classifications

    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01SDEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S5/00Semiconductor lasers
    • H01S5/20Structure or shape of the semiconductor body to guide the optical wave ; Confining structures perpendicular to the optical axis, e.g. index or gain guiding, stripe geometry, broad area lasers, gain tailoring, transverse or lateral reflectors, special cladding structures, MQW barrier reflection layers
    • H01S5/22Structure or shape of the semiconductor body to guide the optical wave ; Confining structures perpendicular to the optical axis, e.g. index or gain guiding, stripe geometry, broad area lasers, gain tailoring, transverse or lateral reflectors, special cladding structures, MQW barrier reflection layers having a ridge or stripe structure
    • H01S5/223Buried stripe structure
    • H01S5/2232Buried stripe structure with inner confining structure between the active layer and the lower electrode
    • H01S5/2234Buried stripe structure with inner confining structure between the active layer and the lower electrode having a structured substrate surface
    • H01S5/2235Buried stripe structure with inner confining structure between the active layer and the lower electrode having a structured substrate surface with a protrusion

Abstract

PURPOSE:To manufacture the negative resistant semiconductor element provided with the reliable characteristics by a method wherein thickness of the semiconductor crystal layer is capacitated for arcing into the stripe type at specified region by means of the impressed voltage as specified. CONSTITUTION:The stripe type mesa 2 is formed on the n type GaAs substrate crystal 1 not yet immersed in the liquidus growing boat while the liquidus growing solution is specified to be the Ga solution containing the p type impurities saturated with As. Then the Ga solution is liquidus grown at the specified temperature and cooling speed separating the p type GaAs layer 14 on the n type GaAs substrate crystal 1. Then after the n type GaAlAs layer 4, p or n type GaAs layer 5, p type GaAlAs layer 6 are successively crystal formed by the solution contaiing the different dopants, the semiconductor crystal layer is separated at the central part of the cavity of the mesa 2.
JP8417681A 1981-06-01 1981-06-01 Semiconductor luminous element and manufacture thereof Pending JPS57199287A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP8417681A JPS57199287A (en) 1981-06-01 1981-06-01 Semiconductor luminous element and manufacture thereof

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP8417681A JPS57199287A (en) 1981-06-01 1981-06-01 Semiconductor luminous element and manufacture thereof

Publications (1)

Publication Number Publication Date
JPS57199287A true JPS57199287A (en) 1982-12-07

Family

ID=13823173

Family Applications (1)

Application Number Title Priority Date Filing Date
JP8417681A Pending JPS57199287A (en) 1981-06-01 1981-06-01 Semiconductor luminous element and manufacture thereof

Country Status (1)

Country Link
JP (1) JPS57199287A (en)

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