JPS57199264A - Semiconductor memory - Google Patents

Semiconductor memory

Info

Publication number
JPS57199264A
JPS57199264A JP56084318A JP8431881A JPS57199264A JP S57199264 A JPS57199264 A JP S57199264A JP 56084318 A JP56084318 A JP 56084318A JP 8431881 A JP8431881 A JP 8431881A JP S57199264 A JPS57199264 A JP S57199264A
Authority
JP
Japan
Prior art keywords
region
insulating film
intermediary
layer
accelerating
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP56084318A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0130314B2 (enrdf_load_stackoverflow
Inventor
Yukimasa Uchida
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Toshiba Corp
Tokyo Shibaura Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Corp, Tokyo Shibaura Electric Co Ltd filed Critical Toshiba Corp
Priority to JP56084318A priority Critical patent/JPS57199264A/ja
Priority to DE3136517A priority patent/DE3136517C2/de
Priority to US06/302,776 priority patent/US4453234A/en
Publication of JPS57199264A publication Critical patent/JPS57199264A/ja
Publication of JPH0130314B2 publication Critical patent/JPH0130314B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Semiconductor Memories (AREA)
  • Non-Volatile Memory (AREA)
JP56084318A 1980-09-26 1981-06-03 Semiconductor memory Granted JPS57199264A (en)

Priority Applications (3)

Application Number Priority Date Filing Date Title
JP56084318A JPS57199264A (en) 1981-06-03 1981-06-03 Semiconductor memory
DE3136517A DE3136517C2 (de) 1980-09-26 1981-09-15 Nichtflüchtige Halbleiter-Speichervorrichtung
US06/302,776 US4453234A (en) 1980-09-26 1981-09-16 Nonvolatile semiconductor memory device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP56084318A JPS57199264A (en) 1981-06-03 1981-06-03 Semiconductor memory

Publications (2)

Publication Number Publication Date
JPS57199264A true JPS57199264A (en) 1982-12-07
JPH0130314B2 JPH0130314B2 (enrdf_load_stackoverflow) 1989-06-19

Family

ID=13827155

Family Applications (1)

Application Number Title Priority Date Filing Date
JP56084318A Granted JPS57199264A (en) 1980-09-26 1981-06-03 Semiconductor memory

Country Status (1)

Country Link
JP (1) JPS57199264A (enrdf_load_stackoverflow)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS57199265A (en) * 1981-06-03 1982-12-07 Toshiba Corp Semiconductor memory
JPS63204599A (ja) * 1987-02-20 1988-08-24 Toshiba Corp 不揮発性半導体メモリ

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5197345A (enrdf_load_stackoverflow) * 1975-01-17 1976-08-26
JPS51117838A (en) * 1975-04-10 1976-10-16 Shindengen Electric Mfg Co Ltd Semiconductor memory device
JPS55101192A (en) * 1979-01-24 1980-08-01 Xicor Inc Method and unit for nonnvolatile memory
JPS5759387A (en) * 1980-09-26 1982-04-09 Toshiba Corp Semiconductor storage device
JPS57199265A (en) * 1981-06-03 1982-12-07 Toshiba Corp Semiconductor memory

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5197345A (enrdf_load_stackoverflow) * 1975-01-17 1976-08-26
JPS51117838A (en) * 1975-04-10 1976-10-16 Shindengen Electric Mfg Co Ltd Semiconductor memory device
JPS55101192A (en) * 1979-01-24 1980-08-01 Xicor Inc Method and unit for nonnvolatile memory
JPS5759387A (en) * 1980-09-26 1982-04-09 Toshiba Corp Semiconductor storage device
JPS57199265A (en) * 1981-06-03 1982-12-07 Toshiba Corp Semiconductor memory

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS57199265A (en) * 1981-06-03 1982-12-07 Toshiba Corp Semiconductor memory
JPS63204599A (ja) * 1987-02-20 1988-08-24 Toshiba Corp 不揮発性半導体メモリ

Also Published As

Publication number Publication date
JPH0130314B2 (enrdf_load_stackoverflow) 1989-06-19

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