JPS57184957A - Defect inspecting device - Google Patents

Defect inspecting device

Info

Publication number
JPS57184957A
JPS57184957A JP7034581A JP7034581A JPS57184957A JP S57184957 A JPS57184957 A JP S57184957A JP 7034581 A JP7034581 A JP 7034581A JP 7034581 A JP7034581 A JP 7034581A JP S57184957 A JPS57184957 A JP S57184957A
Authority
JP
Japan
Prior art keywords
diffracted light
inspected
light
pattern
signal
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP7034581A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6322255B2 (enrdf_load_stackoverflow
Inventor
Hidekazu Sekizawa
Akito Iwamoto
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Toshiba Corp
Tokyo Shibaura Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Corp, Tokyo Shibaura Electric Co Ltd filed Critical Toshiba Corp
Priority to JP7034581A priority Critical patent/JPS57184957A/ja
Publication of JPS57184957A publication Critical patent/JPS57184957A/ja
Publication of JPS6322255B2 publication Critical patent/JPS6322255B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
    • G01N21/956—Inspecting patterns on the surface of objects

Landscapes

  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
JP7034581A 1981-05-09 1981-05-09 Defect inspecting device Granted JPS57184957A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP7034581A JPS57184957A (en) 1981-05-09 1981-05-09 Defect inspecting device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP7034581A JPS57184957A (en) 1981-05-09 1981-05-09 Defect inspecting device

Publications (2)

Publication Number Publication Date
JPS57184957A true JPS57184957A (en) 1982-11-13
JPS6322255B2 JPS6322255B2 (enrdf_load_stackoverflow) 1988-05-11

Family

ID=13428733

Family Applications (1)

Application Number Title Priority Date Filing Date
JP7034581A Granted JPS57184957A (en) 1981-05-09 1981-05-09 Defect inspecting device

Country Status (1)

Country Link
JP (1) JPS57184957A (enrdf_load_stackoverflow)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2005114630A (ja) * 2003-10-09 2005-04-28 Sony Corp 凹凸パターン検査装置及び凹凸パターン検査方法

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01147747U (enrdf_load_stackoverflow) * 1988-03-28 1989-10-12
JP2025119244A (ja) * 2024-02-01 2025-08-14 株式会社Ｓｃｒｅｅｎホールディングス 基板保持装置および基板処理装置
JP2025122789A (ja) * 2024-02-09 2025-08-22 株式会社Ｓｃｒｅｅｎホールディングス 基板保持装置および基板処理装置

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS52146601A (en) * 1976-05-28 1977-12-06 Rca Corp Method of detecting defect of vortex groove formed on disk surface and device therefor
JPS5414790A (en) * 1977-07-05 1979-02-03 Mitsubishi Electric Corp Surface inspecting apparatus

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS52146601A (en) * 1976-05-28 1977-12-06 Rca Corp Method of detecting defect of vortex groove formed on disk surface and device therefor
JPS5414790A (en) * 1977-07-05 1979-02-03 Mitsubishi Electric Corp Surface inspecting apparatus

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2005114630A (ja) * 2003-10-09 2005-04-28 Sony Corp 凹凸パターン検査装置及び凹凸パターン検査方法

Also Published As

Publication number Publication date
JPS6322255B2 (enrdf_load_stackoverflow) 1988-05-11

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