JPS6491009A - Apparatus for evaluating flatness of thin film - Google Patents
Apparatus for evaluating flatness of thin filmInfo
- Publication number
- JPS6491009A JPS6491009A JP62247819A JP24781987A JPS6491009A JP S6491009 A JPS6491009 A JP S6491009A JP 62247819 A JP62247819 A JP 62247819A JP 24781987 A JP24781987 A JP 24781987A JP S6491009 A JPS6491009 A JP S6491009A
- Authority
- JP
- Japan
- Prior art keywords
- thin film
- flatness
- reflected light
- data
- light receiving
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Length Measuring Devices By Optical Means (AREA)
- Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
- Image Processing (AREA)
- Image Analysis (AREA)
Abstract
PURPOSE:To obtain the flatness of a thin film quantitatively without cutting, by optically observing the thin film of a substrate in many aspects, collecting and recording the data of reflected light from each light receiving sensor for a short time and outputting the data as required. CONSTITUTION:Luminous flux from a light emitting source 12 in an observing part 10 is projected on a stage 11. The reflected light is received with light receiving sensors 13-15. The outputs from the light receiving sensors are controlled with a controller 21. The intensity of the reflected light which is detected for a short time of about 50ms is recorded in a recorder 23 as a digital quantity through a computer 22. The data are outputted to an output device 24 as required. The measures as standards of flatness are obtained in correspondence with the patterns of the intensity distribution of the reflected light of various samples or various thin films. The flatness of the thin film can be quantitatively evaluated and obtained without cutting based on these database.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP62247819A JPS6491009A (en) | 1987-10-02 | 1987-10-02 | Apparatus for evaluating flatness of thin film |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP62247819A JPS6491009A (en) | 1987-10-02 | 1987-10-02 | Apparatus for evaluating flatness of thin film |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS6491009A true JPS6491009A (en) | 1989-04-10 |
Family
ID=17169132
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP62247819A Pending JPS6491009A (en) | 1987-10-02 | 1987-10-02 | Apparatus for evaluating flatness of thin film |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS6491009A (en) |
Cited By (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH04255242A (en) * | 1991-02-06 | 1992-09-10 | Mitsubishi Electric Corp | Bonding state inspecting device |
JPH04294560A (en) * | 1991-03-23 | 1992-10-19 | Nec Yamaguchi Ltd | Inspection of insulating film |
WO2019123700A1 (en) * | 2017-12-20 | 2019-06-27 | 三菱日立パワーシステムズ株式会社 | Method and device for inspecting film, and method for forming film |
WO2020016468A1 (en) * | 2018-07-18 | 2020-01-23 | Elejoste Gonzalez Asier Miguel | Non-contact profilometer and method for measuring roughness |
CN112097722A (en) * | 2020-08-17 | 2020-12-18 | 山东东岳高分子材料有限公司 | Flatness testing method for film material |
-
1987
- 1987-10-02 JP JP62247819A patent/JPS6491009A/en active Pending
Cited By (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH04255242A (en) * | 1991-02-06 | 1992-09-10 | Mitsubishi Electric Corp | Bonding state inspecting device |
JPH04294560A (en) * | 1991-03-23 | 1992-10-19 | Nec Yamaguchi Ltd | Inspection of insulating film |
WO2019123700A1 (en) * | 2017-12-20 | 2019-06-27 | 三菱日立パワーシステムズ株式会社 | Method and device for inspecting film, and method for forming film |
JP2019113312A (en) * | 2017-12-20 | 2019-07-11 | 三菱日立パワーシステムズ株式会社 | Coating inspection method and apparatus, and coating formation method |
WO2020016468A1 (en) * | 2018-07-18 | 2020-01-23 | Elejoste Gonzalez Asier Miguel | Non-contact profilometer and method for measuring roughness |
CN112097722A (en) * | 2020-08-17 | 2020-12-18 | 山东东岳高分子材料有限公司 | Flatness testing method for film material |
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