WO2020016468A1 - Non-contact profilometer and method for measuring roughness - Google Patents

Non-contact profilometer and method for measuring roughness Download PDF

Info

Publication number
WO2020016468A1
WO2020016468A1 PCT/ES2019/070476 ES2019070476W WO2020016468A1 WO 2020016468 A1 WO2020016468 A1 WO 2020016468A1 ES 2019070476 W ES2019070476 W ES 2019070476W WO 2020016468 A1 WO2020016468 A1 WO 2020016468A1
Authority
WO
WIPO (PCT)
Prior art keywords
roughness
brightness
electromagnetic radiation
emitter
cone
Prior art date
Application number
PCT/ES2019/070476
Other languages
Spanish (es)
French (fr)
Inventor
Asier Miguel ELEJOSTE GONZÁLEZ
Original Assignee
Elejoste Gonzalez Asier Miguel
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Elejoste Gonzalez Asier Miguel filed Critical Elejoste Gonzalez Asier Miguel
Publication of WO2020016468A1 publication Critical patent/WO2020016468A1/en

Links

Classifications

    • GPHYSICS
    • G01MEASURING; TESTING
    • G01BMEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00Measuring arrangements characterised by the use of optical techniques
    • G01B11/30Measuring arrangements characterised by the use of optical techniques for measuring roughness or irregularity of surfaces
    • G01B11/303Measuring arrangements characterised by the use of optical techniques for measuring roughness or irregularity of surfaces using photoelectric detection means
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/55Specular reflectivity

Definitions

  • roughness is the set of irregularities that a surface possesses and roughness meters are high precision measuring instruments that are used to measure such irregularities or imperfections on surfaces.
  • the object of the present description is an improved method for measuring surface roughness, without making any contact on it and the roughness meter that is capable of applying said method.
  • Roughness meters are used to determine the roughness of these surfaces by indicating the depth of the average roughness (Rz) which is the distance between the maximum height and the minimum measured height of irregularities or imperfections of a length and the value of the arithmetic average roughness ( Ra), which is the average roughness of all the measures that the equipment has been acquiring, or what is the same is the average value of the measured roughness of a given surface for verification.
  • Rz the depth of the average roughness
  • Ra arithmetic average roughness
  • Roughness meters can be classified according to their type of palpation, and can be contact or no contact.
  • the contact ones have a probe that is usually based on a diamond tip whose function is to take the data by scanning the tip on the piece, and the non-contact ones are those that analyze the surface of the material without making any type of rubbing on her.
  • the result of this roughness measurement is the visualization of a profile, being able to observe in two dimensions the distance traveled by the rugosimeter on the surface and the peaks and valleys that it presents.
  • the probe is moved on the surface manually by the user, causing more decalibrations and generating results that may be inaccurate.
  • probes are used that move autonomously through the surface or that are fixed to a support so that the piece is moved, depending on the manufacturing process or the machine to which it is fixed. In these cases, the vibrations that generate the displacement of the parts can affect the measurement.
  • the non-contact ones do not have a physical probe, so that instead of using a needle or measuring tip that is dragged on the surface, a laser beam of different wavelengths that affect the surface to be measured.
  • roughness meters are characterized in carrying out the measurements at a higher speed when working with high sensitivity photoelectric sensors and in checking the general measurements of the parts, in addition to the roughnesses. That is, they have more than one use, unlike contact roughness meters.
  • the invention ES2337323A1 describes a roughness meter for measuring the roughness of a surface comprising a laser sensor for measuring a distance from the roughness meter to the surface to be measured.
  • the laser sensor is based on the triangulation of the light beam, preferably comprising a laser beam generator and a sensitive position sensor of the reflected laser beam that generates two electrical currents proportional to the distance of the incident point beam reflected in the detector with respect to The ends of the detector.
  • the present invention has been developed to be used in all these mentioned industries, with a quality level, according to the existing requirements.
  • the present invention comprises the execution of the measurement of the roughness of a surface and the rugosimeter apparatus, used to carry out said measurement.
  • the invention aims at a non-contact roughness meter and the method carried out for the measurement of roughness on a surface.
  • Said roughness meter comprises an emitter configured to emit a beam of electromagnetic radiation on the surface to be measured roughness, a collimator configured to homogenize the electromagnetic radiation beams, emitted by the emitter, obtaining a set of parallel beams with the same intensity properties of brightness, a receiver, configured to receive the reflection of the beam of electromagnetic radiation on the surface to measure the roughness that has been emitted by the emitter and a processing unit, where the brightness intensity values received by the receiver are compared with a database of brightness intensities associated with roughnesses and where once the brightness intensity values received by the receiver have been compared with the database of the processing unit, the roughness value associated with these intensity intensity values is selected reflected beam brightness.
  • the beam of electromagnetic radiation emitted by the emitter comprises a very wide wavelength range comprising white light, monochromatic light, infrared light, ultraviolet light and the laser beam.
  • the receiver that receives the reflected beam is formed by a group of photometers based on a matrix of light sensors that measure the reflection of light in number of beams.
  • the method of the present invention consists in the use of the properties of light reflection, on a surface, to infer the character of the surface finish of the materials, roughness and undulations, without the need for physical contact between the measuring device and the surface to be measured
  • the method is based on the measurement of the intensity of the brightness of the beam of electromagnetic radiation once it has been reflected by said surface to be measured. Specifically, when a beam of electromagnetic radiation is reflected on a surface, it tends to disperse depending on the roughness of said surface, so that if the roughness is very high, the dispersion is greater.
  • the reflected electromagnetic radiation beam loses brightness intensity as its dispersion is greater, that is, as the electromagnetic radiation beams lose their parallelism with which they were emitted.
  • the more electromagnetic radiation beams reach the receiver the more intensity of brightness has been reflected, which means that the surface has little roughness, while, if the roughness of the piece to be measured is greater, the beams deviate and they disperse so the brightness intensity that reaches the receiver is lower.
  • the method described in the present invention for measuring roughness consists in measuring the brightness and intensity of a beam reflected on a beam surface on which said beam is affected. To do this, the more parallel rays are reflected and captured by the sensors, the more intensity of brightness exists, so that if the roughness in the piece to be measured is greater, the rays are deflected and the intensity of brightness that reaches the sensors Receiving the electromagnetic radiation beam is smaller.
  • the roughness reading method is a process that has the following stages:
  • the contactless roughness meter allows to measure the reflection of the light intensity of a material and compare it with the known roughness depending on the light intensity of said material, to be able to show it. That is, based on said brightness intensity of said reflection, the surface roughness is determined.
  • the emitter, the receiver and the rugosimeter collimator are comprised in a cone installed in a machine tool, being connected to the processing unit comparing the brightness intensity of the beam of electromagnetic radiation reflected and received by the receiver with the rugosimeter database and displays by means of an output device, the roughness data obtained.
  • the cone comprises a transmitting antenna that wirelessly connects said cone to the processing unit, by means of a wireless connection that can be bluetooth, a Wi-Fi or infrared signal, while in another embodiment, the cone is connected to the unit of Processing via a wired connection.
  • the roughness meter data output device is a screen showing the maximum and average roughnesses as well as the sample length of the measured surface.
  • the cone is mounted on a robotic arm configured to position the emitter and receiver of the electromagnetic radiation beam in a position suitable for performing the roughness measurement of the surfaces to be measured, of a piece, during the process of manufacturing and checking said piece.
  • the robotic arm can rotate and move to obtain the necessary sample length on the surface of the piece, or remain motionless, the piece being the one that moves or rotates, achieving the scanning of the beam of electromagnetic radiation on its surface.
  • the cone is mounted on a device configured to be used manually by a user to perform measurements in both manufacturing processes and subsequent checks, at the micrometer level but without the need to have contact with the surface of the object to measure.
  • the application of this invention is linked to any sector that depends on machining processes, and can also be applied to other surface processes such as painting, polishing or chrome plating, as well as to all those cases in which it is necessary to know the smoothness of a surface.
  • Figure 5 shows a preferred assembly of part of the roughness meter in an ISO cone, for use in a machining center.
  • the present invention comprises the process of measuring the roughness of a surface and of the apparatus, non-contact roughness meter, which performs said measurement.
  • This piece measurement can be done before, during or after machining, depending on the needs, as well as in preventive or predictive work such as, for example, to verify elements or machinery in operation such as the roughness of injection molds.
  • the operation of the rugosimeter consists in the emission of a beam of electromagnetic radiation by an emitter (2) on a surface of which it is desired to know the roughness.
  • the electromagnetic radiation beam passes through a collimator, with which a set of parallel beams with the same brightness intensity properties are obtained.
  • This set of beams are reflected on said surface and the reflection is captured by the receiver (3), which is formed by a group of photometers that measure the intensity of the light.
  • Figure 5 shows an embodiment of part of the rugosimeter installed in a cone (4), configured to be used in a machining center, so that it can be mounted on a robotic arm allowing its positioning in a programmed way as if A three-dimensional measuring machine is treated, although it can also be mounted on a device configured to be used manually.
  • the cone (4) has two small projections, one of them being the emitter (2) or focus of the beam of electromagnetic radiation and the other the receiver (3).
  • This cone (4) is connected to a processing unit that is the part of the roughness meter where the brightness intensity values received by the receiver (3) are compared with a database of brightness intensities associated with different roughnesses of different materials , and the output device of the roughness data.
  • the data obtained in the measurement, after being compared with those recorded in the database, are shown to the user by means of an output device of the roughness data of the measured surfaces.
  • connection between the cone (4) and the processing unit can be made wirelessly or by cable.
  • the cone (4) has a transmitting antenna (1) with which both devices communicate.
  • the arrows represent the beams coming out of the emitter (2) and bounce on the surface, but not all the projected beams return until the receiver (3), since they depend on the surface finish, returning more or less beams, this value being the one that provides the roughness of the surface to be measured.

Abstract

The invention relates to a profilometer able to measure the roughness of a surface with which it is not in contact, which comprises an emitter (2) configured to emit a beam of electromagnetic radiation onto the surface of which the roughness is to be measured, a collimator configured to homogenise the beams of electromagnetic radiation emitted by the emitter (2), thereby obtaining a set of parallel beams with the same brightness level properties, and a receiver (3) configured to receive the reflection of the beam of electromagnetic radiation emitted by the emitter (2) onto the surface of which the roughness is to be measured. These elements forming the profilometer are complemented by a processing unit configured to compare the brightness level values received by the receiver (3) with a database of brightness levels associated with the roughnesses of different materials and to select the roughness value associated with the brightness level values of the reflected beam, once the brightness level values received by the receiver (3) have been compared with the database of the processing unit.

Description

RUGOSÍMETRO SIN CONTACTO Y MÉTODO PARA LA MEDICIÓN DE RUGOSIDAD  RUGOSIMETER WITHOUT CONTACT AND METHOD FOR RUGOSITY MEASUREMENT
DESCRIPCIÓN  DESCRIPTION
Objeto y campo de la invención  Object and field of the invention
En mecánica, la rugosidad es el conjunto de irregularidades que posee una superficie y los rugosímetros son instrumentos de medida de alta precisión que se utilizan para medir dichas irregularidades o imperfecciones en las superficies.  In mechanics, roughness is the set of irregularities that a surface possesses and roughness meters are high precision measuring instruments that are used to measure such irregularities or imperfections on surfaces.
El objeto de la presente descripción es un método mejorado para la medición de la rugosidad superficial, sin realizar ningún tipo de contacto sobre la misma y el rugosímetro que es capaz de aplicar dicho método. The object of the present description is an improved method for measuring surface roughness, without making any contact on it and the roughness meter that is capable of applying said method.
Antecedentes de la invención Background of the invention
En muchos procesos industriales el acabado de las superficies es fundamental en el mecanizado de las piezas, siendo por ello de gran importancia la más exacta medición de las diferentes piezas fabricadas.  In many industrial processes the finishing of the surfaces is fundamental in the machining of the pieces, being therefore of great importance the most accurate measurement of the different manufactured parts.
Los rugosímetros sirven para determinar la rugosidad de estas superficies indicando la profundidad de la rugosidad media (Rz) que es la distancia entre la altura máxima y la altura mínima medida de las irregularidades o imperfecciones de una longitud y el valor de la rugosidad media aritmética (Ra), que es la rugosidad media de todas las medidas que el equipo ha ido adquiriendo, o lo que es lo mismo es el valor medio de la rugosidad medida de una superficie determinada para su comprobación. Roughness meters are used to determine the roughness of these surfaces by indicating the depth of the average roughness (Rz) which is the distance between the maximum height and the minimum measured height of irregularities or imperfections of a length and the value of the arithmetic average roughness ( Ra), which is the average roughness of all the measures that the equipment has been acquiring, or what is the same is the average value of the measured roughness of a given surface for verification.
Mediante su uso, se permite definir la micro-geometría de las superficies para hacerlas válidas para la función para la que hayan sido realizadas. Through its use, it is possible to define the micro-geometry of the surfaces to make them valid for the function for which they were performed.
El objetivo de estas mediciones es el de comprobación de errores que imposibiliten el uso para el cual ha sido diseñado un elemento en concreto y poder corregir esos errores de forma o las ondulaciones presentes, sobre todo para piezas que precisan de condiciones especiales de tamaño y forma para su funcionamiento, como pueden ser elementos mecánicos de alta precisión. The purpose of these measurements is to check for errors that prevent the use for which a specific element has been designed and to correct those errors of form or the undulations present, especially for parts that require special conditions of size and shape for its operation, such as high precision mechanical elements.
Los rugosímetros se pueden clasificar según su tipo de palpación, pudiendo ser de contacto o de no contacto. Los de contacto poseen un palpador que está basado, habitualmente, en una punta de diamante cuya función es tomar los datos mediante un barrido de la punta sobre la pieza, y los de no contacto son aquellos que analizan la superficie del material sin realizar ningún tipo de roce sobre ella. Roughness meters can be classified according to their type of palpation, and can be contact or no contact. The contact ones have a probe that is usually based on a diamond tip whose function is to take the data by scanning the tip on the piece, and the non-contact ones are those that analyze the surface of the material without making any type of rubbing on her.
En los rugosímetros con palpador de contacto, éste se desplaza realizando un recorrido sobre la superficie de la pieza a analizar enviando la señal a otro elemento o componente que muestra o registra el estado superficial, a partir de las irregularidades que se encuentra durante el muestreo. In roughness meters with a touch probe, it moves along the surface of the piece to be analyzed by sending the signal to another element or component that shows or records the surface state, based on the irregularities found during sampling.
Existe en el mercado una variedad de palpadores de contacto de superficie sobre la cual se comprueba la rugosidad, siendo la mayoría de dichos palpadores de tipo portátil y enviando la lectura recibida a un dispositivo de salida de datos. There is a variety of surface contact probes on the market on which the roughness is checked, most of them being portable type probes and sending the received reading to a data output device.
El resultado de esta medición de rugosidad es la visualización de un perfil, pudiendo observar en dos dimensiones la distancia recorrida por el rugosímetro sobre la superficie y los picos y valles que presenta. The result of this roughness measurement is the visualization of a profile, being able to observe in two dimensions the distance traveled by the rugosimeter on the surface and the peaks and valleys that it presents.
Uno de los problemas debidos al uso de este tipo de rugosímetros es que el contacto entre las partes genera la descalibración del palpador, ya que se trata de un elemento de alta precisión, lo que supone un inconveniente para aplicaciones in-situ. One of the problems due to the use of this type of roughness testers is that the contact between the parts causes the probe to be calibrated, since it is a high precision element, which is an inconvenience for on-site applications.
En muchos casos, el palpador es desplazado sobre la superficie de forma manual por el usuario, provocando más descalibraciones y generando unos resultados que pueden ser poco precisos. Para evitar este problema, se utilizan palpadores que se desplacen de forma autónoma por la superficie o que queden fijados a un soporte para que sea la pieza la que se desplace, según el proceso de fabricación o la máquina a la que se encuentre fijado. En estos casos, las vibraciones que generan el desplazamiento de las partes, pueden afectar a la medición. In many cases, the probe is moved on the surface manually by the user, causing more decalibrations and generating results that may be inaccurate. To avoid this problem, probes are used that move autonomously through the surface or that are fixed to a support so that the piece is moved, depending on the manufacturing process or the machine to which it is fixed. In these cases, the vibrations that generate the displacement of the parts can affect the measurement.
Otros problemas debidos al uso de este tipo de rugosímetros radican en la dificultad, en ocasiones imposibilidad, de realizar mediciones precisas en objetos con superficies muy pequeñas o de configuración compleja, sobre todo, durante el proceso de fabricación, haciendo necesario extraer la pieza del lugar en el que se encuentra en un proceso de trabajo concreto, para trasladarla a una zona de metrología y comprobación de calidad. Esto significa que la medida de rugosidad puede no formar parte del proceso de fabricación, siendo únicamente una comprobación posterior. Other problems due to the use of this type of rugosimeters lie in the difficulty, sometimes impossible, of making precise measurements on objects with very small surfaces or of complex configuration, especially during the manufacturing process, making it necessary to extract the piece from the place in which it is in a concrete work process, to move it to an area of metrology and quality checking. This means that the roughness measurement may not be part of the manufacturing process, being only a later check.
Los últimos avances en este tipo de rugosímetros han ido dirigidos a mejorar los contactos entre las partes, haciendo los punteros más pequeños, consiguiendo unos rangos de medida entre 0,05 y 160 pm, a unas velocidades de medición cercanas a 1 mm/s, aunque también se han orientado hacia el control del sistema mediante dispositivos móviles. The latest advances in this type of roughness meters have been aimed at improving the contacts between the parts, making the pointers smaller, achieving measuring ranges between 0.05 and 160 pm, at measuring speeds close to 1 mm / s, although they have also been oriented towards the control of the system through mobile devices.
Por otra parte, a diferencia de los rugosímetros de contacto, los de no contacto no tienen un palpador físico, de modo que en vez de utilizar una aguja o punta de medida que se arrastra sobre la superficie, se hace uso de un haz láser de diferentes longitudes de onda que inciden sobre la superficie a medir. On the other hand, unlike the contact roughness meters, the non-contact ones do not have a physical probe, so that instead of using a needle or measuring tip that is dragged on the surface, a laser beam of different wavelengths that affect the surface to be measured.
Estos rugosímetros están caracterizados en realizar las mediciones a una mayor velocidad al trabajar con sensores fotoeléctricos de alta sensibilidad y en la comprobación de las medidas generales de las piezas, además de las rugosidades. Es decir, que tienen más de un uso, a diferencia de los rugosímetros de contacto. These roughness meters are characterized in carrying out the measurements at a higher speed when working with high sensitivity photoelectric sensors and in checking the general measurements of the parts, in addition to the roughnesses. That is, they have more than one use, unlike contact roughness meters.
Poseen una gran rapidez de medida, siendo en algunos casos inferior a 0.5 segundos, que permite utilizarlos para comprobaciones en línea, incluso con movimientos de piezas a gran velocidad, con un con gran campo de observación de superficie. They have a great speed of measurement, being in some cases less than 0.5 seconds, which allows them to be used for online checks, even with movements of parts at high speed, with a large surface observation field.
Al no tener contactos con las superficies y carecer de partes móviles en la mayoría de los casos, presentan una gran durabilidad reduciendo los costes de mantenimiento y re calibración. Having no contact with the surfaces and lacking moving parts in most cases, they have great durability reducing maintenance and re-calibration costs.
La invención ES2337323A1 describe un rugosímetro para la medición de la rugosidad de una superficie que comprende un sensor láser para medición de una distancia del rugosímetro a la superficie a medir. El sensor láser se basa en la triangulación del rayo de luz, comprendiendo preferentemente un generador de rayo láser y un detector sensible de posición del rayo láser reflejado que genera dos corrientes eléctricas proporcionales a la distancia del punto de incidencia rayo reflejado en el detector respecto de los extremos del detector. El moderno desarrollo de la implantología dental y las nuevas posibilidades industriales del microfresado entre otros campos de la actividad humana productiva, es donde puede cumplir su función el rugosímetro sin contacto, porque ofrecen un desafío constante a las técnicas de medición que han de aplicarse a procesos de fabricación de piezas cada vez más pequeñas, como implantes de titanio, siendo la nanotecnología y la microfabricacion ejemplos de este futuro tecnológico y de fabricación en el que no tiene cabida el rugosímetro convencional, porque este instrumento necesita realizar un recorrido muy superior a la superficie o a la pieza objeto de medición. The invention ES2337323A1 describes a roughness meter for measuring the roughness of a surface comprising a laser sensor for measuring a distance from the roughness meter to the surface to be measured. The laser sensor is based on the triangulation of the light beam, preferably comprising a laser beam generator and a sensitive position sensor of the reflected laser beam that generates two electrical currents proportional to the distance of the incident point beam reflected in the detector with respect to The ends of the detector. The modern development of dental implantology and the new industrial possibilities of microforestry among other fields of productive human activity, is where the contactless rugosimeter can fulfill its function, because they offer a constant challenge to the measurement techniques that have to be applied to processes of manufacturing smaller and smaller parts, such as titanium implants, nanotechnology and microfabrication being examples of this technological and manufacturing future in which the conventional rugosimeter has no place, because this instrument needs to travel much higher than the surface or to the part being measured.
El avance tecnológico que se desarrolla de forma constante en la industria supone la aparición de elementos mecánicos cada vez más complejos, de tamaños cada vez más pequeños que exigen un mayor control de precisión en las mediciones. Estos avances tecnológicos inciden en la limitación del rugosímetro convencional como elemento medidor. The technological advance that is constantly developing in the industry implies the appearance of increasingly complex mechanical elements, of increasingly smaller sizes that require greater precision control in measurements. These technological advances affect the limitation of the conventional rugosimeter as a measuring element.
La importancia de la correcta cuantificación de la rugosidad radica en que cada vez es más creciente el uso de componentes micro-mecanizados, con acabados superficiales y tolerancias dimensionales de gran calidad, en industrias como la automotriz, aeronáutica y aeroespacial, matricería y moldes, medicina, electrónica e informática. The importance of the correct quantification of roughness lies in the increasing use of micro-mechanized components, with surface finishes and high-quality dimensional tolerances, in industries such as automotive, aeronautics and aerospace, matrix and molds, medicine , electronics and computer science.
La presente invención ha sido desarrollada para ser utilizada en todas estas industrias mencionadas, con un nivel de calidad, acorde a las exigencias existentes. The present invention has been developed to be used in all these mentioned industries, with a quality level, according to the existing requirements.
Descripción de la invención Description of the invention
La presente invención comprende la ejecución de la medición de la rugosidad de una superficie y del aparato rugosímetro, utilizado para llevar a cabo dicha medición.  The present invention comprises the execution of the measurement of the roughness of a surface and the rugosimeter apparatus, used to carry out said measurement.
Concretamente, la invención tiene por objeto un rugosímetro sin contacto y el método llevado a cabo para la medición de la rugosidad sobre una superficie. Specifically, the invention aims at a non-contact roughness meter and the method carried out for the measurement of roughness on a surface.
Dicho rugosímetro comprende un emisor configurado para emitir un haz de radiación electromagnética sobre la superficie a medir la rugosidad, un colimador configurado para homogeneizar los haces de radiación electromagnética, emitidos por el emisor, obteniendo un conjunto de haces paralelos con las mismas propiedades de intensidad de brillo, un receptor, configurado para recibir la reflexión del haz de radiación electromagnética sobre la superficie a medir la rugosidad que ha sido emitido por el emisor y una unidad de procesamiento, donde se comparan los valores de intensidad de brillo recibidos por el receptor con una base de datos de intensidades de brillo asociadas a rugosidades y donde una vez comparados los valores de intensidad de brillo recibidos por el receptor con la base de datos de la unidad de procesamiento, se selecciona el valor de la rugosidad asociada a estos valores de intensidad de brillo del haz reflejado. Said roughness meter comprises an emitter configured to emit a beam of electromagnetic radiation on the surface to be measured roughness, a collimator configured to homogenize the electromagnetic radiation beams, emitted by the emitter, obtaining a set of parallel beams with the same intensity properties of brightness, a receiver, configured to receive the reflection of the beam of electromagnetic radiation on the surface to measure the roughness that has been emitted by the emitter and a processing unit, where the brightness intensity values received by the receiver are compared with a database of brightness intensities associated with roughnesses and where once the brightness intensity values received by the receiver have been compared with the database of the processing unit, the roughness value associated with these intensity intensity values is selected reflected beam brightness.
El haz de radiación electromagnética emitido por el emisor comprende un rango de longitud de onda muy amplio que comprende la luz blanca, la luz monocromática, la luz infrarroja, la luz ultravioleta y el haz láser. The beam of electromagnetic radiation emitted by the emitter comprises a very wide wavelength range comprising white light, monochromatic light, infrared light, ultraviolet light and the laser beam.
El receptor que recibe el haz reflejado está formado por un grupo de fotómetros basados en una matriz de sensores de luz que mide la reflexión de luz en cantidad de haces. The receiver that receives the reflected beam is formed by a group of photometers based on a matrix of light sensors that measure the reflection of light in number of beams.
El método de la presente invención consiste en la utilización de las propiedades de la reflexión de la luz, sobre una superficie, para inferir el carácter del acabado superficial de los materiales, rugosidad y ondulaciones, sin necesidad de contacto físico entre el aparato medidor y la superficie a medir. Para ello, el método se basa en la medición de la intensidad del brillo del haz de radiación electromagnética una vez ha sido reflejado por dicha superficie a medir. Concretamente, cuando un haz de radiación electromagnética es reflejado en una superficie, tiende a dispersarse en función de la rugosidad de dicha superficie, de modo que si la rugosidad es muy elevada, la dispersión es mayor. El haz de radiación electromagnética reflejado pierde intensidad de brillo a medida que su dispersión es mayor, es decir, a medida que los haces de radiación electromagnética pierden su paralelismo con el que fueron emitidos. The method of the present invention consists in the use of the properties of light reflection, on a surface, to infer the character of the surface finish of the materials, roughness and undulations, without the need for physical contact between the measuring device and the surface to be measured For this, the method is based on the measurement of the intensity of the brightness of the beam of electromagnetic radiation once it has been reflected by said surface to be measured. Specifically, when a beam of electromagnetic radiation is reflected on a surface, it tends to disperse depending on the roughness of said surface, so that if the roughness is very high, the dispersion is greater. The reflected electromagnetic radiation beam loses brightness intensity as its dispersion is greater, that is, as the electromagnetic radiation beams lose their parallelism with which they were emitted.
De esta forma, cuantos más haces de radiación electromagnética lleguen al receptor, más intensidad de brillo ha sido reflejado, lo que supone que la superficie posee poca rugosidad, mientras que, si la rugosidad de la pieza a medir es mayor, los haces se desvían y se dispersan por lo que la intensidad de brillo que llega al receptor es menor. In this way, the more electromagnetic radiation beams reach the receiver, the more intensity of brightness has been reflected, which means that the surface has little roughness, while, if the roughness of the piece to be measured is greater, the beams deviate and they disperse so the brightness intensity that reaches the receiver is lower.
A diferencia de la invención ES2337323A1 , que mide la distancia del rugosímetro a la pieza a medir, el método descrito en la presente invención para medir la rugosidad consiste en la medición del brillo y de la intensidad de un haz reflejado sobre una superficie sobre la cual se hace incidir dicho haz. Para ello, cuantos más rayos paralelos sean reflejados y sean captados por los sensores, más intensidad de brillo existe, de forma que si la rugosidad en la pieza a medir es mayor, los rayos se desvían y la intensidad de brillo que llega a los sensores de recepción del haz de radiación electromagnética es menor. Unlike the invention ES2337323A1, which measures the distance from the roughness meter to the piece to be measured, the method described in the present invention for measuring roughness consists in measuring the brightness and intensity of a beam reflected on a beam surface on which said beam is affected. To do this, the more parallel rays are reflected and captured by the sensors, the more intensity of brightness exists, so that if the roughness in the piece to be measured is greater, the rays are deflected and the intensity of brightness that reaches the sensors Receiving the electromagnetic radiation beam is smaller.
Para ello, el método de lectura de la rugosidad es un proceso que posee las siguientes etapas: For this, the roughness reading method is a process that has the following stages:
almacenar en una base de datos diferentes valores de intensidad de brillo, de al menos un material, asociados a diferentes valores de rugosidades para dicho, al menos un material;  storing different brightness intensity values of at least one material in a database, associated with different roughness values for said material, at least one material;
emitir un haz de radiación electromagnética, por un emisor sobre una superficie a medir la rugosidad;  emit a beam of electromagnetic radiation, by an emitter on a surface to measure the roughness;
homogeneizar el haz de radiación electromagnética emitido por el emisor mediante un colimador, en unos primeros valores de intensidad de brillo y dirección;  homogenize the beam of electromagnetic radiation emitted by the emitter by means of a collimator, in the first values of brightness intensity and direction;
recibir por un receptor un haz de radiación electromagnética reflejado en la superficie con unos segundos valores de intensidad de brillo y dirección diferentes a los primeros valores de intensidad de brillo y dirección;  receiving a beam of electromagnetic radiation reflected on the surface with a second brightness intensity and direction values different from the first brightness intensity and direction values;
comparar los segundos valores de intensidad de brillo con los valores de intensidad de brillo previamente almacenados en la base de datos;  compare the second brightness intensity values with the brightness intensity values previously stored in the database;
seleccionar el valor de la rugosidad asociada a estos valores de intensidad de brillo del haz reflejado, como resultado de la comparación de los segundos valores de intensidad y brillo con la base de datos;  select the roughness value associated with these brightness intensity values of the reflected beam, as a result of comparing the second intensity and brightness values with the database;
De esta forma, el rugosímetro sin contacto permite medir la reflexión de la intensidad lumínica de un material y compararla con la rugosidad conocida en función de la intensidad lumínica de dicho material, para poder mostrarla. Es decir, en función de dicha intensidad de brillo de dicha reflexión, se determina la rugosidad de la superficie. In this way, the contactless roughness meter allows to measure the reflection of the light intensity of a material and compare it with the known roughness depending on the light intensity of said material, to be able to show it. That is, based on said brightness intensity of said reflection, the surface roughness is determined.
En una realización, el emisor, el receptor y el colimador del rugosímetro se encuentran comprendidos en un cono instalado en una máquina herramienta, encontrándose conectado a la unidad de procesamiento que compara la intensidad del brillo del haz de radiación electromagnética reflejado y recibido por el receptor con la base de datos del rugosímetro y muestra mediante un dispositivo de salida, los datos de las rugosidades obtenidas. In one embodiment, the emitter, the receiver and the rugosimeter collimator are comprised in a cone installed in a machine tool, being connected to the processing unit comparing the brightness intensity of the beam of electromagnetic radiation reflected and received by the receiver with the rugosimeter database and displays by means of an output device, the roughness data obtained.
En una realización, el cono comprende una antena emisora que conecta inalámbricamente dicho cono a la unidad de procesamiento, mediante una conexión inalámbrica que puede ser bluetooth, una señal wifi o infrarrojos, mientras que en otra realización, el cono está conectado a la unidad de procesamiento mediante una conexión cableada. In one embodiment, the cone comprises a transmitting antenna that wirelessly connects said cone to the processing unit, by means of a wireless connection that can be bluetooth, a Wi-Fi or infrared signal, while in another embodiment, the cone is connected to the unit of Processing via a wired connection.
En una realización, el dispositivo de salida de datos de las rugosidades del rugosímetro es una pantalla en la que se muestran las rugosidades máximas y medias así como la longitud de muestro de la superficie medida. In one embodiment, the roughness meter data output device is a screen showing the maximum and average roughnesses as well as the sample length of the measured surface.
En una realización, el cono está montado en un brazo robótico configurado para posicionar el emisor y receptor del haz de radiación electromagnética en una posición adecuada para la realización de la medición de la rugosidad de las superficies a medir, de una pieza, durante el proceso de fabricación y comprobación de dicha pieza. Para ello, el brazo robótico puede girar y desplazarse para obtener la longitud de muestro necesaria sobre la superficie de la pieza, o permanecer inmóvil, siendo la pieza la que se desplace o gire, logrando el barrido del haz de radiación electromagnética sobre su superficie. In one embodiment, the cone is mounted on a robotic arm configured to position the emitter and receiver of the electromagnetic radiation beam in a position suitable for performing the roughness measurement of the surfaces to be measured, of a piece, during the process of manufacturing and checking said piece. For this, the robotic arm can rotate and move to obtain the necessary sample length on the surface of the piece, or remain motionless, the piece being the one that moves or rotates, achieving the scanning of the beam of electromagnetic radiation on its surface.
En una realización, el cono está montado en un dispositivo configurado para ser utilizado de forma manual por un usuario para la realización de mediciones tanto en procesos de fabricación como en comprobaciones posteriores, a nivel micrométrico pero sin la necesidad de tener contacto con la superficie del objeto a medir. In one embodiment, the cone is mounted on a device configured to be used manually by a user to perform measurements in both manufacturing processes and subsequent checks, at the micrometer level but without the need to have contact with the surface of the object to measure.
Estas características indicadas permiten al rugosímetro descrito medir superficies de difícil acceso o de muy reducido tamaño que impiden a un rugosímetro convencional la óptima realización de su recorrido para la pertinente medición. These indicated characteristics allow the described roughness meter to measure surfaces that are difficult to access or of a very small size that prevent a conventional rugosimeter from optimizing its path for the relevant measurement.
La aplicación de esta invención está unida a todo sector que dependa de procesos de mecanizado, pudiéndose aplicar también a otros procesos superficiales como el pintado, pulido o cromado, así como a todos aquellos casos en los que se precise conocer la suavidad de una superficie. The application of this invention is linked to any sector that depends on machining processes, and can also be applied to other surface processes such as painting, polishing or chrome plating, as well as to all those cases in which it is necessary to know the smoothness of a surface.
Breve descripción de las figuras En las figuras 1 , 2, 3, 4, se muestran cuatro figuras que representan la diferencia de la reflexión de los haces de radiación electromagnética en distintas superficies con diferentes rugosidades, generando mayor dispersión de los haces reflejados cuanta mayor es la rugosidad. Brief description of the figures In figures 1, 2, 3, 4, four figures are shown that represent the difference in the reflection of the electromagnetic radiation beams on different surfaces with different roughnesses, generating greater dispersion of the reflected beams the greater the roughness.
En la figura numero 5 se muestra un montaje preferente de parte del rugosímetro en un cono ISO, para su uso en un centro de mecanizado. Figure 5 shows a preferred assembly of part of the roughness meter in an ISO cone, for use in a machining center.
Descripción preferente de la invención Preferred Description of the Invention
La presente invención comprende el proceso de la medición de la rugosidad de una superficie y del aparato, rugosímetro sin contacto, que lleva a cabo dicha medición.  The present invention comprises the process of measuring the roughness of a surface and of the apparatus, non-contact roughness meter, which performs said measurement.
Esta medición de la pieza puede realizarse antes, durante o después del mecanizado, dependiendo de las necesidades, así como en labores de tipo preventivo o predictivo como por ejemplo, para verificar elementos o maquinarias en funcionamiento como puede ser la rugosidad de moldes de inyección. This piece measurement can be done before, during or after machining, depending on the needs, as well as in preventive or predictive work such as, for example, to verify elements or machinery in operation such as the roughness of injection molds.
El funcionamiento del rugosímetro consiste en la emisión de un haz de radiación electromagnética por parte de un emisor (2) sobre una superficie de la que se desea conocer la rugosidad. El haz de radiación electromagnética pasa por un colimador, con el que se obtienen un conjunto de haces paralelos con las mismas propiedades de intensidad de brillo. Este conjunto de haces se reflejan en dicha superficie y el reflejo es captado por el receptor (3), que está formado por un grupo de fotómetros que miden la intensidad de la luz. The operation of the rugosimeter consists in the emission of a beam of electromagnetic radiation by an emitter (2) on a surface of which it is desired to know the roughness. The electromagnetic radiation beam passes through a collimator, with which a set of parallel beams with the same brightness intensity properties are obtained. This set of beams are reflected on said surface and the reflection is captured by the receiver (3), which is formed by a group of photometers that measure the intensity of the light.
En la figura 5 se muestra una realización de parte del rugosímetro instalado en un cono (4), configurado para poder ser utilizado en un centro de mecanizado, de modo que puede estar montado en un brazo robótico permitiendo su posicionamiento de forma programada como si de una máquina de medición tridimensional se tratase, aunque también puede estar montado en un dispositivo configurado para ser utilizado de forma manual. Figure 5 shows an embodiment of part of the rugosimeter installed in a cone (4), configured to be used in a machining center, so that it can be mounted on a robotic arm allowing its positioning in a programmed way as if A three-dimensional measuring machine is treated, although it can also be mounted on a device configured to be used manually.
En dicha figura 5, se observa que el cono (4) posee dos pequeños salientes, siendo uno de ellos el emisor (2) o foco del haz de radiación electromagnética y otro el receptor (3). Este cono (4) está conectado a una unidad de procesamiento que es la parte del rugosímetro donde se comparan los valores de intensidad de brillo recibidos por el receptor (3) con una base de datos de intensidades de brillos asociados a diferentes rugosidades de diferentes materiales, y el dispositivo de salida de los datos de las rugosidades. In said figure 5, it is observed that the cone (4) has two small projections, one of them being the emitter (2) or focus of the beam of electromagnetic radiation and the other the receiver (3). This cone (4) is connected to a processing unit that is the part of the roughness meter where the brightness intensity values received by the receiver (3) are compared with a database of brightness intensities associated with different roughnesses of different materials , and the output device of the roughness data.
Para ello se precisa de la base de datos, previamente a la medición, para cada tipo de material a medir. Es decir, antes de realizar las medidas con el rugosímetro de la invención, es necesario realizar una base de datos del tipo de material, para emplearla como elemento de comparación con las medidas realizadas. This requires the database, prior to measurement, for each type of material to be measured. That is, before carrying out the measurements with the rugosimeter of the invention, it is necessary to make a database of the type of material, to use it as an element of comparison with the measurements made.
Por lo tanto, para cada tipo de material con diferentes índices de rugosidades le corresponde un brillo y una dispersión de luz diferente. Therefore, for each type of material with different roughness indices it corresponds to a brightness and a different light scattering.
Los datos obtenidos en la medición, tras ser comparados con los registrados en la base de datos, son mostrados al usuario mediante un dispositivo de salida de los datos de las rugosidades de las superficies medidas. The data obtained in the measurement, after being compared with those recorded in the database, are shown to the user by means of an output device of the roughness data of the measured surfaces.
La conexión entre el cono (4) y la unidad de procesamiento se puede realizar de forma inalámbrica o mediante cable. En caso de conexión inalámbrica, el cono (4) posee una antena emisora (1) con la que ambos dispositivos se comunican. The connection between the cone (4) and the processing unit can be made wirelessly or by cable. In case of wireless connection, the cone (4) has a transmitting antenna (1) with which both devices communicate.
En la secuencia de figuras 1 a 4 se describe como se altera la disposición de los haces al reflejarse en superficies de diferente rugosidad. In the sequence of figures 1 to 4 it is described how the arrangement of the beams is altered when reflected on surfaces of different roughness.
En la figura 1 , se muestra una superficie lisa donde los haces llegan paralelos a dicha superficie y salen igualmente paralelos, de modo que la ausencia de rugosidades y ondulaciones de la superficie no modifican la dirección de estos haces. In Figure 1, a smooth surface is shown where the beams arrive parallel to said surface and leave equally parallel, so that the absence of surface roughness and undulations does not change the direction of these beams.
En las figuras 2, 3 y 4 se pierde la condición de paralelismo de los haces reflejados en función de la rugosidad y ondulación de la superficie, de modo que a mayor rugosidad, mayor es la dispersión generada. In figures 2, 3 and 4 the condition of parallelism of the reflected beams is lost as a function of the surface roughness and undulation, so that the greater the roughness, the greater the dispersion generated.
En estas figuras se puede observar que las flechas representan los haces saliendo del emisor (2) y rebotan en la superficie, pero no todos los haces proyectados vuelven hasta el receptor (3), ya que dependen del acabado superficial, regresando más o menos haces, siendo este valor el que proporciona la rugosidad de la superficie a medir. In these figures it can be seen that the arrows represent the beams coming out of the emitter (2) and bounce on the surface, but not all the projected beams return until the receiver (3), since they depend on the surface finish, returning more or less beams, this value being the one that provides the roughness of the surface to be measured.
En el caso de procesos de mecanizado, partiendo de medidas sobre los materiales mecanizados, podemos vincular o llevar el nivel de reflexión lumínica a una escala de rugosidades de valores micrométricos, con plena capacidad de definir la lectura de rugosidades y ondulaciones utilizadas a nivel mundial. In the case of machining processes, based on measures on the machined materials, we can link or bring the level of light reflection to a scale of roughness of micrometric values, with full capacity to define the reading of roughnesses and undulations used worldwide.
La presente invención no debe verse limitada a la forma de realización aquí descrita. Otras configuraciones pueden ser realizadas por los expertos en la materia a la vista de la presente descripción. En consecuencia, el ámbito de la invención queda definido por las siguientes reivindicaciones. The present invention should not be limited to the embodiment described herein. Other configurations may be made by those skilled in the art in view of the present description. Accordingly, the scope of the invention is defined by the following claims.

Claims

REIVINDICACIONES
1.- Rugosímetro sin contacto sobre una superficie, caracterizado por que dicho rugosímetro comprende: 1.- Contactless roughness meter on a surface, characterized in that said roughness meter comprises:
un emisor (2) configurado para emitir un haz de radiación electromagnética sobre la superficie a medir la rugosidad;  an emitter (2) configured to emit a beam of electromagnetic radiation on the surface to be measured roughness;
un colimador configurado para homogeneizar los haces de radiación electromagnética, emitidos por el emisor (2), obteniendo un conjunto de haces paralelos con las mismas propiedades de intensidad de brillo;  a collimator configured to homogenize the electromagnetic radiation beams, emitted by the emitter (2), obtaining a set of parallel beams with the same brightness intensity properties;
un receptor (3), configurado para recibir la reflexión del haz de radiación electromagnética sobre la superficie a medir la rugosidad, que ha sido emitido por el emisor (2); y  a receiver (3), configured to receive the reflection of the electromagnetic radiation beam on the surface to be measured roughness, which has been emitted by the emitter (2); Y
una unidad de procesamiento configurada para:  a processing unit configured to:
- comparar los valores de intensidad de brillo recibidos por el receptor (3) con una base de datos de intensidades de brillo asociadas a rugosidades de diferentes materiales; y  - compare the brightness intensity values received by the receiver (3) with a database of brightness intensities associated with roughnesses of different materials; Y
- para seleccionar el valor de la rugosidad asociada a los valores de intensidad de brillo del haz reflejado, una vez comparados los valores de intensidad de brillo recibidos por el receptor (3) con la base de datos de la unidad de procesamiento.  - to select the roughness value associated with the brightness intensity values of the reflected beam, after comparing the brightness intensity values received by the receiver (3) with the database of the processing unit.
2.- Rugosímetro sin contacto según la reivindicación 1 , caracterizado por que el haz de radiación electromagnética emitido por el emisor (2) está comprendido dentro de un grupo que consiste en: luz blanca, luz monocromática, luz infrarroja, luz ultravioleta y haz láser. 2. Contactless rugosimeter according to claim 1, characterized in that the beam of electromagnetic radiation emitted by the emitter (2) is comprised within a group consisting of: white light, monochromatic light, infrared light, ultraviolet light and laser beam .
3.- Rugosímetro sin contacto según la reivindicación 1 , caracterizado por que el emisor3. Contactless roughness meter according to claim 1, characterized in that the emitter
(2), (two),
el receptor (3) y el colimador del rugosímetro se encuentran comprendidos en un cono (4), donde dicho cono (4) es un periférico conectado a la unidad de procesamiento. The receiver (3) and the rugosimeter collimator are included in a cone (4), where said cone (4) is a peripheral connected to the processing unit.
4 - Rugosímetro sin contacto según la reivindicación 2, caracterizado por que el cono (4) comprende una antena emisora (1) que conecta inalámbricamente dicho cono (4) a la unidad de procesamiento, mediante una conexión seleccionada dentro del grupo que consiste en bluetooth, señal wifi e infrarrojos. 4 - Contactless roughness meter according to claim 2, characterized in that the cone (4) comprises a transmitter antenna (1) that wirelessly connects said cone (4) to the processing unit, by means of a connection selected within the group consisting of bluetooth , wifi and infrared signal.
5.- Rugosímetro sin contacto según la reivindicación 2, caracterizado por que el cono (4) está conectado a la unidad de procesamiento mediante una conexión cableada. 5. Contactless roughness meter according to claim 2, characterized in that the cone (4) is connected to the processing unit via a wired connection.
6.- Rugosímetro sin contacto según la reivindicación 1 , caracterizado por que el rugosímetro adicionalmente comprende un dispositivo de salida de valores de las rugosidades mediante una pantalla en la que se muestran las rugosidades máximas y medias y la longitud de muestro de la superficie medida. 6. Contactless rugosimeter according to claim 1, characterized in that the rugosimeter additionally comprises an output device for roughness values by means of a screen in which the maximum and average roughnesses and the length of the measured surface are shown.
7.- Rugosímetro sin contacto según la reivindicación 1 , caracterizado por que el receptor (3) está formado por un grupo de fotómetros, basados en una matriz de sensores de radiación electromagnética que mide la intensidad del brillo del haz reflejado. 7. Contactless rugosimeter according to claim 1, characterized in that the receiver (3) is formed by a group of photometers, based on an array of electromagnetic radiation sensors that measure the intensity of the reflected beam brightness.
8.- Rugosímetro sin contacto según las reivindicaciones 1 y 3, caracterizado por que el cono (4) está montado en un brazo robótico configurado para posicionar dicho cono (4) respecto a las superficies para realizar la medición de la rugosidad durante el proceso de fabricación y comprobación de dicha pieza. 8. Contactless rugosimeter according to claims 1 and 3, characterized in that the cone (4) is mounted on a robotic arm configured to position said cone (4) with respect to the surfaces for measuring the roughness during the process of manufacture and verification of said piece.
9.- Rugosímetro sin contacto según las reivindicaciones 1 y 3, caracterizado por que el cono (4) está montado en un dispositivo configurado para ser utilizado de forma manual. 9. Contactless rugosimeter according to claims 1 and 3, characterized in that the cone (4) is mounted on a device configured to be used manually.
10.- Método para la medición de la rugosidad caracterizado por que comprende las siguientes etapas: 10.- Method for measuring roughness characterized by comprising the following stages:
almacenar en una base de datos diferentes valores de intensidad de brillo, de al menos un material, asociados a diferentes valores de rugosidades para dicho, al menos un material;  storing different brightness intensity values of at least one material in a database, associated with different roughness values for said material, at least one material;
emitir un haz de radiación electromagnética, por un emisor (2) sobre una superficie a medir la rugosidad;  emit a beam of electromagnetic radiation, by an emitter (2) on a surface to be measured roughness;
homogeneizar el haz de radiación electromagnética emitido por el emisor (2) mediante un colimador, en unos primeros valores de intensidad de brillo y dirección;  homogenize the beam of electromagnetic radiation emitted by the emitter (2) by means of a collimator, at first values of brightness intensity and direction;
recibir por un receptor (3) un haz de radiación electromagnética reflejado en la superficie con unos segundos valores de intensidad de brillo y dirección diferentes a los primeros valores de intensidad de brillo y dirección;  receiving by a receiver (3) a beam of electromagnetic radiation reflected on the surface with a second brightness and direction intensity values different from the first brightness and direction intensity values;
comparar los segundos valores de intensidad de brillo con los valores de intensidad de brillo previamente almacenados en la base de datos; y compare the second brightness intensity values with the values of brightness intensity previously stored in the database; Y
seleccionar el valor de la rugosidad asociada a estos valores de intensidad de brillo del haz reflejado, como resultado de la comparación de los segundos valores de intensidad y brillo con la base de datos. select the roughness value associated with these brightness intensity values of the reflected beam, as a result of comparing the second intensity and brightness values with the database.
PCT/ES2019/070476 2018-07-18 2019-07-05 Non-contact profilometer and method for measuring roughness WO2020016468A1 (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
ES201830725A ES2738204A1 (en) 2018-07-18 2018-07-18 RUGOSIMETER WITHOUT CONTACT AND METHOD FOR RUGOSITY MEASUREMENT (Machine-translation by Google Translate, not legally binding)
ESP201830725 2018-07-18

Publications (1)

Publication Number Publication Date
WO2020016468A1 true WO2020016468A1 (en) 2020-01-23

Family

ID=69159410

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/ES2019/070476 WO2020016468A1 (en) 2018-07-18 2019-07-05 Non-contact profilometer and method for measuring roughness

Country Status (2)

Country Link
ES (1) ES2738204A1 (en)
WO (1) WO2020016468A1 (en)

Citations (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3804521A (en) * 1972-02-22 1974-04-16 Itek Corp Optical device for measuring surface roughness
JPS6491009A (en) * 1987-10-02 1989-04-10 Hitachi Ltd Apparatus for evaluating flatness of thin film
JPH11287639A (en) * 1998-03-31 1999-10-19 Sumitomo Osaka Cement Co Ltd Optical double surface roughness inspecting method and device therefor
WO2001026861A1 (en) * 1999-10-12 2001-04-19 Seco Tools Ab; (Publ) A device for a machine tool
WO2016015734A1 (en) * 2014-08-01 2016-02-04 Dfm A/S A scatterometer apparatus
US20170082536A1 (en) * 2015-08-12 2017-03-23 Industrial Technology Research Institute Scattering measurement system and method
JP2018044873A (en) * 2016-09-15 2018-03-22 日立オートモティブシステムズ株式会社 Surface inspection apparatus, surface inspection method, and database
US20180147645A1 (en) * 2016-11-26 2018-05-31 Agie Charmilles Sa Method for machining and inspecting of workpieces

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CA1014638A (en) * 1974-04-16 1977-07-26 Domtar Limited Measuring the surface roughness of a moving sheet material
US5162660A (en) * 1991-06-27 1992-11-10 Macmillan Bloedel Limited Paper roughness or glass sensor using polarized light reflection
US5189490A (en) * 1991-09-27 1993-02-23 University Of Hartford Method and apparatus for surface roughness measurement using laser diffraction pattern
FI991071A0 (en) * 1999-05-10 1999-05-10 Valmet Automation Inc Procedure and measurement arrangement for measuring paper surface

Patent Citations (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3804521A (en) * 1972-02-22 1974-04-16 Itek Corp Optical device for measuring surface roughness
JPS6491009A (en) * 1987-10-02 1989-04-10 Hitachi Ltd Apparatus for evaluating flatness of thin film
JPH11287639A (en) * 1998-03-31 1999-10-19 Sumitomo Osaka Cement Co Ltd Optical double surface roughness inspecting method and device therefor
WO2001026861A1 (en) * 1999-10-12 2001-04-19 Seco Tools Ab; (Publ) A device for a machine tool
WO2016015734A1 (en) * 2014-08-01 2016-02-04 Dfm A/S A scatterometer apparatus
US20170082536A1 (en) * 2015-08-12 2017-03-23 Industrial Technology Research Institute Scattering measurement system and method
JP2018044873A (en) * 2016-09-15 2018-03-22 日立オートモティブシステムズ株式会社 Surface inspection apparatus, surface inspection method, and database
US20180147645A1 (en) * 2016-11-26 2018-05-31 Agie Charmilles Sa Method for machining and inspecting of workpieces

Also Published As

Publication number Publication date
ES2738204A1 (en) 2020-01-20

Similar Documents

Publication Publication Date Title
Zexiao et al. Complete 3D measurement in reverse engineering using a multi-probe system
US10323927B2 (en) Calibration of a triangulation sensor
Feng et al. Analysis of digitizing errors of a laser scanning system
ES2663494T3 (en) Auxiliary device and procedure for customizing an optical measurement arrangement that can be mounted on a manipulator
US9581437B2 (en) Interferometric non-contact optical probe and measurement
Weckenmann et al. Manufacturing metrology–state of the art and prospects
JPH1183438A (en) Position calibration method for optical measuring device
CN103697824A (en) System calibration method for measuring head of coordinate measuring machine
Berger et al. Non-contact metrology of aspheric surfaces based on MWLI technology
US10345101B2 (en) Device and method for calibrating a coordinate-measuring device
JP2014098690A (en) Calibration apparatus, calibration method, and measurement apparatus
Dobosz et al. CMM touch trigger probes testing using a reference axis
JP6388722B2 (en) Interferometric non-contact optical probe and measurement
Zapico et al. Extrinsic calibration of a conoscopic holography system integrated in a CMM
WO2020016468A1 (en) Non-contact profilometer and method for measuring roughness
JP2015129667A (en) Measurement device and method for calibrating measurement device
Zexiao et al. Modeling and calibration of a structured-light-sensor-based five-axis scanning system
ES1250404U (en) NO CONTACT RUGOSIMETER FOR ROUGH MEASUREMENT (Machine-translation by Google Translate, not legally binding)
Hartmann et al. B6. 1-Function-Oriented Dimensional Metrology–More than Determining Size and Shape
CN104729431A (en) Method for measuring surface curvature radius of spherical optical element with small curvature and small caliber
NL2005591C2 (en) Apparatus and method for calibrating a coordinate measuring apparatus.
Peggs et al. Measuring in three dimensions at the mesoscopic level
Lewis Fully traceable miniature CMM with submicrometer uncertainty
Buhmann et al. Investigation on probe positioning errors affecting on-machine measurements on ultra-precision turning machines
JP2016153786A (en) Shape measurement method, shape measurement device, program, recording medium, and optical element manufacturing method

Legal Events

Date Code Title Description
121 Ep: the epo has been informed by wipo that ep was designated in this application

Ref document number: 19837227

Country of ref document: EP

Kind code of ref document: A1

NENP Non-entry into the national phase

Ref country code: DE

122 Ep: pct application non-entry in european phase

Ref document number: 19837227

Country of ref document: EP

Kind code of ref document: A1