JPS57178322A - Film processing equipment for semiconductor - Google Patents

Film processing equipment for semiconductor

Info

Publication number
JPS57178322A
JPS57178322A JP6325381A JP6325381A JPS57178322A JP S57178322 A JPS57178322 A JP S57178322A JP 6325381 A JP6325381 A JP 6325381A JP 6325381 A JP6325381 A JP 6325381A JP S57178322 A JPS57178322 A JP S57178322A
Authority
JP
Japan
Prior art keywords
processing equipment
film processing
semiconductor
dust
converged
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP6325381A
Other languages
Japanese (ja)
Inventor
Katsuya Okumura
Masaaki Ueda
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Toshiba Corp
Tokyo Shibaura Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Corp, Tokyo Shibaura Electric Co Ltd filed Critical Toshiba Corp
Priority to JP6325381A priority Critical patent/JPS57178322A/en
Publication of JPS57178322A publication Critical patent/JPS57178322A/en
Pending legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
    • H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
    • H01L21/28—Manufacture of electrodes on semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/268
    • H01L21/283—Deposition of conductive or insulating materials for electrodes conducting electric current
    • H01L21/285—Deposition of conductive or insulating materials for electrodes conducting electric current from a gas or vapour, e.g. condensation

Landscapes

  • Engineering & Computer Science (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Physics & Mathematics (AREA)
  • Power Engineering (AREA)
  • Electrodes Of Semiconductors (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
  • Drying Of Semiconductors (AREA)
  • Physical Deposition Of Substances That Are Components Of Semiconductor Devices (AREA)
  • Physical Vapour Deposition (AREA)

Abstract

PURPOSE:To check the condition of dust promptly by providing a light scattering type dust monitor in a film processing equipment. CONSTITUTION:The light emitted by a source 16 is converged by a group of lenses of the incident side which includes a slit. The reflected lights produced by a dust 10 are converged by a group of lenses of detecting side which includes slits and detected by photo multiplescers 17 which are so arranged to have an incident light axis at the center.
JP6325381A 1981-04-28 1981-04-28 Film processing equipment for semiconductor Pending JPS57178322A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP6325381A JPS57178322A (en) 1981-04-28 1981-04-28 Film processing equipment for semiconductor

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP6325381A JPS57178322A (en) 1981-04-28 1981-04-28 Film processing equipment for semiconductor

Publications (1)

Publication Number Publication Date
JPS57178322A true JPS57178322A (en) 1982-11-02

Family

ID=13223899

Family Applications (1)

Application Number Title Priority Date Filing Date
JP6325381A Pending JPS57178322A (en) 1981-04-28 1981-04-28 Film processing equipment for semiconductor

Country Status (1)

Country Link
JP (1) JPS57178322A (en)

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