JPS54141661A - Assignment system of inspection area - Google Patents
Assignment system of inspection areaInfo
- Publication number
- JPS54141661A JPS54141661A JP4922378A JP4922378A JPS54141661A JP S54141661 A JPS54141661 A JP S54141661A JP 4922378 A JP4922378 A JP 4922378A JP 4922378 A JP4922378 A JP 4922378A JP S54141661 A JPS54141661 A JP S54141661A
- Authority
- JP
- Japan
- Prior art keywords
- inspection area
- mask
- inspection
- area
- area mask
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Abstract
PURPOSE: To obtain an inspection assignment area capable of the assigning inspection area with ease irrespective of the shapes of the inspection area by indicating the inspection area with an area mask.
CONSTITUTION: An inspection area mask 13 is so fixed to an XY stage 12 that it moves together with the XY stage 12 mounted to the material 11 to be inspected. A transmission type area mask is used as the inspection area mask 13 and an inspection area detecting system constituted by a light source 14 and a photo detector 15 positioned above and below with the inspection area mask 13 in-between is used. The inspection area mask 13 is then mounted on the XY stage 12, and depending upon whether the light from the light source is masked by the inspection area mask 13 or not, the inspection area is displayed by a black and white pattern, thus from the presence or not of the light from the area mask, the inspection area may be discriminated.
COPYRIGHT: (C)1979,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP4922378A JPS54141661A (en) | 1978-04-27 | 1978-04-27 | Assignment system of inspection area |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP4922378A JPS54141661A (en) | 1978-04-27 | 1978-04-27 | Assignment system of inspection area |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS54141661A true JPS54141661A (en) | 1979-11-05 |
JPS638417B2 JPS638417B2 (en) | 1988-02-23 |
Family
ID=12824926
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP4922378A Granted JPS54141661A (en) | 1978-04-27 | 1978-04-27 | Assignment system of inspection area |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS54141661A (en) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5920840A (en) * | 1982-07-28 | 1984-02-02 | Fujitsu Ltd | Defect checking device |
JP2007121290A (en) * | 2005-10-24 | 2007-05-17 | General Electric Co <Ge> | Method and device for generating mask |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH03130420U (en) * | 1990-04-11 | 1991-12-27 |
-
1978
- 1978-04-27 JP JP4922378A patent/JPS54141661A/en active Granted
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5920840A (en) * | 1982-07-28 | 1984-02-02 | Fujitsu Ltd | Defect checking device |
JPH0447782B2 (en) * | 1982-07-28 | 1992-08-04 | Fujitsu Ltd | |
JP2007121290A (en) * | 2005-10-24 | 2007-05-17 | General Electric Co <Ge> | Method and device for generating mask |
Also Published As
Publication number | Publication date |
---|---|
JPS638417B2 (en) | 1988-02-23 |
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