JPS5713307A - Position detector - Google Patents

Position detector

Info

Publication number
JPS5713307A
JPS5713307A JP8654580A JP8654580A JPS5713307A JP S5713307 A JPS5713307 A JP S5713307A JP 8654580 A JP8654580 A JP 8654580A JP 8654580 A JP8654580 A JP 8654580A JP S5713307 A JPS5713307 A JP S5713307A
Authority
JP
Japan
Prior art keywords
slit
dusts
transparent members
onto
light
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP8654580A
Other languages
Japanese (ja)
Other versions
JPS6230362B2 (en
Inventor
Katsuhide Tanoshima
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Oki Electric Industry Co Ltd
Original Assignee
Oki Electric Industry Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Oki Electric Industry Co Ltd filed Critical Oki Electric Industry Co Ltd
Priority to JP8654580A priority Critical patent/JPS5713307A/en
Publication of JPS5713307A publication Critical patent/JPS5713307A/en
Publication of JPS6230362B2 publication Critical patent/JPS6230362B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
    • G01D5/26—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light
    • G01D5/32—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light
    • G01D5/34—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells
    • G01D5/347—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells using displacement encoding scales
    • G01D5/34707—Scales; Discs, e.g. fixation, fabrication, compensation
    • G01D5/34715—Scale reading or illumination devices

Abstract

PURPOSE:To prevent dusts from sticking onto a slit by a method wherein a slitted plate is held between a pair of transparent members. CONSTITUTION:A luminous body 2 is driven by a driving circuit 1 to emit a light. Thus emitted light is led to a photoreceiver 3 via convex lens 8, a slitted plate 5 and another convex lens 9, and then supplied to a detection circuit 4. A slit 5a in the slitted plate 5 is covered at its both sides with transparent members 6 and 7, so that dusts will not/be sticked onto the slit 5a. Even if dust sticks onto the outer surfaces of the transparent members 6 and 7 or the surfaces are damaged, such dusts and damages locate out of focuses of the convex lenses 8 and 9, thus providing no influence upon/function of the photoreceiver 3 to receive a light.
JP8654580A 1980-06-27 1980-06-27 Position detector Granted JPS5713307A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP8654580A JPS5713307A (en) 1980-06-27 1980-06-27 Position detector

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP8654580A JPS5713307A (en) 1980-06-27 1980-06-27 Position detector

Publications (2)

Publication Number Publication Date
JPS5713307A true JPS5713307A (en) 1982-01-23
JPS6230362B2 JPS6230362B2 (en) 1987-07-02

Family

ID=13889971

Family Applications (1)

Application Number Title Priority Date Filing Date
JP8654580A Granted JPS5713307A (en) 1980-06-27 1980-06-27 Position detector

Country Status (1)

Country Link
JP (1) JPS5713307A (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0358689A1 (en) * 1987-04-27 1990-03-21 Printware, Inc. Optical position encoder
JP2012138602A (en) * 2008-12-03 2012-07-19 Asml Netherlands Bv Lithographic apparatus and device manufacturing method
DE102005013222B4 (en) * 2005-03-17 2015-12-31 Dr. Johannes Heidenhain Gmbh Position measuring device

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4952567U (en) * 1972-08-10 1974-05-09

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4952567U (en) * 1972-08-10 1974-05-09

Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0358689A1 (en) * 1987-04-27 1990-03-21 Printware, Inc. Optical position encoder
EP0358689A4 (en) * 1987-04-27 1992-01-08 Printware, Inc. Optical position encoder
DE102005013222B4 (en) * 2005-03-17 2015-12-31 Dr. Johannes Heidenhain Gmbh Position measuring device
JP2012138602A (en) * 2008-12-03 2012-07-19 Asml Netherlands Bv Lithographic apparatus and device manufacturing method
US10197927B2 (en) 2008-12-03 2019-02-05 Asml Netherlands B.V. Lithographic apparatus and device manufacturing method having a barrier and/or a contamination removal device for a sensor and/or grating
US10866530B2 (en) 2008-12-03 2020-12-15 Asml Netherlands B.V. Lithographic apparatus and device manufacturing method
US11609504B2 (en) 2008-12-03 2023-03-21 Asml Netherlands B.V. Lithographic apparatus and device manufacturing method

Also Published As

Publication number Publication date
JPS6230362B2 (en) 1987-07-02

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