JPS5627117A - Light splitter - Google Patents
Light splitterInfo
- Publication number
- JPS5627117A JPS5627117A JP10249179A JP10249179A JPS5627117A JP S5627117 A JPS5627117 A JP S5627117A JP 10249179 A JP10249179 A JP 10249179A JP 10249179 A JP10249179 A JP 10249179A JP S5627117 A JPS5627117 A JP S5627117A
- Authority
- JP
- Japan
- Prior art keywords
- face
- photodetector
- glass plate
- exit end
- light
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Exposure Control For Cameras (AREA)
- Optical Elements Other Than Lenses (AREA)
Abstract
PURPOSE: To effectively lead the split light to a photodetector even if the distance between the exit end face of the light splitter and the photodetector becomes large by providing a refracting face inclined with respect to the boundary face between the light splitter and the photodetector.
CONSTITUTION: Light incident to a refracting grating 40 is diffracted at an angle α with respect to the diffraction grating plane and reaches an end face 9 while totally reflecting on the surface of a glass plate, thence it emits at an angle θ. Hence, it splits to the two symmetrical luminous fluxes 45 and 46 at the exit end 9. If in this case a photodetector P is apart from the exit end 9, it cannot detect the split luminous fluxes. Thereupon, a transparent material 44 having a scored shape of a V shape on the face opposing to the photodetector P and having the same refractive index n1 as that of the glass plate 2 is adhered to the end face of the glass plate 2. The V-shaped score has a vertex angle β and the vertex angle β is determined by the formula 1. Then, the light emitting from the end face becomes parallel to the glass plate 2 and enters the photodetector fairly apart from the exit end face.
COPYRIGHT: (C)1981,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP10249179A JPS5627117A (en) | 1979-08-10 | 1979-08-10 | Light splitter |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP10249179A JPS5627117A (en) | 1979-08-10 | 1979-08-10 | Light splitter |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS5627117A true JPS5627117A (en) | 1981-03-16 |
JPS6337366B2 JPS6337366B2 (en) | 1988-07-25 |
Family
ID=14328885
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP10249179A Granted JPS5627117A (en) | 1979-08-10 | 1979-08-10 | Light splitter |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5627117A (en) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS597333A (en) * | 1982-07-05 | 1984-01-14 | Ricoh Co Ltd | Optical scanning method |
EP1780770A1 (en) * | 2004-06-18 | 2007-05-02 | Nikon Corporation | Light detecting apparatus, illumination optical apparatus, exposure apparatus and exposure method |
-
1979
- 1979-08-10 JP JP10249179A patent/JPS5627117A/en active Granted
Cited By (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS597333A (en) * | 1982-07-05 | 1984-01-14 | Ricoh Co Ltd | Optical scanning method |
EP1780770A1 (en) * | 2004-06-18 | 2007-05-02 | Nikon Corporation | Light detecting apparatus, illumination optical apparatus, exposure apparatus and exposure method |
EP1780770A4 (en) * | 2004-06-18 | 2008-02-27 | Nikon Corp | Light detecting apparatus, illumination optical apparatus, exposure apparatus and exposure method |
JPWO2005124831A1 (en) * | 2004-06-18 | 2008-04-17 | 株式会社ニコン | Photodetection apparatus, illumination optical apparatus, exposure apparatus, and exposure method |
US7573019B2 (en) | 2004-06-18 | 2009-08-11 | Nikon Corporation | Light detecting apparatus, illumination optical apparatus, exposure apparatus and exposure method |
JP4730712B2 (en) * | 2004-06-18 | 2011-07-20 | 株式会社ニコン | Illumination optical apparatus, exposure apparatus, and exposure method |
Also Published As
Publication number | Publication date |
---|---|
JPS6337366B2 (en) | 1988-07-25 |
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