JPS6230362B2 - - Google Patents
Info
- Publication number
- JPS6230362B2 JPS6230362B2 JP55086545A JP8654580A JPS6230362B2 JP S6230362 B2 JPS6230362 B2 JP S6230362B2 JP 55086545 A JP55086545 A JP 55086545A JP 8654580 A JP8654580 A JP 8654580A JP S6230362 B2 JPS6230362 B2 JP S6230362B2
- Authority
- JP
- Japan
- Prior art keywords
- transparent
- slit
- light
- slit plate
- bodies
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 239000000428 dust Substances 0.000 description 6
- 108091008695 photoreceptors Proteins 0.000 description 4
- 238000001514 detection method Methods 0.000 description 3
- 239000000463 material Substances 0.000 description 2
- 230000007423 decrease Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 230000003287 optical effect Effects 0.000 description 1
- 239000012780 transparent material Substances 0.000 description 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
- G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
- G01D5/26—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light
- G01D5/32—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light
- G01D5/34—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells
- G01D5/347—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells using displacement encoding scales
- G01D5/34707—Scales; Discs, e.g. fixation, fabrication, compensation
- G01D5/34715—Scale reading or illumination devices
Description
【発明の詳細な説明】
本発明は各種移動体あるいは回転体の位置検出
に用いられる位置検出器に関し、特に相対向して
置かれた発光体と受光体との間にスリツト板を置
く構成の位置検出器に関する。DETAILED DESCRIPTION OF THE INVENTION The present invention relates to a position detector used for detecting the position of various moving bodies or rotating bodies, and particularly to a position detector having a structure in which a slit plate is placed between a light emitter and a light receiver placed opposite each other. Regarding position detectors.
従来上記構成の位置検出器では、スリツト板の
スリツト部分にゴミ等が付着すると受光体の受光
量が著しく減少するため位置検出不能となること
が多く、これを避けるため位置検出器に種々の防
塵構造を施している。このため位置検出器全体の
構造が複雑、大型化し、又価格も高くなる欠点が
あつた。 Conventionally, in position detectors with the above configuration, if dust or the like adheres to the slit portion of the slit plate, the amount of light received by the photoreceptor decreases significantly, often making position detection impossible. It has a structure. For this reason, the structure of the entire position detector becomes complicated and large, and the price also increases.
本発明はこれら欠点の除去を目的とするもの
で、この目的を達成するため本発明は、スリツト
板を一対の透明体で挾み、かつ発光体と前記透明
体との間及び受光体と前記透明体との間にその焦
点が前記スリツト板のスリツト位置に来るように
凸レンズを相対向させて配置したものである。 The purpose of the present invention is to eliminate these drawbacks, and to achieve this purpose, the present invention includes a slit plate sandwiched between a pair of transparent bodies, and a space between a light emitting body and the transparent body, and a space between a light receiving body and the transparent body. A convex lens is disposed opposite to the transparent body so that its focal point is at the slit position of the slit plate.
以下図面に従つて本発明を詳細に説明する。 The present invention will be explained in detail below with reference to the drawings.
第１図は本発明の一実施例を示すもので、１は
発光体２を発光するように駆動する駆動回路、３
は受光体４で得られた光信号を増幅・整形する光
検出回路、５は第２図に示すように前記発光体２
からの光進行方向と直交する方向に複数のスリツ
ト５ａを形成したスリツト板である。なおこのス
リツト板５は遮光性の材料から成る板体に方形状
の穴をあけたものでもよいが、透明の材料から成
る板体の方形状の透明部分を残して遮光体を塗布
又は印刷し、スリツト板としたものでもよい。６
及び７は前記スリツト板５をサンドイツチ状に挾
み込んだ一対の透明体、８及び９は前記透明体６
と発光体２及び前記透明体７と受光体４の間に相
対向して置かれかつその焦点Ｆがスリツト板５の
スリツト５ａに来るように位置付けられた凸レン
ズである。 FIG. 1 shows an embodiment of the present invention, in which 1 is a drive circuit that drives a light emitter 2 to emit light; 3
5 is a photodetection circuit that amplifies and shapes the optical signal obtained by the photoreceptor 4, and 5 is the light emitter 2 as shown in FIG.
This is a slit plate in which a plurality of slits 5a are formed in a direction perpendicular to the direction in which light travels. The slit plate 5 may be made of a plate made of a light-shielding material with rectangular holes, but it is also possible to coat or print a light-shielding material on a plate made of a transparent material, leaving the rectangular transparent part. , or a slit plate. 6
and 7 are a pair of transparent bodies sandwiching the slit plate 5 in the shape of a sandwich, and 8 and 9 are the transparent bodies 6.
This is a convex lens which is placed facing each other between the light emitting body 2, the transparent body 7 and the light receiving body 4, and is positioned so that its focal point F is at the slit 5a of the slit plate 5.
上記構成において、まずスリツト板５のスリツ
ト５ａにはその両側が透明体６及び７によつて覆
われているため、空中の塵埃や装置の稼動中に発
生するゴミなどが付着したり、浸入したりするこ
とはない。また透明体６及び７の外側表面にゴミ
などが付着したり、傷がついたりしても、それら
は凸レンズ８，９の焦点の外に位置することにな
るため、受光体３における受光には影響しない。 In the above configuration, first of all, since both sides of the slit 5a of the slit plate 5 are covered with transparent bodies 6 and 7, dust in the air or dirt generated during operation of the device does not adhere to or infiltrate. There is no need to worry. Furthermore, even if dust or the like is attached to or scratched on the outer surfaces of the transparent bodies 6 and 7, they will be located outside the focal point of the convex lenses 8 and 9, so that the light received by the photoreceptor 3 will not be affected. It does not affect.
なおこの実施例では凸レンズ８及び９を透明体
６及び７から離しているが、該透明体６及び７の
厚さを該凸レンズ８及び９の焦点距離に合わせて
適宜選択し、この透明体６及び７の外側表面に凸
レンズ８，９を直接接触させるようにしてもよい
し、透明体６，７と凸レンズ８，９とを一体に形
成してもよい。 In this embodiment, the convex lenses 8 and 9 are separated from the transparent bodies 6 and 7, but the thickness of the transparent bodies 6 and 7 is appropriately selected according to the focal length of the convex lenses 8 and 9, and the transparent bodies 6 and 7 are separated from each other. The convex lenses 8 and 9 may be brought into direct contact with the outer surfaces of the transparent bodies 6 and 7, or the transparent bodies 6 and 7 and the convex lenses 8 and 9 may be formed integrally.
第３図は本発明の他の実施例を示すもので、ス
リツト板５並びに透明体６，７が円板状に形成さ
れ、その円周上に複数のスリツト５ａが放射状に
孔設されており、回転位置を検出するのに適する
構造としたものである。発光体及び受光体並びに
凸レンズは特に図示していないが、スリツト５ａ
が設けられている円周上の一つの位置に相対向し
て置かれ、この構成においても上記実施例と同様
の効果が達成できるものである。 FIG. 3 shows another embodiment of the present invention, in which a slit plate 5 and transparent bodies 6, 7 are formed into a disk shape, and a plurality of slits 5a are radially provided on the circumference of the disk. , has a structure suitable for detecting rotational position. Although the light emitting body, the light receiving body, and the convex lens are not particularly shown, the slit 5a
are placed facing each other at one position on the circumference, and the same effects as in the above embodiment can be achieved with this configuration as well.
以上説明したように本発明の位置検出器によれ
ば、スリツト中にゴミが付着したり、浸入したり
することが防止され、又スリツトをゴミ等から防
護する透明体にゴミや傷などがついても受光に影
響を与えないため、正確でかつ安定した位置検出
が行なえる効果がある。 As explained above, the position detector of the present invention prevents dust from adhering to or entering the slit, and prevents dust or scratches from forming on the transparent body that protects the slit from dust. Since this method does not affect light reception, accurate and stable position detection is possible.
第１図は本発明の一実施例を示す図、第２図は
第１図の一部を示す斜視図、第３図は本発明の他
の実施例を示す斜視図である。
１……駆動回路、２……発光体、３……受光
体、４……光検出回路、５……スリツト板、５ａ
……スリツト、６，７……透明体、８，９……凸
レンズ、Ｆ……焦点。
FIG. 1 is a diagram showing one embodiment of the present invention, FIG. 2 is a perspective view showing a part of FIG. 1, and FIG. 3 is a perspective view showing another embodiment of the invention. DESCRIPTION OF SYMBOLS 1... Drive circuit, 2... Light emitter, 3... Photoreceptor, 4... Light detection circuit, 5... Slit plate, 5a
...slit, 6,7...transparent body, 8,9...convex lens, F...focal point.
Claims (1)
スリツト板を有する位置検出器において、前記ス
リツト板を一対の透明体で挾み、かつ前記発光体
と透明体との間及び前記受光体と透明体との間に
その焦点が前記スリツト板のスリツト位置に来る
ように凸レンズを相対向させて配置したことを特
徴とする位置検出器。1. In a position detector having a slit plate between a light emitting body and a light receiving body placed opposite to each other, the slit plate is sandwiched between a pair of transparent bodies, and the light receiving body and the light receiving body are placed between the light emitter and the transparent body. A position detector characterized in that a convex lens is disposed facing each other between the body and the transparent body so that its focal point is at the slit position of the slit plate.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8654580A JPS5713307A (en) | 1980-06-27 | 1980-06-27 | Position detector |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8654580A JPS5713307A (en) | 1980-06-27 | 1980-06-27 | Position detector |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5713307A JPS5713307A (en) | 1982-01-23 |
| JPS6230362B2 true JPS6230362B2 (en) | 1987-07-02 |
Family
ID=13889971
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP8654580A Granted JPS5713307A (en) | 1980-06-27 | 1980-06-27 | Position detector |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5713307A (en) |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4899048A (en) * | 1987-04-27 | 1990-02-06 | Printware, Inc. | Focused optical beam encoder of position |
| DE102005013222B4 (en) * | 2005-03-17 | 2015-12-31 | Dr. Johannes Heidenhain Gmbh | Position measuring device |
| NL2003638A (en) | 2008-12-03 | 2010-06-07 | Asml Netherlands Bv | Lithographic apparatus and device manufacturing method. |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS4952567U (en) * | 1972-08-10 | 1974-05-09 |
-
1980
- 1980-06-27 JP JP8654580A patent/JPS5713307A/en active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5713307A (en) | 1982-01-23 |
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