JPS57178149A - Manufacture of electric heater - Google Patents
Manufacture of electric heaterInfo
- Publication number
- JPS57178149A JPS57178149A JP6321781A JP6321781A JPS57178149A JP S57178149 A JPS57178149 A JP S57178149A JP 6321781 A JP6321781 A JP 6321781A JP 6321781 A JP6321781 A JP 6321781A JP S57178149 A JPS57178149 A JP S57178149A
- Authority
- JP
- Japan
- Prior art keywords
- heating element
- substrate
- electric heater
- element part
- opened
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000004519 manufacturing process Methods 0.000 title abstract 2
- 238000010438 heat treatment Methods 0.000 abstract 5
- 239000000758 substrate Substances 0.000 abstract 4
- 238000005530 etching Methods 0.000 abstract 2
- 239000000463 material Substances 0.000 abstract 2
- 239000007788 liquid Substances 0.000 abstract 1
- 238000000059 patterning Methods 0.000 abstract 1
- 230000002035 prolonged effect Effects 0.000 abstract 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
- G01N27/02—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance
- G01N27/04—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance
- G01N27/14—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance of an electrically-heated body in dependence upon change of temperature
Landscapes
- Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Electrochemistry (AREA)
- Physics & Mathematics (AREA)
- Health & Medical Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- Analytical Chemistry (AREA)
- Biochemistry (AREA)
- General Health & Medical Sciences (AREA)
- General Physics & Mathematics (AREA)
- Immunology (AREA)
- Pathology (AREA)
- Investigating Or Analyzing Materials By The Use Of Electric Means (AREA)
- Investigating Or Analyzing Materials By The Use Of Fluid Adsorption Or Reactions (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP6321781A JPS57178149A (en) | 1981-04-28 | 1981-04-28 | Manufacture of electric heater |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP6321781A JPS57178149A (en) | 1981-04-28 | 1981-04-28 | Manufacture of electric heater |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS57178149A true JPS57178149A (en) | 1982-11-02 |
JPH0213739B2 JPH0213739B2 (enrdf_load_stackoverflow) | 1990-04-05 |
Family
ID=13222810
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP6321781A Granted JPS57178149A (en) | 1981-04-28 | 1981-04-28 | Manufacture of electric heater |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS57178149A (enrdf_load_stackoverflow) |
Cited By (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS6050419A (ja) * | 1983-08-26 | 1985-03-20 | イノバス | サ−マル質量流量計 |
JPS6153733A (ja) * | 1984-07-25 | 1986-03-17 | ハネウエル・インコーポレーテッド | 半導体デバイスとその製造方法 |
JPS63263426A (ja) * | 1987-04-22 | 1988-10-31 | Sharp Corp | センサ素子 |
US5302933A (en) * | 1991-09-27 | 1994-04-12 | Terumo Kabushiki Kaisha | Infrared sensor |
EP0604405A1 (en) * | 1990-04-18 | 1994-06-29 | Terumo Kabushiki Kaisha | Infrared ray sensor and method of manufacturing the same |
JP2009079908A (ja) * | 2007-09-25 | 2009-04-16 | Citizen Holdings Co Ltd | 接触燃焼式ガスセンサ |
JP2009243962A (ja) * | 2008-03-28 | 2009-10-22 | Niigata Univ | 水素ガスセンサ |
DE102004032718B4 (de) * | 2004-07-07 | 2014-07-17 | Robert Bosch Gmbh | Verfahren zur Herstellung einer Sensor-Einrichtung zum Detektieren einer Strahlung |
Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5389799A (en) * | 1977-01-18 | 1978-08-07 | Mitsubishi Electric Corp | Combustible gas detector |
-
1981
- 1981-04-28 JP JP6321781A patent/JPS57178149A/ja active Granted
Patent Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5389799A (en) * | 1977-01-18 | 1978-08-07 | Mitsubishi Electric Corp | Combustible gas detector |
Cited By (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS6050419A (ja) * | 1983-08-26 | 1985-03-20 | イノバス | サ−マル質量流量計 |
JPS6153733A (ja) * | 1984-07-25 | 1986-03-17 | ハネウエル・インコーポレーテッド | 半導体デバイスとその製造方法 |
JPS63263426A (ja) * | 1987-04-22 | 1988-10-31 | Sharp Corp | センサ素子 |
EP0604405A1 (en) * | 1990-04-18 | 1994-06-29 | Terumo Kabushiki Kaisha | Infrared ray sensor and method of manufacturing the same |
US5302933A (en) * | 1991-09-27 | 1994-04-12 | Terumo Kabushiki Kaisha | Infrared sensor |
DE102004032718B4 (de) * | 2004-07-07 | 2014-07-17 | Robert Bosch Gmbh | Verfahren zur Herstellung einer Sensor-Einrichtung zum Detektieren einer Strahlung |
JP2009079908A (ja) * | 2007-09-25 | 2009-04-16 | Citizen Holdings Co Ltd | 接触燃焼式ガスセンサ |
JP2009243962A (ja) * | 2008-03-28 | 2009-10-22 | Niigata Univ | 水素ガスセンサ |
Also Published As
Publication number | Publication date |
---|---|
JPH0213739B2 (enrdf_load_stackoverflow) | 1990-04-05 |
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