JPS57175718A - Preparation of silicon carbide fine powder - Google Patents

Preparation of silicon carbide fine powder

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Publication number
JPS57175718A
JPS57175718A JP56058481A JP5848181A JPS57175718A JP S57175718 A JPS57175718 A JP S57175718A JP 56058481 A JP56058481 A JP 56058481A JP 5848181 A JP5848181 A JP 5848181A JP S57175718 A JPS57175718 A JP S57175718A
Authority
JP
Japan
Prior art keywords
gas
plasma
high frequency
free
inlet tube
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP56058481A
Other languages
Japanese (ja)
Inventor
Tadamichi Asai
Kosuke Nakamura
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP56058481A priority Critical patent/JPS57175718A/en
Publication of JPS57175718A publication Critical patent/JPS57175718A/en
Pending legal-status Critical Current

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Abstract

PURPOSE: To prepare fine silicon carbide powder suitable especially for sintering under normal pressure, by mixing raw material mixture gas with a plasma gas, introducing the mixture into the plasma flame through the inlet tube of the plasma gas, and decomposing and reacting the raw materials.
CONSTITUTION: Ar gas is introduced into the high frequency induction heating plasma furnace for synthesis of fine powder through the gas inlet tube 8, and high frequency voltage is imposed to the high frequency induction coil 3 to generate the hot plasma flame of Ar. On the other hand, an equi-molar mixture of, e.g. SiH4 and CH4 is introduced into the Ar plasma flame through the gas inlet tube 8 to synthesize the fine SiC powder. The produced SiC fine powder is almost free from the free C and free Si, and is suitable for the manufacturing of an SiC molded article by atmospheric sintering. In the figure, 1 is the raw material feeder 2, is plasma torch, 4 is gas quenching chamber, and 5 is metal block cooled with water.
COPYRIGHT: (C)1982,JPO&Japio
JP56058481A 1981-04-20 1981-04-20 Preparation of silicon carbide fine powder Pending JPS57175718A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP56058481A JPS57175718A (en) 1981-04-20 1981-04-20 Preparation of silicon carbide fine powder

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP56058481A JPS57175718A (en) 1981-04-20 1981-04-20 Preparation of silicon carbide fine powder

Publications (1)

Publication Number Publication Date
JPS57175718A true JPS57175718A (en) 1982-10-28

Family

ID=13085616

Family Applications (1)

Application Number Title Priority Date Filing Date
JP56058481A Pending JPS57175718A (en) 1981-04-20 1981-04-20 Preparation of silicon carbide fine powder

Country Status (1)

Country Link
JP (1) JPS57175718A (en)

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH02232309A (en) * 1989-03-04 1990-09-14 Agency Of Ind Science & Technol Manufacture of fe-si-c series super fine particles
US5178847A (en) * 1988-11-30 1993-01-12 Kemira Oy Process for producing ceramic raw materials
SG111177A1 (en) * 2004-02-28 2005-05-30 Wira Kurnia Fine particle powder production
CN100402423C (en) * 2006-09-07 2008-07-16 郑州华硕精密陶瓷有限公司 Rapid sintering method for sintering product of silicon carbide in normal pressure
CN102432012A (en) * 2011-09-28 2012-05-02 上海交通大学 Method for synthesizing silicon carbide nanometer needle without catalysts

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5178847A (en) * 1988-11-30 1993-01-12 Kemira Oy Process for producing ceramic raw materials
JPH02232309A (en) * 1989-03-04 1990-09-14 Agency Of Ind Science & Technol Manufacture of fe-si-c series super fine particles
SG111177A1 (en) * 2004-02-28 2005-05-30 Wira Kurnia Fine particle powder production
CN100402423C (en) * 2006-09-07 2008-07-16 郑州华硕精密陶瓷有限公司 Rapid sintering method for sintering product of silicon carbide in normal pressure
CN102432012A (en) * 2011-09-28 2012-05-02 上海交通大学 Method for synthesizing silicon carbide nanometer needle without catalysts

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