JPS56100115A - Manufacture of silicon nitride whisker - Google Patents

Manufacture of silicon nitride whisker

Info

Publication number
JPS56100115A
JPS56100115A JP281680A JP281680A JPS56100115A JP S56100115 A JPS56100115 A JP S56100115A JP 281680 A JP281680 A JP 281680A JP 281680 A JP281680 A JP 281680A JP S56100115 A JPS56100115 A JP S56100115A
Authority
JP
Japan
Prior art keywords
gas
temp
furnace
tube
nitriding
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP281680A
Other languages
Japanese (ja)
Inventor
Eiji Kamijo
Masayuki Ishii
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Sumitomo Electric Industries Ltd
Original Assignee
Sumitomo Electric Industries Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Sumitomo Electric Industries Ltd filed Critical Sumitomo Electric Industries Ltd
Priority to JP281680A priority Critical patent/JPS56100115A/en
Publication of JPS56100115A publication Critical patent/JPS56100115A/en
Pending legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C01—INORGANIC CHEMISTRY
    • C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
    • C01B21/00—Nitrogen; Compounds thereof
    • C01B21/06—Binary compounds of nitrogen with metals, with silicon, or with boron, or with carbon, i.e. nitrides; Compounds of nitrogen with more than one metal, silicon or boron
    • C01B21/068—Binary compounds of nitrogen with metals, with silicon, or with boron, or with carbon, i.e. nitrides; Compounds of nitrogen with more than one metal, silicon or boron with silicon
    • C01B21/0685—Preparation by carboreductive nitridation

Abstract

PURPOSE: To obtain long Si3N4 whiskers in a high yield by heating fine grains of a mixture of SiO2 and metallic Si in an inert gas and treating the resulting SiO gas in a reaction tube having a descending temp. gradient under an N2 gas atmosphere.
CONSTITUTION: Sample 1 prepared by mixing SiO2 with metallic Si or C is put into crucible 3 from hopper 2. Furnace 4A is kept at a high temp., and generated reactive gas 8 is carried to reaction tube 11 made of carbon is furnace 4B connected to furnace 4A using inert gas 6 fed from introduction pipe 7 as a carrier gas. Tube 11 has about 1,600W1,200°C temp. gradient descending from the inlet toward the outlet. N-contg. nitriding gas 9 is introduced into tube 11 from introduction pipe 10 to form a nitriding atmosphere. Nitriding gas 9 and reactive gas 8 are brought into contact with each other in tube 11 to deposit and grow Si3N4 whiskers 12. An electric resistance heating system is adopted for crystal growing furnace 4B to stably control the temp.
COPYRIGHT: (C)1981,JPO&Japio
JP281680A 1980-01-14 1980-01-14 Manufacture of silicon nitride whisker Pending JPS56100115A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP281680A JPS56100115A (en) 1980-01-14 1980-01-14 Manufacture of silicon nitride whisker

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP281680A JPS56100115A (en) 1980-01-14 1980-01-14 Manufacture of silicon nitride whisker

Publications (1)

Publication Number Publication Date
JPS56100115A true JPS56100115A (en) 1981-08-11

Family

ID=11539923

Family Applications (1)

Application Number Title Priority Date Filing Date
JP281680A Pending JPS56100115A (en) 1980-01-14 1980-01-14 Manufacture of silicon nitride whisker

Country Status (1)

Country Link
JP (1) JPS56100115A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS57101000A (en) * 1980-12-12 1982-06-23 Sumitomo Electric Ind Ltd Preparation of ceramic whisker
JPS57111300A (en) * 1980-12-25 1982-07-10 Sumitomo Electric Ind Ltd Preparation of ceramic whisker

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5417720A (en) * 1977-07-08 1979-02-09 Ricoh Co Ltd Diazo type copying method

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5417720A (en) * 1977-07-08 1979-02-09 Ricoh Co Ltd Diazo type copying method

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS57101000A (en) * 1980-12-12 1982-06-23 Sumitomo Electric Ind Ltd Preparation of ceramic whisker
JPS57111300A (en) * 1980-12-25 1982-07-10 Sumitomo Electric Ind Ltd Preparation of ceramic whisker

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