JPS5658537A - Ultrafine powder synthesizing furnace - Google Patents

Ultrafine powder synthesizing furnace

Info

Publication number
JPS5658537A
JPS5658537A JP13423179A JP13423179A JPS5658537A JP S5658537 A JPS5658537 A JP S5658537A JP 13423179 A JP13423179 A JP 13423179A JP 13423179 A JP13423179 A JP 13423179A JP S5658537 A JPS5658537 A JP S5658537A
Authority
JP
Japan
Prior art keywords
admitted
plasma
deposit
torch
frame part
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP13423179A
Other languages
Japanese (ja)
Other versions
JPS5941772B2 (en
Inventor
Kosuke Nakamura
Tadamichi Asai
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP54134231A priority Critical patent/JPS5941772B2/en
Publication of JPS5658537A publication Critical patent/JPS5658537A/en
Publication of JPS5941772B2 publication Critical patent/JPS5941772B2/en
Expired legal-status Critical Current

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  • Physical Or Chemical Processes And Apparatus (AREA)
  • Carbon And Carbon Compounds (AREA)

Abstract

PURPOSE: To obtain a synthesizing furnace of a high-frequency induction heating plasma system which is so constituted as to blow the cooling gas separately admitted into the tail frame part of hot plasma, and which permits synthesizing of ultrafine powder at a high yield.
CONSTITUTION: Ar is admitted 8 into a plasma torch 2, and the hot plasma is generated in the lower part of the torch 2 by the induction coil 3 connected to a high- frequency electric power source of 4MHz. On the other hand, H2 is admitted 9 in order to prevent the deposition of the reactant on the inside wall of the torch 2. In addition, CH4 is admitted 7 into a raw material feeder 1 containing Si of 325 mesh full pass, and the mixture of Si powder and CH4 is supplied into the hot plasma. Deposit is allowed to deposit on the water-cooled metal cylinder 5 installed on the lower stream of the tail frame part of the plasma. In this case, H2 is admitted 10 into this tail frame part to quickly cool the gas, whereby the deposit of ultrafine powder of ≤0.08μ grain size is obtained. In addition it is possible to control the grain sizes of the deposit by the amount of the above-described gas for quick cooling.
COPYRIGHT: (C)1981,JPO&Japio
JP54134231A 1979-10-19 1979-10-19 Ultrafine powder synthesis furnace Expired JPS5941772B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP54134231A JPS5941772B2 (en) 1979-10-19 1979-10-19 Ultrafine powder synthesis furnace

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP54134231A JPS5941772B2 (en) 1979-10-19 1979-10-19 Ultrafine powder synthesis furnace

Publications (2)

Publication Number Publication Date
JPS5658537A true JPS5658537A (en) 1981-05-21
JPS5941772B2 JPS5941772B2 (en) 1984-10-09

Family

ID=15123484

Family Applications (1)

Application Number Title Priority Date Filing Date
JP54134231A Expired JPS5941772B2 (en) 1979-10-19 1979-10-19 Ultrafine powder synthesis furnace

Country Status (1)

Country Link
JP (1) JPS5941772B2 (en)

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60239316A (en) * 1984-05-11 1985-11-28 Natl Inst For Res In Inorg Mater Manufacture of hyperfine sic powder
JPS61178413A (en) * 1985-02-02 1986-08-11 Toyota Motor Corp Production of silicon carbide powder
EP0199482A2 (en) * 1985-04-04 1986-10-29 Nippon Steel Corporation Processes for producing silicon carbide particles and sinter
WO2003097521A1 (en) * 2002-05-17 2003-11-27 Nano Plasma Center Co., Ltd. Inductively coupled plasma reactor for producing nano-powder
JP2008514806A (en) * 2004-08-28 2008-05-08 ナノ プラズマ センター カンパニー リミテッド Paramagnetic nanopowder, method for producing paramagnetic nanopowder, and composition containing paramagnetic nanopowder
JP2011157257A (en) * 2010-02-01 2011-08-18 Samsung Electro-Mechanics Co Ltd Nanoparticle synthesis apparatus and nanoparticle synthesis method using the same

Cited By (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60239316A (en) * 1984-05-11 1985-11-28 Natl Inst For Res In Inorg Mater Manufacture of hyperfine sic powder
JPH0124727B2 (en) * 1984-05-11 1989-05-12 Kagaku Gijutsucho Mukizaishitsu Kenkyushocho
JPS61178413A (en) * 1985-02-02 1986-08-11 Toyota Motor Corp Production of silicon carbide powder
EP0199482A2 (en) * 1985-04-04 1986-10-29 Nippon Steel Corporation Processes for producing silicon carbide particles and sinter
WO2003097521A1 (en) * 2002-05-17 2003-11-27 Nano Plasma Center Co., Ltd. Inductively coupled plasma reactor for producing nano-powder
KR100483886B1 (en) * 2002-05-17 2005-04-20 (주)엔피씨 Plasma reaction apparatus
US7323655B2 (en) 2002-05-17 2008-01-29 Nano Plasma Center Co., Ltd. Inductively coupled plasma reactor for producing nano-powder
CN100439237C (en) * 2002-05-17 2008-12-03 株式会社Npc Inductively coupled plasma reactor for producing nano-powder
JP2008514806A (en) * 2004-08-28 2008-05-08 ナノ プラズマ センター カンパニー リミテッド Paramagnetic nanopowder, method for producing paramagnetic nanopowder, and composition containing paramagnetic nanopowder
JP2011157257A (en) * 2010-02-01 2011-08-18 Samsung Electro-Mechanics Co Ltd Nanoparticle synthesis apparatus and nanoparticle synthesis method using the same

Also Published As

Publication number Publication date
JPS5941772B2 (en) 1984-10-09

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