ES346591A1 - Method and apparatus for feeding particulate material to a rotating vacuum vaporization crucible - Google Patents
Method and apparatus for feeding particulate material to a rotating vacuum vaporization crucibleInfo
- Publication number
- ES346591A1 ES346591A1 ES346591A ES346591A ES346591A1 ES 346591 A1 ES346591 A1 ES 346591A1 ES 346591 A ES346591 A ES 346591A ES 346591 A ES346591 A ES 346591A ES 346591 A1 ES346591 A1 ES 346591A1
- Authority
- ES
- Spain
- Prior art keywords
- opening
- crucible
- shield
- particulate material
- prevent
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/24—Vacuum evaporation
- C23C14/28—Vacuum evaporation by wave energy or particle radiation
- C23C14/30—Vacuum evaporation by wave energy or particle radiation by electron bombardment
Landscapes
- Chemical & Material Sciences (AREA)
- Health & Medical Sciences (AREA)
- Toxicology (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Physical Vapour Deposition (AREA)
- Silicon Compounds (AREA)
- Physical Or Chemical Processes And Apparatus (AREA)
Abstract
Particulate material, e.g. silica quartz, alumina or Cr is fed through an opening 12 into a crucible 11, which is rotated about its horizontal axis by a shaft 24, and is evaporated, in the cru- cible, by an electric beam.To prevent the electron beam from vapourizing the material in the opening 12, a shield 14 is provided, and also the material itself forms a shield at 17 due to the form it takes up. Before starting the process, silica moulded to the desired form may be inserted in the crucible. The crucible may be of copper and have a cooling chamber 21. The material is fed to the opening 12 from a vibrating hopper Fig. 4 (not shown). The temperature in the opening 12 may be sensed by a thermocouple 100. Oxygen may be bled into the apparatus to prevent silicon dioxide from decom- posing into the monoxide. Blades 82 prevent a build up of the material on the shield 14.
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US59065666A | 1966-10-31 | 1966-10-31 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| ES346591A1 true ES346591A1 (en) | 1969-01-01 |
Family
ID=24363121
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| ES346591A Expired ES346591A1 (en) | 1966-10-31 | 1967-10-30 | Method and apparatus for feeding particulate material to a rotating vacuum vaporization crucible |
Country Status (12)
| Country | Link |
|---|---|
| US (1) | US3504094A (en) |
| AT (1) | AT280727B (en) |
| BE (1) | BE705665A (en) |
| CH (1) | CH516004A (en) |
| DE (1) | DE1621205A1 (en) |
| ES (1) | ES346591A1 (en) |
| FR (1) | FR1541498A (en) |
| GB (1) | GB1181698A (en) |
| LU (1) | LU54738A1 (en) |
| NL (1) | NL6714814A (en) |
| NO (1) | NO119340B (en) |
| SE (1) | SE334519B (en) |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0722696B2 (en) * | 1989-07-29 | 1995-03-15 | 新日本製鐵株式會社 | Method and apparatus for producing fine powder and method of using the same |
| CN109594046B (en) * | 2019-01-23 | 2023-07-07 | 湖南宇晶机器股份有限公司 | Evaporation device for coating film |
| CN117885181B (en) * | 2024-03-14 | 2024-05-31 | 施密特钢轨技术（昆山）有限公司 | Sand water conservancy diversion subassembly is penetrated to crucible |
Family Cites Families (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US1193783A (en) * | 1916-08-08 | Iiousk | ||
| DE1175224B (en) * | 1959-04-17 | 1964-08-06 | Knapsack Ag | Device for the production of acetylene and ethylene by thermal splitting of hydrocarbons by means of a gaseous heat exchanger heated in an electric arc |
-
1966
- 1966-10-31 US US590656A patent/US3504094A/en not_active Expired - Lifetime
-
1967
- 1967-10-17 GB GB47166/67A patent/GB1181698A/en not_active Expired
- 1967-10-17 DE DE19671621205 patent/DE1621205A1/en active Pending
- 1967-10-20 FR FR125206A patent/FR1541498A/en not_active Expired
- 1967-10-25 LU LU54738D patent/LU54738A1/xx unknown
- 1967-10-26 BE BE705665D patent/BE705665A/xx unknown
- 1967-10-30 ES ES346591A patent/ES346591A1/en not_active Expired
- 1967-10-30 NO NO170317A patent/NO119340B/no unknown
- 1967-10-30 SE SE14822/67A patent/SE334519B/xx unknown
- 1967-10-31 CH CH1522667A patent/CH516004A/en not_active IP Right Cessation
- 1967-10-31 NL NL6714814A patent/NL6714814A/xx unknown
- 1967-10-31 AT AT985767A patent/AT280727B/en not_active IP Right Cessation
Also Published As
| Publication number | Publication date |
|---|---|
| SE334519B (en) | 1971-04-26 |
| CH516004A (en) | 1971-11-30 |
| NL6714814A (en) | 1968-05-01 |
| DE1621205A1 (en) | 1971-06-03 |
| GB1181698A (en) | 1970-02-18 |
| BE705665A (en) | 1968-03-01 |
| LU54738A1 (en) | 1968-01-26 |
| AT280727B (en) | 1970-04-27 |
| FR1541498A (en) | 1968-10-04 |
| NO119340B (en) | 1970-05-04 |
| US3504094A (en) | 1970-03-31 |
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